High-efficiency MEMS micro-vibrational energy harvester and process for manufacturing same
First Claim
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1. A vibrational energy harvesting device comprising:
- a cantilever having a first end, a second end and a core having a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together;
a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;
a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and
a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move.
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Abstract
The present invention relates generally to a High Efficiency MEMS Micro-Vibrational Energy Harvester (μVEH) having a thick beam bimorph architecture. The disclosed architecture is capable of producing a voltage of sufficient magnitude such that the requirement to connect a plurality of harvesters in series to produce an adequate voltage magnitude is eliminated.
41 Citations
25 Claims
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1. A vibrational energy harvesting device comprising:
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a cantilever having a first end, a second end and a core having a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together; a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core; a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A chipset having a substrate and a vibrational energy harvesting device comprising a cantilever having a first end, a second end and a core having a first planar surface and a second planar surface, the core being fabricated as two plate layers and bonded together;
a first piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the first planar surface of said core;
a second piezoelectric stack having a piezoelectric material placed between a first conductive layer and a second conductive layer and attached to the second planar surface of said core; and
a casing wherein the first end of the cantilever is joined to the casing and the second end is free to move.- View Dependent Claims (24, 25)
Specification