Nano-sensor array

• US 8,585,973 B2
• Filed: 05/27/2011
• Issued: 11/19/2013
• Est. Priority Date: 05/27/2011
• Status: Active Grant

• Current Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Original Assignee: Board of Trustees of the Leland Stanford Junior University (Stanford University)
• Inventors: Esfandyarpour, Hesaam
• Primary Examiner(s): MERKLING, SALLY ANNE
• Application Number:
  US13/118,044
• Publication Number:
  US 20120302454A1
• Time in Patent Office: 907 Days
• Field of Search: 324/600, 257/14, 257/414, 977/742, 435/174, 435/183, 435/435, 435/287.2, 435/6.11, 435/7.1, 435/455, 422/82.01, 422/82.02, 422/82.03, 422/76
• US Class Current: 422/82.01
• CPC Class Codes: B82Y 15/00 Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
• CPC Class Codes: B82Y 40/00 Manufacture or treatment of nanostructures
• CPC Class Codes: C12Q 1/6825 Nucleic acid detection involving sensors
• CPC Class Codes: C40B 60/12 for screening libraries
• CPC Class Codes: G01N 27/3278 involving nanosized elements, e.g. nanogaps or nanoparticles nanopores G01N33/48721; magnetic beads G01N27/745
• CPC Class Codes: G01N 33/49 Blood chemical methods for determining blood cell populations G01N33/5094; chemical analysis of blood groups or blood types G01N33/80
• CPC Class Codes: Y10T 29/49826 Assembling or joining

Abstract

In one embodiment, a method is provided for the manufacture of a nano-sensor array. A base having a sensing region is provided along with a plurality of nano-sensors. Each of the plurality of nano-sensors is formed by: forming a first nanoneedle along a surface of the base, forming a dielectric on the first nanoneedle, and forming a second nanoneedle on the dielectric layer. The first nanoneedle of each sensor has a first end adjacent to the sensing region of the base. The second nanoneedle is separated from the first nanoneedle by the dielectric and has a first end adjacent the first end of the first nanoneedle. The base is provided with a fluidic channel. The plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends proximate the fluidic channel to facilitate sensing of targeted matter in the fluidic channel.

Claims

1. A method comprising:

providing a base with a fluidic channel and a plurality of nano-sensors; and

forming each of the plurality of nano-sensors by;

forming a first nanoneedle along a surface of the base, the first nanoneedle having a first end in a first region,

forming a dielectric on the first nanoneedle, and

forming a second nanoneedle on the dielectric, the second nanoneedle separated from the first nanoneedle by the dielectric and having a first end adjacent the first end of the first nanoneedle,

wherein the plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends in the fluidic channel to facilitate sensing of targeted matter in the fluidic channel via an impedance between the first and second nanoneedles that is responsive to the presence of the targeted matter; and

wherein providing the base with the fluidic channel includes etching the fluidic channel into the base including a portion located below a portion of the first nanoneedle extending over the fluidic channel.

2. A method comprising:

providing a base with a fluidic channel and a plurality of nano-sensors; and

forming each of the plurality of nano-sensors by;

forming a first nanoneedle along a surface of the base, the first nanoneedle having a first end in a first region,

forming a dielectric on the first nanoneedle, and

forming a second nanoneedle on the dielectric, the second nanoneedle separated from the first nanoneedle by the dielectric and having a first end adjacent the first end of the first nanoneedle,

wherein the plurality of nano-sensors and the fluidic channel are configured and arranged with the first ends in the fluidic channel to facilitate sensing of targeted matter in the fluidic channel via an impedance between the first and second nanoneedles that is responsive to the presence of the targeted matter; and

wherein the method further includes depositing a material on the base to form sidewalls of the fluidic channel above the nano-sensors.