Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device
First Claim
1. A method of measuring an actual shape of an optical surface of a test object, comprising:
- providing an areal interferometric measuring device generating a measurement wave,arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different two-dimensional regions of the optical surface are illuminated by the measurement wave,measuring the positional coordinates of the interferometric measuring device at the different measurement positions in relation to the test object,obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, anddetermining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions, wherein said computationally combining comprises a fitting of shapes obtained from the surface region measurements to each other.
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Accused Products
Abstract
Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.
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Citations
13 Claims
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1. A method of measuring an actual shape of an optical surface of a test object, comprising:
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providing an areal interferometric measuring device generating a measurement wave, arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different two-dimensional regions of the optical surface are illuminated by the measurement wave, measuring the positional coordinates of the interferometric measuring device at the different measurement positions in relation to the test object, obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions, wherein said computationally combining comprises a fitting of shapes obtained from the surface region measurements to each other. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method of measuring an actual shape of an optical surface of a test object, comprising:
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providing an interferometric measuring device generating a measurement wave arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave, measuring the positional coordinates of the interferometric measuring device in relation to the test object at the measurement positions by directing three distance measuring laser interferometers onto at least one retro-reflector attached to the measuring device, wherein the retro-reflector has a convex reflection surface, obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method of measuring an actual shape of an optical surface of a test object, comprising:
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providing an interferometric measuring device generating a measurement wave, arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave, measuring positional coordinates of the interferometric measuring device at the different measurement positions in relation to the test object using four distance measuring laser interferometers, wherein distances to at least one retro-reflector attached to the measuring device are measured by each of the four laser interferometers and distances between at least three of the four laser interferometers are determined mathematically therefrom, obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions.
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Specification