Gateless switch with capacitively-coupled contacts

• US 8,587,028 B2
• Filed: 01/03/2010
• Issued: 11/19/2013
• Est. Priority Date: 01/06/2009
• Status: Active Grant

• Current Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Original Assignee: Sensor Electronic Technology Incorporated (Seoul Semiconductor Co., Ltd.)
• Inventors: Simin, Grigory, Shur, Michael, Gaska, Remigijus
• Primary Examiner(s): Sandvik, Benjamin
• Assistant Examiner(s): Cruz, Leslie Pilar
• Application Number:
  US12/651,470
• Publication Number:
  US 20100175979A1
• Time in Patent Office: 1,416 Days
• Field of Search: None
• US Class Current: 257/192
• CPC Class Codes: H01H 2001/0078 with parallel movement of the movable contact relative to the substrate
• CPC Class Codes: H01H 59/0009 making use of micromechanics
• CPC Class Codes: H01L 2223/6627 Waveguides, e.g. microstrip line, strip line, coplanar line
• CPC Class Codes: H01L 23/66 High-frequency adaptations
• CPC Class Codes: H01L 27/0605 integrated circuits made of compound material, e.g. AIIIBV
• CPC Class Codes: H01L 29/0692 Surface layout
• CPC Class Codes: H01L 29/2003 Nitride compounds
• CPC Class Codes: H01L 29/772 Field effect transistors
• CPC Class Codes: H01L 29/8605 Resistors with PN junctions
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H01L 2924/12044 OLED
• CPC Class Codes: H01L 2924/19032 being a microstrip line type
• CPC Class Codes: H01L 2924/19051 Impedance matching structure [e.g. balun]
• CPC Class Codes: H01L 2924/3011 Impedance
• CPC Class Codes: H01P 1/15 by semiconductor devices

Abstract

A switch includes an input contact and an output contact to a conducting channel. At least one of the input and output contacts is capacitively coupled to the conducting channel. A control contact is located outside of a region between the input and output contacts, and can be used to adjust the switch between on and off operating states. The switch can be implemented as a radio frequency switch in a circuit.

Claims

1. A switch comprising:

a conducting channel;

an input contact to the conducting channel;

an output contact to the conducting channel, wherein the input contact and the output contact form opposing sides of an input-output region, and wherein at least one of the input contact or the output contact is capacitively coupled to the conducting channel; and

at least one control contact located outside of the input-output region, wherein the at least one control contact includes a first control contact located adjacent to the input contact and a second control contact located adjacent to the output contact.

2. The switch of claim 1, wherein the at least one control contact is capacitively coupled to the conducting channel.

3. The switch of claim 1, wherein the at least one control contact is an ohmic contact to the conducting channel.

4. The switch of claim 1, wherein the at least one control contact is located on an opposing side of the conducting channel from the input contact and the output contact.

5. The switch of claim 4, wherein the at least one control contact comprises a conducting substrate.

6. The switch of claim 1, further comprising:

a barrier layer comprising a wide band gap, wherein the input contact and the output contact are located over the barrier layer; and

a buffer layer comprising a band gap narrower than the barrier layer, wherein the conducting channel is formed at an interface of the barrier layer and the buffer layer.

7. The switch of claim 6, further comprising an insulating layer located over the barrier layer, wherein the input contact and the output contact are located over the insulating layer.

8. The switch of claim 1, further comprising an insulating layer located in the input-output region, wherein the insulating layer is electrically connected to the input contact and the output contact.

9. The switch of claim 1, wherein the conducting channel is doped with impurities.

10. A switch comprising:

a conducting channel;

an input contact to the conducting channel;

an output contact to the conducting channel, wherein the input contact and the output contact form opposing sides of an input-output region, and wherein at least one of the input contact or the output contact is capacitively coupled to the conducting channel;

an insulating layer located in the input-output region, wherein the insulating layer is electrically connected to the input contact and the output contact;

at least one control contact located outside of the input-output region; and

a second insulating layer located between the input contact and one of the at least one control contact and a third insulating layer located between the output contact and another one of the at least one control contact.

11. A switch comprising:

a conducting channel;

an input contact to the conducting channel;

an output contact to the conducting channel, wherein the input contact and the output contact form opposing sides of an input-output region, and wherein at least one of the input contact or the output contact is capacitively coupled to the conducting channel;

at least one control contact located outside of the input-output region; and

a second conducting channel, wherein the input contact, the output contact and the at least one control contact are coupled to the second conducting channel, and wherein at least one of the input contact or the output contact is capacitively coupled to the second conducting channel.

12. A circuit comprising:

a radio frequency (RF) switch including;

a conducting channel;

an input contact to the conducting channel;

an output contact to the conducting channel, wherein the input contact and the output contact form opposing sides of an input-output region, and wherein at least one of the input contact or the output contact is capacitively coupled to the conducting channel; and

at least one control contact located outside of the input-output region, wherein the at least one control contact is an ohmic contact to the conducting channel;

a RF source electrically connected to the input contact;

a RF output electrically connected to the output contact; and

a RF control circuit electrically connected to the at least one control contact.

13. The circuit of claim 12, wherein the RF control circuit is configured to turn the RF switch off by generating a reverse voltage bias at the input and output contacts with respect to the conducting channel using the at least one control contact.

14. The circuit of claim 12, wherein the RF control circuit is configured to turn the RF switch on by generating one of:

a zero voltage or a forward voltage bias at the input and output contacts with respect to the conducting channel using the at least one control contact.

15. The circuit of claim 12, wherein the input contact is monolithically integrated with the RF input and the output contact is monolithically integrated with the RF output.

16. The circuit of claim 12, wherein the switch further includes an insulating layer located in the input-output region, wherein the insulating layer is electrically connected to the input contact and the output contact.

17. A switch comprising:

a barrier layer comprising a wide band gap; and

a buffer layer comprising a band gap narrower than the barrier layer, wherein a conducting channel is formed at an interface of the barrier layer and the buffer layer, and wherein the conducting channel is doped with impurities;

an input contact to the conducting channel;

an output contact to the conducting channel, wherein the input contact and the output contact form opposing sides of an input-output region, wherein the input contact and the output contact are located over the barrier layer, and wherein the input contact and the output contact are capacitively coupled to the conducting channel; and

at least one control contact located outside of the input-output region.

18. The switch of claim 17, further comprising an insulating layer located over the barrier layer, wherein the input contact and the output contact are located over the insulating layer.

19. The switch of claim 17, further comprising an insulating layer located in the input-output region, wherein the insulating layer is electrically connected to the input contact and the output contact.

20. The switch of claim 17, wherein the at least one control contact includes a first control contact located adjacent to the input contact on a side opposite the output contact and a second control contact located adjacent to the output contact on a side opposite the input contact.