Evaporator with internal restriction

• US 8,590,338 B2
• Filed: 12/31/2009
• Issued: 11/26/2013
• Est. Priority Date: 12/31/2009
• Status: Active Grant

• Current Assignee: Samsung Display Company Limited (Samsung Electronics Co. Ltd.)
• Original Assignee: Samsung Mobile Display Company Limited (Samsung Electronics Co. Ltd.)
• Inventors: Boesch, Damien, Rosenblum, Martin
• Primary Examiner(s): Jules, Frantz
• Assistant Examiner(s): MENDOZA-WILKENFE, ERIK
• Application Number:
  US12/650,586
• Publication Number:
  US 20110154854A1
• Time in Patent Office: 1,426 Days
• Field of Search: 165/911, 625/15, 625/17, 625/27, 285/201, 285/205, 285/208, 219/386, 219/399, 219/397, 118/726, 118/727, 427/248.1
• US Class Current: 62/527
• CPC Class Codes: B01B 1/06 Preventing bumping
• CPC Class Codes: B05B 17/06 using ultrasonic or other kinds of vibrations
• CPC Class Codes: C23C 14/243 Crucibles for source material C23C14/28, C23C14/30 take precedence
• CPC Class Codes: C23C 16/4485 by evaporation without using carrier gas in contact with the source material C23C16/4486 takes precedence
• CPC Class Codes: C23C 16/45563 Gas nozzles
• CPC Class Codes: Y10S 165/911 Vaporization

Abstract

An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.

Claims

1. A flash evaporator assembly comprising:

a vaporization chamber having a liquid inlet and a vapor outlet;

an atomizer fluidly configured to ultrasonically vaporize a liquid introduced through the liquid inlet;

a vapor nozzle fluidly cooperative with the vapor outlet such that the ultrasonically atomized vapor formed in the vaporization chamber is configured to pass through the vapor nozzle after having passed through the vapor outlet; and

a collar positioned between the vaporization chamber and the vapor nozzle, the collar defining a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged such that the average rate of liquid accumulation on a substrate placed in fluid communication with the vapor nozzle is also substantially unchanged.

2. The evaporator of claim 1 wherein the collar has a cross-sectional area less than a cross-sectional area of the vapor nozzle.

3. The evaporator of claim 1 wherein the collar comprises a first portion insertable into the vapor outlet.

4. The evaporator of claim 3 wherein the collar comprises an annular ring.

5. The evaporator of claim 3 wherein the first portion further comprises an outwardly extending portion.

6. The evaporator of claim 3 wherein the first portion has a cross-sectional area less than a cross-sectional area of the vapor nozzle.

7. The evaporator of claim 1 wherein the collar comprises a first portion insertable into the vapor outlet and a second portion connected to the first portion, the second portion having a cross-sectional area less than a cross-sectional area of the vapor nozzle.

8. The evaporator of claim 7 wherein the first portion has a flange, and wherein the second portion is connected to the flange.

9. The evaporator of claim 8 wherein the flange extends outward from the collar.

10. The evaporator of claim 7 wherein the second portion is permanently connected to the first portion.

11. The evaporator of claim 7 wherein the first portion comprises an annular ring.

12. The evaporator of claim 7 wherein the first portion comprises an annular ring with an annular flange.

13. The evaporator of claim 7 wherein the first portion further comprises an outwardly extending portion.

14. The evaporator of claim 1 wherein the collar is removably positioned between the vaporization chamber and the vapor nozzle.

15. A flash evaporator assembly comprising:

a vaporization chamber having a liquid inlet and a vapor outlet, the vaporization chamber having a cross-sectional area, and the vapor outlet having a cross-sectional area less than the cross-sectional area of the vaporization chamber;

an atomizer fluidly configured to ultrasonically vaporize a liquid introduced through the liquid inlet;

a vapor nozzle in fluid communication with the vapor outlet such that the ultrasonically atomized vapor passing from the vaporization chamber passes through the vapor outlet and the vapor nozzle, the vapor nozzle having a cross-sectional area less than the cross-sectional area of the vapor outlet; and

a removable collar positioned between the vaporization chamber and the vapor nozzle, the collar having a non-filtered single opening with a cross-sectional area less than the cross-sectional area of the vapor nozzle and such that the average rate of liquid accumulation on a substrate placed in fluid communication with the vapor nozzle is substantially unchanged as a result of having passed through the collar.