MEMS structure with a flexible membrane and improved electric actuation means

• US 8,593,239 B2
• Filed: 03/18/2010
• Issued: 11/26/2013
• Est. Priority Date: 03/20/2009
• Status: Expired due to Fees

• Current Assignee: DelfMEMS Co.
• Original Assignee: DelfMEMS Co.
• Inventors: Segueni, Karim, Lorphelin, Nicolas
• Primary Examiner(s): Talpalatski, Alexander
• Application Number:
  US13/203,884
• Publication Number:
  US 20110315529A1
• Time in Patent Office: 1,349 Days
• Field of Search: 335/78
• US Class Current: 335/78
• CPC Class Codes: B81B 2201/018 Switches not provided for in B81B2201/014 - B81B2201/016
• CPC Class Codes: B81B 5/00 Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
• CPC Class Codes: H01H 59/0009 making use of micromechanics

Abstract

The MEMS structure comprises: a flexible membrane (6), which has a main longitudinal axis (6a) defining a longitudinal direction (X), at least one pillar (3, 3′) under the flexible membrane (6), electric lowering actuation means (7) that are adapted to bend down the flexible membrane (6) into a down forced state electric raising actuation means (8) that are adapted to bend up the flexible membrane (6) into an up forced state. The electric lowering actuation means (7) or the electric raising actuation means (8) comprise an actuation area (7c or 8c), that extends under a part of the membrane (6) and that is adapted to exert pulling forces on the membrane (6) simultaneously on both sides of the said at least one pillar (3) in the longitudinal direction (X).

Claims

1. A MEMS structure comprising:

a flexible membrane including a main longitudinal axis defining a longitudinal direction;

at least one pillar under the flexible membrane;

electric lowering actuation means adapted to bend down the flexible membrane into a down forced state; and

electric raising actuation means adapted to bend up the flexible membrane into an up forced state;

wherein the membrane includes a flexible functional part that is positioned above said at least one pillar and is adapted to be bent down or up by a lever effect on said at least one pillar;

wherein the membrane includes at least one flexible lateral non-functional part that is outside said at least one pillar in a transverse direction, and extends on both sides of said at least one pillar in the longitudinal direction;

wherein an actuation area of the electric lowering actuation means or an actuation area of the electric raising actuation means extends under said at least one lateral non-functional part and is adapted to exert pulling forces on said at least one lateral non-functional part of the membrane simultaneously on both sides of said at least one pillar in the longitudinal direction;

wherein the at least one flexible lateral non-functional part is laterally offset from the at least one pillar and is partially aligned with the at least one pillar in the transverse direction; and

wherein the at least one flexible lateral non-functional part extends further in the longitudinal direction than the at least one pillar.

2. The MEMS structure according to claim 1, wherein the membrane comprises at least two lateral flexible non-functional parts that are positioned on each side of the functional part of the membrane in the transverse direction.

3. The MEMS structure according to claim 1, further comprising a substrate, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein said central non-functional part is extended in the transverse direction by at least a lateral non-functional part that is positioned outside said at least one pillar in the transverse direction and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein the gap at rest between the substrate and said lateral non-functional part is smaller than the gap at rest between the functional part of the membrane and the substrate.

4. The MEMS structure according to claim 1, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein said central non-functional part is extended in the transverse direction by at least a lateral non-functional part that is positioned outside said at least one pillar in the transverse direction and that extends on both sides of said at least one pillar in the longitudinal direction, and the thickness of the lateral non-functional part is smaller than the thickness of the functional part of the membrane.

5. The MEMS structure according to claim 1, further comprising a substrate, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein the functional part of the membrane is extended in the transverse direction at least by a lateral non-functional part that is positioned outside said at least one pillar in the transverse direction, and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein the gap at rest between the substrate and said lateral non-functional part is smaller than the gap at rest between the central non-functional part of the membrane and the substrate.

6. The MEMS structure according to claim 1, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein the functional part of the membrane is extended in the transverse direction at least by a lateral nonfunctional part that is positioned outside said at least one pillar in the transverse direction, and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein the thickness of the lateral non-functional part is smaller than the thickness of the central non-functional part of the membrane.

7. The MEMS structure according to claim 1, wherein the electric lowering actuation means comprise an actuation area that extends under a part of the membrane and that is adapted to exert pulling forces on said part of the membrane simultaneously on both sides of said at least one pillar in the longitudinal direction, and the electric raising actuation means comprise an actuation area, that extends under another part of the membrane and that is adapted to exert pulling forces on said other part of the membrane on both sides of said at least one pillar in the longitudinal direction.

8. The MEMS structure according to claim 1, wherein the membrane is positioned above at least two pillars that are spaced apart in the longitudinal direction, and wherein the electric raising actuation means or the electric lowering actuation means comprise, for each pillar, an actuation area that extends under a part of the membrane and that is adapted to exert pulling forces on said part of the membrane simultaneously on both sides of the corresponding pillar in the longitudinal direction.

9. The MEMS structure according to claim 1, wherein the membrane is a free membrane whose both ends are not clamped to a substrate, and is supported at rest by said at least one pillar.

