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Method for producing a subminiature “micro-chip” oxygen sensor for control of internal combustion engines or other combustion processes, oxygen sensor and an exhaust safety switch

  • US 8,586,394 B2
  • Filed: 12/29/2010
  • Issued: 11/19/2013
  • Est. Priority Date: 01/29/2010
  • Status: Active Grant
First Claim
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1. A method of making an oxygen sensor, comprising:

  • depositing on a dielectric substrate multiple resistive heater circuits;

    depositing second dielectric layers on the resistive heater circuits;

    depositing conductive intermeshing comb electrodes on the dielectric layer or on the substrate on the opposite side of the heater pattern;

    applying one of n-type or p-type high temperature semiconductors on the comb electrodes bridging the gap between the legs of the combs;

    applying porous dielectric protective layers containing catalytic precious metals on the semiconductors; and

    isolating individual elements via a singulation process to produce multiple individual oxygen or gas sensor elements.

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