Method of etching a silicon-based material

• US 8,585,918 B2
• Filed: 01/23/2007
• Issued: 11/19/2013
• Est. Priority Date: 01/23/2006
• Status: Expired due to Fees

• Current Assignee: Nexeon Limited
• Original Assignee: Nexeon Limited
• Inventors: Green, Mino, Liu, Feng-Ming
• Primary Examiner(s): HENDRICKSON, STUART L
• Application Number:
  US12/161,657
• Publication Number:
  US 20100233539A1
• Time in Patent Office: 2,492 Days
• Field of Search: 216/11, 216/40, 216/99, 429/218.1
• US Class Current: 216/99
• CPC Class Codes: C09K 13/08 containing a fluorine compound
• CPC Class Codes: C30B 29/06 Silicon
• CPC Class Codes: C30B 33/10 in solutions or melts
• CPC Class Codes: H01L 21/30608 Anisotropic liquid etching H01L21/3063 takes precedence
• CPC Class Codes: H01M 10/052 Li-accumulators
• CPC Class Codes: H01M 4/134 Electrodes based on metals, Si or alloys
• CPC Class Codes: H01M 4/70 characterised by shape or form
• CPC Class Codes: Y02E 60/10 Energy storage using batteries

Abstract

A method is described of selectively etching a silicon substrate in small local areas in order to form columns or pillars in the etched surface. The silicon substrate is held in an etching solution of hydrogen fluoride, a silver salt and an alcohol. The inclusion of the alcohol provides a greater packing density of the silicon columns.

Claims

1. A method of etching a silicon substrate to create silicon pillars on the silicon substrate, the method comprising contacting the silicon substrate with an aqueous solution of:

a fluoride acid or a fluoride salt,

a silver salt capable of electroless deposition of the metal on the silicon in the presence of fluoride ions, and

an alcohol.

2. A method as claimed in claim 1 in which the silver salt comprises silver nitrate.

3. A method as claimed in claim 2 in which the silver salt comprises a silver nitrate and wherein the silver nitrate content of the solution is in the range of 0.2 to 16% by weight.

4. A method as claimed in claim 1 in which the silver salt content of the solution is in the range of 5 to 100 mM.

5. A method as claimed in claim 1 in which the fluoride acid comprises hydrogen fluoride whose content is between 3 and 20% by weight.

6. A method as claimed in claim 1 in which the etching fluoride acid comprises hydrogen fluoride whose content is between 1.5 and 10M.

7. A method as claimed in claim 1 in which the alcohol comprises ethanol.

8. A method as claimed in claim 1 in which the alcohol content is in the range of up to 40% by volume.

9. A method as claimed in claim 1 further comprising the stage of allowing the substrate to stand in solution at a temperature in the range 0°

C. to -30°

C.

10. A method as claimed in claim 9, wherein said standing step lasts for a period in the region of 5 to 50 minutes.

11. A method as claimed in claim 1 further comprising raising the temperature of the solution to a temperature in the range 40°

C. to 75°

C.

12. A method as claimed in claim 11, wherein the substrate is allowed to stand in the solution at the raised temperature for a period in the region of 30 to 100 minutes.

13. A method as claimed in claim 1 further comprising adding additional silver salt or a ferric salt or another species giving rise to nitrate ions during the course of the method.

14. A method as claimed in claim 13 wherein the amount of the additional silver salt or ferric salt or another species giving rise to nitrate ions added is in the range of 0.1 to 2% by weight.

15. A method as claimed in claim 13 wherein the additional silver salt or ferric salt or other species giving rise to nitrate ions is added in an amount that increases the silver or ferric or other species giving rise to nitrate ions concentration of the solution by 2 mM to 6 mM.

16. A method as claimed in claim 13 including raising the temperature of the solution and, in which the additional silver salt or the ferric salt or other species giving rise to nitrate ions is added upon raising the temperature.

17. A method as claimed in claim 16 in which a first additional amount of a silver salt or ferric salt or other species giving rise to nitrate ions is added upon raising the temperature and then at least one further additional amount of a silver salt or ferric salt or other species giving rise to nitrate ions is added subsequently.

18. A method of etching a silicon substrate as claimed in claim 1 wherein the said contacting step forms a first stage using a first solution and the method further comprises:

a second stage comprising contacting the silicon substrate with a second solution comprising a fluoride acid and a ferric salt or another species giving rise to nitrate ions.

19. A method as claimed in claim 18, wherein the substrate is allowed to stand in the first solution for a period in the region of up 15 minutes.

20. A method as claimed in claim 18 wherein the second stage is conducted at a temperature above that of the first stage.

21. A method as claimed in claim 18 wherein the second stage is conducted for a period in the region of 40 to 50 minutes.

22. A method as claimed in claim 18 wherein the second solution includes a silver salt.

23. A method as claimed in claim 18, further comprising adding a silver salt or additional ferric salt or other species giving rise to nitrate ions to the second solution during the second stage.

24. A method as claimed in claim 23, wherein the amount of further silver or additional ferric salt or other species giving rise to nitrate ions that is added in an amount that increases the silver or ferric concentration of the solution by up to 10 mM.

25. A method as claimed in claim 23 in which the silver salt or additional ferric salt or other species giving rise to nitrate ions is added to the second solution in two or more occasions.

26. A method as claimed in claim 18 wherein the substrate is allowed to stand in the second solution for a period in the region of 40 to 50 minutes.

27. A method as claimed in claim 1 in which etching is performed on the {100} plane or the {110} plane or the {111} plane.

28. A method as claimed in claim 1 in which the etching is performed electrolessly.

29. A method of etching a silicon substrate to create silicon pillars on the silicon substrate, the method comprising contacting the silicon substrate with an aqueous solution of:

a fluoride acid or a fluoride salt,

metal salt capable of electroless deposition of the metal on the silicon in the presence of fluoride ions, and

an alcohol, wherein the metal salt content of the solution is in the range of 5 to 100 mM.

30. A method as claimed in claim 29 in which the etching fluoride acid comprises hydrogen fluoride whose content is between 1.5 and 10M.

31. A method as claimed in claim 29 in which the alcohol comprises ethanol.

32. A method as claimed in claim 29 in which the alcohol content is in the range of up to 40% by volume.

33. A method as claimed in claim 29 further comprising the stage of allowing the substrate to stand in solution at a temperature in the range 0 °

C. to 30 °

C.

34. A method as claimed in claim 29 in which the metal salt comprises a silver salt.

35. A method as claimed in claim 29 in which the etching is performed electrolessly.