Semiconductor device and manufacturing method thereof
First Claim
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1. A display device comprising:
- a thin film transistor over a substrate;
a capacitor wiring line over the substrate;
a conductive layer over the substrate and electrically connected to a drain of the thin film transistor wherein a capacitor is formed between the capacitor wiring line and the conductive layer with at least a first insulating film interposed therebetween;
a second insulating film comprising a resin over the thin film transistor and the conductive layer wherein at least a portion of the second insulating film has a roughened upper surface;
a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film;
a terminal portion over the substrate, the terminal portion comprising;
a first conductive layer over the substrate, the first conductive layer comprising a same material as a gate electrode of the thin film transistor; and
a second conductive layer over and in electrical contact with the first conductive layer; and
a flexible printed circuit in electrical contact with the terminal portion.
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Abstract
[Summary]
[Problem]
A TFT is manufactured using at least five photomasks in a conventional liquid crystal display device, and therefore the manufacturing cost is high.
[Solving Means]
By performing the formation of the pixel electrode 127, the source region 123 and the drain region 124 by using three photomasks in three photolithography steps, a liquid crystal display device prepared with a pixel TFT portion, having a reverse stagger type n-channel TFT, and a storage capacitor can be realized.
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Citations
24 Claims
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1. A display device comprising:
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a thin film transistor over a substrate; a capacitor wiring line over the substrate; a conductive layer over the substrate and electrically connected to a drain of the thin film transistor wherein a capacitor is formed between the capacitor wiring line and the conductive layer with at least a first insulating film interposed therebetween; a second insulating film comprising a resin over the thin film transistor and the conductive layer wherein at least a portion of the second insulating film has a roughened upper surface; a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film; a terminal portion over the substrate, the terminal portion comprising; a first conductive layer over the substrate, the first conductive layer comprising a same material as a gate electrode of the thin film transistor; and a second conductive layer over and in electrical contact with the first conductive layer; and a flexible printed circuit in electrical contact with the terminal portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A display device comprising:
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a gate electrode over a substrate; a capacitor wiring line over the substrate; a first insulating film over the gate electrode and the capacitor wiring line; a first semiconductor layer including a channel formation region over the gate electrode with the first insulating film interposed therebetween; a pair of second semiconductor layers containing an impurity element which impart n-type conductivity thereto, over the first semiconductor layer; a first conductive layer on one of the pair of second semiconductor layers; a second conductive layer over the capacitor wiring line with at least the first insulating film interposed therebetween to form a capacitor between the second conductive layer and the capacitor wiring line wherein the second conductive layer is electrically connected to the first conductive layer; a second insulating film comprising a resin over the first conductive layer and the second conductive layer, wherein at least a portion of the second insulating film has a roughened upper surface; a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the first conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film; and a terminal portion over the substrate, the terminal portion comprising; a third conductive layer over the substrate, the third conductive layer comprising a same material as the gate electrode; and a fourth conductive layer over and in electrical contact with the third conductive layer; and a flexible printed circuit in electrical contact with the terminal portion. - View Dependent Claims (10, 11, 12, 13, 14, 15)
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16. A display device comprising:
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a gate electrode over a substrate; a capacitor wiring line over the substrate; a first insulating film over the gate electrode and the capacitor wiring line; a first semiconductor layer including a channel formation region over the gate electrode with the first insulating film interposed therebetween; a pair of second semiconductor layers containing an impurity element which impart n-type conductivity thereto, over the first semiconductor layer; a first conductive layer on one of the pair of second semiconductor layers; a second conductive layer over the capacitor wiring line with at least the first insulating film interposed therebetween to form a capacitor between the second conductive layer and the capacitor wiring line wherein the second conductive layer is electrically connected to the first conductive layer; a second insulating film comprising a resin over the first conductive layer and the second conductive layer, wherein at least a portion of the second insulating film has a roughened upper surface; and a pixel electrode including a reflective conductive film over the second insulating film and electrically connected to the first conductive layer through a hole in the second insulating film wherein at least a portion of the reflective conductive film has a rough surface due to the roughened upper surface of the second insulating film; and a terminal portion over the substrate, the terminal portion comprising; a third conductive layer over the substrate, the third conductive layer comprising a same material as the gate electrode; and a fourth conductive layer over and in electrical contact with the third conductive layer, wherein the third conductive layer, the gate electrode and the capacitor wiring line are formed by patterning a first conductive film, and wherein the second conductive layer and the first conductive layer are formed by patterning a second conductive film; and a flexible printed circuit in electrical contact with the terminal portion. - View Dependent Claims (17, 18, 19, 20, 21, 22, 23, 24)
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Specification