Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method

• US 8,587,764 B2
• Filed: 02/12/2008
• Issued: 11/19/2013
• Est. Priority Date: 03/13/2007
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Kita, Naonori
• Primary Examiner(s): Ton, Toan
• Assistant Examiner(s): RIDDLE, CHRISTINA A
• Application Number:
  US12/068,818
• Publication Number:
  US 20080225256A1
• Time in Patent Office: 2,107 Days
• Field of Search: 355/52, 355/53, 355/55, 355 67- 71, 359/619, 359/621, 359/622, 359/623, 359/624, 359/626, 430/5, 430/8, 430/22, 430/30, 430/311, 430/312, 430/321, 250/492.1, 250/492.2, 250/492.22, 250/548
• US Class Current: 355/67
• CPC Class Codes: G02B 27/0927 Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
• CPC Class Codes: G02B 27/0966 Cylindrical lenses cylindrical lenses per se G02B3/06
• CPC Class Codes: G03F 7/70075 Homogenization of illumination intensity in the mask plane by using an integrator, e.g. fly's eye lens, facet mirror or glass rod, by using a diffusing optical element or by beam deflection

Abstract

An optical integrator system comprises a first optical integrator including a plurality of first wavefront dividing elements two-dimensionally juxtaposed, and a second optical integrator including a plurality of second wavefront dividing elements two-dimensionally juxtaposed. Each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. Each of the second wavefront dividing elements is also so constructed that rays obliquely incident to a center on an optical axis of an entrance surface are emitted in parallel with the optical axis. The system satisfies the condition of P2/(2×tan θ)<L12.

Claims

1. An optical integrator system comprising a first optical integrator including a plurality of first wavefront dividing elements juxtaposed, and a second optical integrator including a plurality of second wavefront dividing elements juxtaposed, said first optical integrator and said second optical integrator being arranged in order from an entrance side of light;

wherein each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the first wavefront dividing element are emitted in parallel with the optical axis from the first wavefront dividing element;

each of the second wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the second wavefront dividing element are emitted in parallel with the optical axis from the second wavefront dividing element;

a spacing L12 between an exit surface of the first optical integrator and an entrance surface of the second optical integrator satisfies the condition of P2/(2×

tan θ

)<

L12,

where P2 is a pitch along a predetermined direction of the second wavefront dividing elements, and θ

a maximum exit angle (half angle) along the predetermined direction of light from the first wavefront dividing elements; and

no lens or optical element having optical power is arranged in the optical path between the first optical integrator and the second optical integrator.

2. The optical integrator system according to claim 1, wherein the spacing L12 satisfies the condition of L12<

D2/(2×

tan θ

),

where D2 is a length along the predetermined direction of the entrance surface of the second optical integrator.

3. The optical integrator system according to claim 2, wherein the pitch P2 along the predetermined direction of the second wavefront dividing elements is substantially different from an integral multiple of a pitch P1 along the predetermined direction of the first wavefront dividing elements.

4. The optical integrator system according to claim 3,

wherein each of the first wavefront dividing elements is so constructed that a first maximum exit angle (half angle) of light from the first wavefront dividing element made by light incident along a direction of the optical axis to the entrance surface of the first wavefront dividing element is equal to a second maximum exit angle (half angle) of light from the first wavefront dividing element made by light incident along an oblique direction to the optical axis to the entrance surface of the first wavefront dividing element, and

each of the second wavefront dividing elements is so constructed that a third maximum exit angle (half angle) of light from the second wavefront dividing element made by light incident along a direction of the optical axis to the entrance surface of the second wavefront dividing element is equal to a fourth maximum exit angle (half angle) of light from the second wavefront dividing element made by light incident along an oblique direction to the optical axis to the entrance surface of the second wavefront dividing element.

5. The optical integrator system according to claim 4, wherein the second optical integrator comprises a single optical member, and

wherein the single optical member includes a plurality of entrance refracting surfaces of a curved shape two-dimensionally juxtaposed, and a plurality of exit refracting surfaces of a curved shape two-dimensionally juxtaposed.

