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Micromachined piezoelectric x-axis gyroscope

  • US 8,584,522 B2
  • Filed: 12/30/2010
  • Issued: 11/19/2013
  • Est. Priority Date: 04/30/2010
  • Status: Active Grant
First Claim
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1. A gyroscope, comprising:

  • a drive frame;

    a central anchor;

    a plurality of drive beams disposed on opposing sides of the central anchor, the drive beams connecting the drive frame to the central anchor, each of the drive beams including a piezoelectric layer and configured to cause the drive frame to oscillate torsionally in a plane of the drive beams;

    a proof mass; and

    a plurality of sense beams including a layer of piezoelectric sense electrodes, the sense beams configured for connecting the drive frame to the proof mass, the sense beams being configured to bend in a sense plane substantially perpendicular to the plane of the drive beams in response to an applied angular rotation, causing a piezoelectric charge in the sense electrodes wherein the sense beams are tapered sense beams having a width that decreases with increasing distance from the anchor.

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