MEMS anchors
First Claim
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1. A MEMS device comprising:
- a substrate having a primary, horizontal face, upon which the MEMS device is formed; and
a first beam suspended over the substrate by an anchor, the anchor including;
a first elevating portion coupled to the primary face of the substrate;
a first substantially horizontal shelf portion elevated over the substrate by the first elevating portion; and
a first non-horizontal anchor stiffening portion, from which the first beam extends, extending from the shelf portion.
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Abstract
The invention relates to an improved apparatus and method for the design and manufacture of MEMS anchoring structures for light modulators in order to address the stresses of beams mounted on them.
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Citations
25 Claims
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1. A MEMS device comprising:
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a substrate having a primary, horizontal face, upon which the MEMS device is formed; and a first beam suspended over the substrate by an anchor, the anchor including; a first elevating portion coupled to the primary face of the substrate; a first substantially horizontal shelf portion elevated over the substrate by the first elevating portion; and a first non-horizontal anchor stiffening portion, from which the first beam extends, extending from the shelf portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A method of manufacturing a MEMS device using a structure made by a sidewall process, comprising:
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forming a mold on a substrate, wherein the mold includes a lower horizontal surface, an upper horizontal surface and a wall; depositing a beam material on the lower horizontal surface and the wall of the mold; removing at least a portion of the beam material deposited on the lower horizontal surface of the mold while leaving the majority of the beam material deposited on the wall of the mold in place to form a first compliant beam; and removing the mold. - View Dependent Claims (19, 20, 21, 22, 23, 24, 25)
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Specification