Tool management method of die bonder and die bonder

• US 8,593,261 B2
• Filed: 03/09/2011
• Issued: 11/26/2013
• Est. Priority Date: 09/24/2010
• Status: Active Grant

• Current Assignee: Fasford Technology Co. Ltd. (Fuji Corporation)
• Original Assignee: Hitachi High-Tech Instruments Co., Ltd. (Hitachi, Ltd.)
• Inventors: Maki, Hiroshi, Takagi, Susumu
• Primary Examiner(s): BROWN, VERNAL U
• Application Number:
  US13/043,820
• Publication Number:
  US 20120075079A1
• Time in Patent Office: 993 Days
• Field of Search: 340/10.51, 340/12.23, 340/12.51, 340/505, 438/612, 438/22, 438/106
• US Class Current: 340/10.51
• CPC Class Codes: G05B 19/12 using record carriers
• CPC Class Codes: G05B 2219/31288 Archive collected data into history file
• CPC Class Codes: G05B 2219/31304 Identification of workpiece and data for control, inspection, safety, calibration
• CPC Class Codes: H01L 24/75 Apparatus for connecting with bump connectors or layer connectors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/14 Integrated circuits
• CPC Class Codes: Y02P 90/02 Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Abstract

RFID tags are attached to tools of a preform head, a bonding head, and a push-up unit, and information related to each tool such as a dimension of a processing-target die is stored into the RFID tags. When a tool is mounted, an operator inputs manufacturing conditions related to the tool. When information related to the tool read from the RFID tag by an RFID reader/writer and the manufacturing conditions related to the tool do not match each other, a message about wrong mounting of the tool is displayed on a monitor. Further, an operation history of the tool is written into the RFID tag by the RFID reader/writer when the production is completed. The operation history is read when the next production is started, and if the values of the operation history exceed predetermined numbers of times, a message is displayed on the monitor.

Claims

1. A tool management method of a die bonder in which a part of a preform head by which a printed substrate is coated with a paste to bond a die, a part of a bonding head which picks up the die from a semiconductor wafer to be supplied to the printed substrate, and a part of a push-up unit which pushes up the die from the lower side when the bonding head picks up the die are replaceable as tools, the method comprising:

(1) a step of attaching an RFID tag to any one of the tool of the preform head, the tool of the bonding head, and the tool of the push-up unit;

(2) a step of storing, into the RFID tag, information related to each tool to which the RFID tag is attached;

(3) a step of mounting any one of the tool of the preform head, the tool of the bonding head, and the tool of the push-up unit;

(4) a step of holding, in a first memory, information of the processing-target die of each tool that is input by an input device;

(5) a step of reading the information stored in the RFID tag attached to each tool by an RFID reader/writer that reads and writes data from/into the RFID tag using radio waves;

(6) a step of comparing, by an operational device, the information of the processing-target die of each tool that is held in the first memory with the information related to each tool that is stored in the RFID tag attached to each tool; and

(7) a step of displaying, if the comparison result in the step (6) shows that the both do not match each other, a determination result related to mounting of each tool on a display device by the operational device.

2. The tool management method of a die bonder according to claim 1, wherein

the information related to each tool includes any one of a type of tool, a product name of a semiconductor wafer, a dimension of a die, a material of a tool, and a shape of a tool.

3. The tool management method of a die bonder according to claim 1, wherein

the information related to each tool includes teaching data of each tool, and the operational device refers to the teaching data as data of learning of each tool.

4. The tool management method of a die bonder according to claim 1, wherein

the information related to each tool includes a message when each tool is mounted, and the operational device displays the read message when each tool is mounted on the display device.

5. The tool management method of a die bonder according to claim 1, further comprising:

(10) a step of instructing, by the operational device, the RFID reader/writer to write an operation history of each tool into the RFID tag attached to each tool when the production is completed;

(11) a step of writing, by the RFID reader/writer, the operation history of each tool into the RFID tag attached to each tool on the basis of the instruction of the operational device in the step (10);

(12) a step of reading the operation history of each tool after executing the step (5);

(13) a step of comparing, by the operational device, information related to operations of each tool that is held in the first memory with the operation history of each tool stored in the RFID tag attached to each tool; and

(14) a step of displaying, if the comparison result in the step (13) shows that the values of the operation history exceed those of the information related to the operations of each tool, information related to use of each tool on the display device by the operational device.

6. The tool management method of a die bonder according to claim 1, wherein

the die bonder collects the operation history of each tool to be held in the first memory,

the method further comprising

(20) a step of storing, by the operational device, the operation history of each tool held in the first memory and an identifier of each RFID tag into a second nonvolatile readable/writable memory while they are associated with each other when the production is completed.

7. A die bonder comprising:

any one or all of a first replaceable tool mounted in a preform head by which a printed substrate is coated with a paste to bond a die, a second tool mounted in a bonding head which picks up the die from a semiconductor wafer to be supplied to the printed substrate that is coated with the paste by the preform head, and a third tool mounted in a push-up unit which pushes up the die from the lower side when the bonding head picks up the die;

a transmittable/receivable secondary device which is attached to each tool and stores information related to each tool to which the secondary device is attached;

a primary device which can transmit and receive data to/from the secondary device, and reads and writes the information related to each tool stored in the secondary device;

a first memory which stores information related to the die as a processing target of each tool;

an operational device which compares the information related to the die stored in the first memory with the information related to each tool that is read through the primary device and is stored in the secondary device; and

a display device which displays a comparison result of the operational device.

8. The die bonder according to claim 7, wherein

the information related to each tool includes any one of a type of tool, a product name of a semiconductor wafer, a dimension of a die, a material of a tool, and a shape of a tool.

9. The die bonder according to claim 7, wherein

the information related to each tool includes teaching data of each tool, and the operational device refers to the teaching data as data of learning of each tool.

10. The die bonder according to claim 7, wherein

the information related to each tool includes a message when each tool is mounted, and the operational device displays the read message when each tool is mounted on the display device.

11. The die bonder according to claim 7, wherein

the first memory holds information related to operations of each tool,

the secondary device stores an operation history of each tool when the production is completed,

the primary device reads and writes the information related to each tool and the operation history stored in the secondary device, and

the operational device compares the information related to each tool with the operation history to display information about use of each tool on the display device when the values of the operation history exceed those of the information related to the operations of each tool.

12. The die bonder according to claim 7, wherein

the operation history of each tool is collected to beheld in the first memory,

the operational device includes a second nonvolatile readable/writable memory, and

the operational device stores the operation history of each tool held in the first memory and an identifier of the secondary device into the second memory while they are associated with each other when the production is completed.

13. The die bonder according to claim 7, wherein

the secondary device is an RFID tag, and

the primary device is an RFID reader/writer.