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Microphone having multiple transducer elements

  • US 8,594,347 B2
  • Filed: 04/26/2012
  • Issued: 11/26/2013
  • Est. Priority Date: 10/14/2008
  • Status: Active Grant
First Claim
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1. A microphone package comprising:

  • a housing;

    a microelectromechanical system (MEMS) acoustic transducer positioned in the interior of the housing, said transducer comprising a plurality of individual MEMS acoustic motor assemblies, each of said individual MEMS acoustic motor assemblies being variable capacitors well matched with one another with regard to sensitivity;

    an integrated buffer circuit positioned in the interior of the housing; and

    an acoustic port in the housing, positioned to be aligned with the MEMS acoustic transducer;

    where said individual MEMS acoustic motor assemblies are connected in parallel with one another and connected to the integrated buffer circuit.

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