6. The optical integrator system according to claim 4, wherein the second optical integrator comprises a first optical member and a second optical member arranged in order from the entrance side of light, and

each of the first optical member and the second optical member includes a plurality of entrance refracting surfaces of a cylindrical shape arranged in juxtaposition in one direction, and a plurality of exit refracting surfaces of a cylindrical shape arranged in juxtaposition in another direction.

7. An illumination optical apparatus for illuminating a surface to be illuminated by light from a light source, the illumination optical apparatus comprising the optical integrator system as set forth in claim 1, said optical integrator system being arranged in an optical path between the light source and the surface to be illuminated.

8. The illumination optical apparatus according to claim 7, comprising a movable optical member movably arranged in an optical path between the light source and the optical integrator system.

9. An exposure apparatus comprising the illumination optical apparatus as set forth in claim 8, for illuminating a predetermined pattern, whereby a photosensitive substrate is exposed with the predetermined pattern.

10. The exposure apparatus according to claim 9, comprising a projection optical system for forming an image of the predetermined pattern on the photosensitive substrate, wherein the predetermined pattern and the photosensitive substrate are moved along a scanning direction relative to the projection optical system whereby the predetermined pattern is projected onto the photosensitive substrate to effect projection exposure of the photosensitive substrate with the predetermined pattern.

11. The exposure apparatus according to claim 10, wherein the predetermined direction in the optical integrator system corresponds to a direction perpendicular to the scanning direction on the photosensitive substrate.

12. A device manufacturing method comprising:

exposing the photosensitive substrate with the predetermined pattern, using the exposure apparatus as set forth in claim 9; and

developing the exposed photosensitive substrate.

13. An optical integrator system comprising an optical member including a plurality of optical elements juxtaposed and forming a uniform exit angle, and an optical integrator including a plurality of wavefront dividing elements juxtaposed, said optical member and said optical integrator being arranged in order from an entrance side of light;

wherein each of the optical elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the optical element are emitted in parallel with the optical axis from the optical element;

each of the wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the wavefront dividing element are emitted in parallel with the optical axis from the wavefront dividing element;

one optical element of the optical member illuminates a region larger than an entrance surface of one wavefront dividing element of the optical integrator and illuminates a region smaller than an entrance surface of the optical integrator, and

no lens or optical element having optical power is arranged in the optical path between said optical member and said optical integrator.

14. The optical integrator system according to claim 13,

wherein each of the optical elements is so constructed that a first maximum exit angle (half angle) of light from the optical element made by light incident along a direction of the optical axis to the entrance surface of the optical element is equal to a second maximum exit angle (half angle) of light from the optical element made by light incident along an oblique direction to the optical axis to the entrance surface of the optical element;

and

each of the wavefront dividing elements is so constructed that a third maximum exit angle (half angle) of light from the wavefront dividing element made by light incident along the direction of the optical axis to the entrance surface of the wavefront dividing element is equal to a fourth maximum exit angle (half angle) of light from the wavefront dividing element made by light incident along an oblique direction to the optical axis to the entrance surface of the wavefront dividing element.

15. An illumination optical apparatus for illuminating a surface to be illuminated by light from a light source, the illumination optical apparatus comprising the optical integrator system as set forth in claim 13, said optical integrator system being arranged in an optical path between the light source and the surface to be illuminated.

16. The illumination optical apparatus according to claim 15, comprising a movable optical member movably arranged in an optical path between the light source and the optical integrator system.

17. An exposure apparatus comprising the illumination optical apparatus as set forth in claim 16, for illuminating a predetermined pattern, whereby a photosensitive substrate is exposed with the predetermined pattern.

18. The exposure apparatus according to claim 17, comprising a projection optical system for forming an image of the predetermined pattern on the photosensitive substrate, wherein the predetermined pattern and the photosensitive substrate are moved along a scanning direction relative to the projection optical system whereby the predetermined pattern is projected onto the photosensitive substrate to effect projection exposure of the photosensitive substrate with the predetermined pattern.

19. The exposure apparatus according to claim 18, wherein the predetermined direction in the optical integrator system corresponds to a direction perpendicular to the scanning direction on the photosensitive substrate.

20. A device manufacturing method comprising:

exposing the photosensitive substrate with the predetermined pattern, using the exposure apparatus as set forth in claim 17; and

developing the exposed photosensitive substrate.