Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device

• US 8,593,642 B2
• Filed: 03/12/2012
• Issued: 11/26/2013
• Est. Priority Date: 09/18/2009
• Status: Active Grant

• Current Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT GmbH (Carl-Zeiss-Stiftung)
• Inventors: Freimann, Rolf, Doerband, Bernd, Schulte, Stefan, Hof, Albrecht, Riepenhausen, Frank, Manger, Matthias, Neugebauer, Dietmar, Bich, Armin, Issler, Helmut
• Primary Examiner(s): Chowdhury, Tarifur
• Assistant Examiner(s): Lapage, Michael P
• Application Number:
  US13/417,487
• Publication Number:
  US 20120229814A1
• Time in Patent Office: 624 Days
• Field of Search: 356450-521, 356/601
• US Class Current: 356/512
• CPC Class Codes: B29D 11/0098 Inspecting lenses
• CPC Class Codes: G01B 11/2441 using interferometry
• CPC Class Codes: G01B 2290/15 Cat eye, i.e. reflection always parallel to incoming beam
• CPC Class Codes: G01B 9/02027 Two or more interferometric channels or interferometers
• CPC Class Codes: G01B 9/02039 by matching the wavefront with a particular object surface shape
• CPC Class Codes: G01B 9/02057 by using common path configuration, i.e. reference and object path almost entirely overlapping
• CPC Class Codes: G01B 9/02072 by calibration or testing of interferometer
• CPC Class Codes: G01M 11/005 Testing of reflective surfaces, e.g. mirrors
• CPC Class Codes: G01M 11/025 by determining the shape of the object to be tested measuring contours or curvatures by optical means G01B11/24
• CPC Class Codes: G01M 11/0271 by using interferometric methods
• CPC Class Codes: G02B 3/02 with non-spherical faces G02B3/10 takes precedence
• CPC Class Codes: G02B 5/10 with curved faces

Abstract

Measuring a shape of an optical surface (14) of a test object (12) includes: providing an interferometric measuring device (16) generating a measurement wave (18); arranging the measuring device (16) and the test object (12) consecutively at different measurement positions relative to each other, such that different regions (20) of the optical surface (14) are illuminated by the measurement wave (18); measuring positional coordinates of the measuring device (16) at the different measurement positions in relation to the test object (12); obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave (18) after interaction with the respective region (20) of the optical surface (14) using the measuring device (16) in each of the measurement positions; and determining the actual shape of the optical surface (14) by computationally combining the surface region measurements based on the measured positional coordinates of the measuring device (16) at each of the measurement positions.

Claims

1. A method of measuring an actual shape of an optical surface of a test object, comprising:

providing an areal interferometric measuring device generating a measurement wave,

arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different two-dimensional regions of the optical surface are illuminated by the measurement wave,

measuring the positional coordinates of the interferometric measuring device at the different measurement positions in relation to the test object,

obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and

determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions, wherein said computationally combining comprises a fitting of shapes obtained from the surface region measurements to each other.

2. The method according to claim 1,

wherein the regions of the optical surface illuminated at the different measurement positions overlap in sections with each other and the surface region measurements are computationally combined by fitting the overlapping sections of the surface region measurements to each other, and correcting results of the fitting based on the measured positional coordinates of the measuring device.

3. The method according to claim 1,

wherein the interferometric measuring device is positioned relative to the test object using a coordinate measuring machine.

4. The method according to claim 1,

wherein a positioning apparatus positions the interferometric measuring device relative to the test object in order to arrange the measuring device in the different measurement positions, which positioning apparatus is configured to tilt the measuring device with respect to at least one axis.

5. The method according to claim 1,

wherein a positioning apparatus positions the interferometric measuring device relative to the test object, in order to arrange the measuring device in the different measurement positions, and said method further comprises measuring further properties of the optical surface by a further measurement device, which is also positioned relative to the test object by the positioning apparatus.

6. The method according to claim 1,

wherein the interferometric measuring device comprises:

a detection apparatus configured to record an interferogram, and imaging optics comprising at least one curved mirror and configured to image the optical test surface onto the detection apparatus.

7. A method of measuring an actual shape of an optical surface of a test object, comprising:

providing an interferometric measuring device generating a measurement wave

arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave,

measuring the positional coordinates of the interferometric measuring device in relation to the test object at the measurement positions by directing three distance measuring laser interferometers onto at least one retro-reflector attached to the measuring device, wherein the retro-reflector has a convex reflection surface,

obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and

determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions.

8. The method according to claim 7,

wherein each of the distance measuring laser interferometers is mounted to tilt with respect to two tilt axes.

9. The method according to claim 7,

wherein at least three retro-reflectors are attached to the interferometric measuring device and each measuring laser interferometer is directed at a different retro-reflector.

10. The method according to claim 7, wherein the three distance measuring laser interferometers are directed onto a single retro-reflector attached to the measuring device.

11. The method according to claim 7,

wherein the interferometric measuring device is positioned relative to the test object using a coordinate measuring machine.

12. The method according to claim 7,

wherein a positioning apparatus positions the interferometric measuring device relative to the test object, in order to arrange the measuring device in the different measurement positions, and said method further comprises measuring further properties of the optical surface by a further measurement device, which is also positioned relative to the test object by the positioning apparatus.

13. A method of measuring an actual shape of an optical surface of a test object, comprising:

providing an interferometric measuring device generating a measurement wave,

arranging the interferometric measuring device and the test object consecutively at different measurement positions relative to each other, such that different regions of the optical surface are illuminated by the measurement wave,

measuring positional coordinates of the interferometric measuring device at the different measurement positions in relation to the test object using four distance measuring laser interferometers, wherein distances to at least one retro-reflector attached to the measuring device are measured by each of the four laser interferometers and distances between at least three of the four laser interferometers are determined mathematically therefrom,

obtaining surface region measurements by interferometrically measuring the wavefront of the measurement wave after interaction with the respective region of the optical surface using the measuring device in each of the measurement positions, and

determining the actual shape of the optical surface by computationally combining the surface region measurements based on the measured positional coordinates of the interferometric measuring device at each of the measurement positions.