Methods of forming a photo mask
First Claim
1. A method of fabricating a photo mask, the method comprising:
- collecting sample data;
setting a target mask layout data;
performing an optical proximity correction using the sample data and a preliminary mask layout to obtain an optimized preliminary mask layout;
verifying the optimized preliminary mask layout to obtain a final mask layout; and
fabricating the photo mask using the final mask layout,wherein verifying the optimized preliminary mask layout includes operating a verification simulator using the sample data and the optimized preliminary mask layout as input data to obtain verification image data, andwherein the verification image data includes a plurality of contours of a verification-simulated pattern at different vertical positions.
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Abstract
Methods of fabricating a photo mask are provided. The method includes collecting sample data, setting a preliminary mask layout, performing an optical proximity correction using the sample data and a preliminary mask layout to obtain an optimized preliminary mask layout, verifying the optimized preliminary mask layout to obtain a final mask layout, and fabricating the photo mask using the final mask layout. Verification of the optimized preliminary mask layout includes operating a verification simulator using the sample data and the optimized preliminary mask layout as input data to obtain verification image data. The verification image data includes a plurality of contours of a pattern at different vertical positions.
31 Citations
22 Claims
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1. A method of fabricating a photo mask, the method comprising:
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collecting sample data; setting a target mask layout data; performing an optical proximity correction using the sample data and a preliminary mask layout to obtain an optimized preliminary mask layout; verifying the optimized preliminary mask layout to obtain a final mask layout; and fabricating the photo mask using the final mask layout, wherein verifying the optimized preliminary mask layout includes operating a verification simulator using the sample data and the optimized preliminary mask layout as input data to obtain verification image data, and wherein the verification image data includes a plurality of contours of a verification-simulated pattern at different vertical positions. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A method of fabricating a photo mask, the method comprising:
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collecting sample data; setting a target mask layout data; performing an optical proximity correction using the sample data and a preliminary mask layout to obtain an optimized preliminary mask layout; verifying the optimized preliminary mask layout by generating verification image data and comparing the verification image data with the target mask layout data to detect a verification error; generating an alarm message indicating the verification error when the verification error is out of an allowable range and obtaining a final mask layout when the verification error is within the allowable range; and fabricating the photo mask using the final mask layout. - View Dependent Claims (18, 19, 20, 21, 22)
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Specification