10. The MEMS structure according to claim 1, wherein the membrane is a cantilever membrane that is clamped at one end to a substrate.

11. The MEMS structure according to claim 1, wherein the membrane is a clamped-clamped membrane that is clamped at both ends to a substrate.

12. The MEMS structure according to claim 1, wherein the at least one flexible lateral non-functional part is positioned on one side of the functional part of the membrane in the transverse direction.

13. The MEMS structure according to claim 1, wherein the at least one flexible lateral non-functional part is offset from the main longitudinal axis.

14. The MEMS structure according to claim 1, wherein a portion of the flexible lateral non-functional part is co-planar with a portion of the flexible functional part in the transverse direction.

15. A MEMS structure comprising:

a flexible membrane including a main longitudinal axis defining a longitudinal direction;

at least one pillar under the flexible membrane;

electric lowering actuation means adapted to bend down the flexible membrane into a down forced state; and

electric raising actuation means adapted to bend up the flexible membrane into an up forced state;

wherein the membrane includes a flexible functional part that is positioned above said at least one pillar and is adapted to be bent down or up by a lever effect on said at least one pillar;

wherein the membrane includes at least one flexible lateral non-functional part that is outside said at least one pillar in a transverse direction, and extends on both sides of said at least one pillar in the longitudinal direction;

wherein an actuation area of the electric lowering actuation means or an actuation area of the electric raising actuation means extends under said at least one lateral non-functional part and is adapted to exert pulling forces on said at least one lateral non-functional part of the membrane simultaneously on both sides of said at least one pillar in the longitudinal direction; and

wherein the membrane comprises at least two lateral flexible non-functional parts that are positioned on each side of a functional part of the membrane in the transverse direction.

16. The MEMS structure according to claim 15, further comprising a substrate, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein said central non-functional part is extended in the transverse direction by at least the lateral non-functional part that is positioned outside said at least one pillar in the transverse direction and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein a gap at rest between the substrate and said lateral non-functional part is smaller than the gap at rest between the functional part of the membrane and the substrate.

17. The MEMS structure according to claim 15, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein said central non-functional part is extended in the transverse direction by at least the lateral non-functional part that is positioned outside said at least one pillar in the transverse direction and that extends on both sides of said at least one pillar in the longitudinal direction, and the thickness of the lateral non-functional part is smaller than the thickness of the functional part of the membrane.

18. The MEMS structure according to claim 15, further comprising a substrate, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein the functional part of the membrane is extended in the transverse direction at least by the lateral non-functional part that is positioned outside said at least one pillar in the transverse direction, and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein the gap at rest between the substrate and said lateral non-functional part is smaller than the gap at rest between the central non-functional part of the membrane and the substrate.

19. The MEMS structure according to claim 15, wherein the functional part of the membrane is extended at least at one end, in the longitudinal direction, by a central non-functional part, wherein the functional part of the membrane is extended in the transverse direction at least by the lateral nonfunctional part that is positioned outside said at least one pillar in the transverse direction, and that extends on both sides of said at least one pillar in the longitudinal direction, and wherein the thickness of the lateral non-functional part is smaller than the thickness of the central non-functional part of the membrane.

20. The MEMS structure according to claim 15, wherein the electric lowering actuation means comprise an actuation area that extends under a part of the membrane and that is adapted to exert pulling forces on said part of the membrane simultaneously on both sides of said at least one pillar in the longitudinal direction, and the electric raising actuation means comprise an actuation area, that extends under another part of the membrane and that is adapted to exert pulling forces on said other part of the membrane on both sides of said at least one pillar in the longitudinal direction.

21. The MEMS structure according to claim 15, wherein the membrane is positioned above at least two pillars that are spaced apart in the longitudinal direction, and wherein the electric raising actuation means or the electric lowering actuation means comprise, for each pillar, an actuation area that extends under a part of the membrane and that is adapted to exert pulling forces on said part of the membrane simultaneously on both sides of the corresponding pillar in the longitudinal direction.

22. The MEMS structure according to claim 15, wherein the membrane is a free membrane whose both ends are not clamped to a substrate, and is supported at rest by said at least one pillar.

23. The MEMS structure according to claim 15, wherein the membrane is a cantilever membrane that is clamped at one end to a substrate.

24. The MEMS structure according to claim 15, wherein the membrane is a clamped-clamped membrane that is clamped at both ends to a substrate.

25. The MEMS structure according to claim 15, wherein the at least one flexible lateral non-functional part is positioned on one side of the functional part of the membrane in the transverse direction.

26. The MEMS structure according to claim 15, wherein the at least one flexible lateral non-functional part is offset from the main longitudinal axis.

27. The MEMS structure according to claim 15, wherein the at least one flexible lateral non-functional part is laterally offset from the at least one pillar and is partially aligned with the at least one pillar in the transverse direction;

and

wherein the at least one flexible lateral non-functional part extends further in the longitudinal direction than the at least one pillar.

28. The MEMS structure according to claim 15, wherein a portion of the flexible lateral non-functional part is co-planar with a portion of the flexible functional part in the transverse direction.