Method and system for evaluating a machine tool operating characteristics
First Claim
1. A method suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools, the method comprising the steps of:
- configuring a computing device including a processor and a memory to generate a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, said array including data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools;
configuring said computing device including said processor and said memory to conduct an analysis on at least one preselected subset of said multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools; and
configuring said computing device including said processor and said memory to present results of the analysis via a set of hierarchically linked and browseable graphics.
3 Assignments
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Accused Products
Abstract
A method, a system and a computer program product suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools. A computing device generates a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, the array includes data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools. The computing device conducts an analysis on at least one preselected subset of the multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools. The computing device presents results of the analysis via a set of hierarchically linked and browseable graphics.
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Citations
25 Claims
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1. A method suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools, the method comprising the steps of:
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configuring a computing device including a processor and a memory to generate a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, said array including data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools; configuring said computing device including said processor and said memory to conduct an analysis on at least one preselected subset of said multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools; and configuring said computing device including said processor and said memory to present results of the analysis via a set of hierarchically linked and browseable graphics. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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9. A system suitable for use in a manufacturing environment comprising a multiplicity of nominally identical independent tools, the system comprising:
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at least one memory device; at least one processor coupled to the at least one memory device, wherein the at least one processor is configured to; generate a multi dimensional array of process trace data derived from at least one of the independent tools, wherein, said array including data representing a first dimension comprising a list of steps in a manufacturing recipe and data representing a second dimension comprising a list of a set of sensors generating measurements from at least one of the independent tools; conduct an analysis on at least one preselected subset of said multi dimensional array for the purpose of evaluating at least one operating characteristic of at least one of the independent tools; and present results of the analysis via a set of hierarchically linked and browseable graphics. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
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Specification