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Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing method

  • US 8,587,764 B2
  • Filed: 02/12/2008
  • Issued: 11/19/2013
  • Est. Priority Date: 03/13/2007
  • Status: Active Grant
First Claim
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1. An optical integrator system comprising a first optical integrator including a plurality of first wavefront dividing elements juxtaposed, and a second optical integrator including a plurality of second wavefront dividing elements juxtaposed, said first optical integrator and said second optical integrator being arranged in order from an entrance side of light;

  • wherein each of the first wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the first wavefront dividing element are emitted in parallel with the optical axis from the first wavefront dividing element;

    each of the second wavefront dividing elements is so constructed that rays obliquely incident to a center on an optical axis of an entrance surface of the second wavefront dividing element are emitted in parallel with the optical axis from the second wavefront dividing element;

    a spacing L12 between an exit surface of the first optical integrator and an entrance surface of the second optical integrator satisfies the condition of P2/(2×

    tan θ

    )<

    L12,where P2 is a pitch along a predetermined direction of the second wavefront dividing elements, and θ

    a maximum exit angle (half angle) along the predetermined direction of light from the first wavefront dividing elements; and

    no lens or optical element having optical power is arranged in the optical path between the first optical integrator and the second optical integrator.

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