Miniature fourier transform spectrometer and method of operation

• US 8,587,787 B2
• Filed: 12/28/2007
• Issued: 11/19/2013
• Est. Priority Date: 11/14/2007
• Status: Active Grant

• Current Assignee: Block Engineering, LLC
• Original Assignee: Block Engineering, LLC
• Inventors: Reyes, David, Schildkraut, E. Robert, Kim, Jinhong
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): HANSEN, JONATHAN M
• Application Number:
  US11/966,594
• Publication Number:
  US 20100284017A1
• Time in Patent Office: 2,153 Days
• Field of Search: 356/452, 356/451, 356/454
• US Class Current: 356/451
• CPC Class Codes: G01B 9/02051 Integrated design, e.g. on-chip or monolithic
• CPC Class Codes: G01J 3/4535 Devices with moving mirror G01J3/4532 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A Micro-Electro-Mechanical Systems (MEMS) interferometer is implemented in a Fourier transform spectrometer, which includes a common housing containing the interferometer and a gas cell, possibly including a preconcentrator. The interferometer system includes an optical bench and at least two mirror structures, being patterned from one or more layers on the optical bench and erected to extend substantially perpendicularly to the bench to define two interferometer arms to provide a MEMS interferometer.

Claims

1. A spectroscopy system, comprising:

a gas cell for enclosing a gas to be analyzed;

a light source for generating an optical signal to illuminate said gas in the gas cell;

a battery for providing power to the light source;

an interferometer system including two arms defined by a fixed mirror and a movable mirror, a beam splitter and a detector for receiving an optical signal from said mirrors after passing through the gas in the gas cell and detecting interference of the optical signal from the two arms;

a controller to control the light source and a mirror actuator for moving the movable mirror, and to determine a spectral response of the gas in the gas cell;

a microelectromechanical systems optical bench for supporting the interferometer system, wherein the fixed mirror and the beam splitter are fabricated by a silicon surface micromachining on the bench and are each held vertical to the bench with latches that extend between the fixed mirror and the beam splitter and the bench; and

a housing of the spectroscopy system being shaped and smaller in volume than 100 cubic millimeters, said housing containing the optical bench, the gas cell, the light source, the battery, the interferometer system and the controller,

wherein the housing further comprises elongated slit openings for allowing gas from an environment to enter the gas cell within the housing.

2. A system as claimed in claim 1, further comprising a preconcentrator for absorbing gas species of interest and adsorbing the gas species into the sample cell.

3. A system as claimed in claim 1, wherein a length of the housing is less than 200 millimeters.

4. A system as claimed in claim 1, further comprising an attenuated total reflection cell for containing the species.

5. A system as claimed in claim 1, further comprising a temperature controller for controlling a temperature of the optical bench.

6. A system as claimed in claim 1, further comprising a thermoelectric cooler for controlling a temperature of the optical bench.

7. A system as claimed in claim 1, wherein the detector is installed on the bench.

8. A system as claimed in claim 1, wherein a cylindrical diameter of the housing is less than 20 millimeters.

9. A spectroscopy system, comprising:

a cylindrical shaped housing for allowing gas from an environment to enter a gas cell within the housing;

a light source, within the housing, for generating an optical signal to illuminate the gas within the gas cell;

an optical bench in the housing for processing the optical signal illuminating the gas with a silicon surface micromachined interferometer;

a preconcentrator with in the housing for absorbing gas species of interest and adsorbing the gas species into the gas cell; and

a battery within the housing for powering the light source,

wherein the housing further comprises elongated slit openings for allowing gas from the environment to enter the gas cell within the housing.

10. A system as claimed in claim 9, wherein the housing is smaller in volume than 100 millimeters cubed.

11. A system as claimed in claim 10, wherein the housing is less than 200 millimeters long.

12. A system as claimed in claim 10, wherein the housing is less than 20 millimeters in diameter.

13. A system as claimed in claim 10, wherein the optical bench divides the optical signal between two interferometer arms and detects interference of the optical signal from the two arms.

14. A system as claimed in claim 10, further comprising a mirror in the housing for reflecting the optical signal from the light source to the optical bench.

15. A system as claimed in claim 10, wherein the light source is installed on the bench.

16. A system as claimed in claim 15, further comprising a detector installed on the bench to detect the optical signal from the gas cell.

17. A spectroscopy system, comprising:

a gas cell for enclosing a gas to be analyzed;

a light source for generating an optical signal to illuminate said gas in the gas cell;

a battery for providing power to the light source;

an interferometer system including two arms defined by a fixed mirror and a movable mirror within the gas cell, a beam splitter and a detector for receiving an optical signal from said mirrors after passing through the gas and detecting interference of the optical signal from the two arms;

a controller to control the light source and a mirror actuator for moving the movable mirror, and to determine a spectral response of the gas in the gas cell;

a microelectromechanical systems optical bench for supporting the light source and the interferometer system, wherein the fixed mirror and the beam splitter are fabricated by a silicon surface micromachining on the bench and are each held vertical to the bench with latches that extend between the fixed mirror and the beam splitter and the bench; and

a housing of the spectroscopy system being cylindrically shaped, less than 20 mm in diameter and less than 200 millimeters in length, said housing containing the optical bench, the gas cell, the light source, the battery, the interferometer system and the controller,

wherein the housing further comprises elongated slit openings for allowing gas from an environment to enter the gas cell within the housing.