Three-point fixed-spindle floating-platen abrasive system

• US 8,602,842 B2
• Filed: 05/03/2010
• Issued: 12/10/2013
• Est. Priority Date: 03/12/2010
• Status: Expired due to Fees

• Current Assignee: Wayne O. Duescher
• Original Assignee: Wayne O. Duescher
• Inventors: Duescher, Wayne O.
• Primary Examiner(s): ROSE, ROBERT A
• Application Number:
  US12/799,841
• Publication Number:
  US 20110223836A1
• Time in Patent Office: 1,317 Days
• Field of Search: 451/5, 451/11, 451/28, 451/36, 451/37, 451/41, 451/59, 451/64, 451/259, 451/260, 451/270, 451/271, 451/280, 451/283, 451/285, 451/288, 451/287, 451/443, 451/444, 451/56
• US Class Current: 451/11
• CPC Class Codes: B24B 37/107 in a rotary movement only, about an axis being stationary during lapping

Abstract

A method and apparatus for releasably attaching flexible abrasive disks to a flat-surfaced platen that floats in three-point abrading contact with three flat-surfaced rotatable fixed-position workpiece spindles that are mounted on a nominally-flat abrading machine base. The spindle-top flat surfaces are precisely co-planar with each other and approximately co-planar with the machine base horizontal surface. The three spindles are positioned to form a triangle of platen supports where the rotational-centers of each of the spindles are positioned at the center of the annular width of the platen abrading-surface. Flat surfaced workpieces are attached to the spindles and the rotating floating-platen abrasive surface contacts the workpieces to perform single-sided abrading on them. The disk abrasive surfaces can be re-flattened by attaching abrasive disk-type components to the three spindles that are rotated while in abrading contact with the rotating abrasive disk. There is no wear of the abrasive-disk protected platen surface.

Claims

1. An at least three-point, fixed-spindle floating-platen abrading machine comprising:

a) at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at the center of a respective rotatable flat-surfaced spindle-top for a respective rotary spindles;

b) an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

c) wherein the at least three rotary spindles are located with near-equal spacing between the at least three of the rotary spindles and that the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at those respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support mounting legs that are near-equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles;

d) wherein the at least three spindle-tops'"'"' flat surfaces are aligned to be co-planar with each other;

e) wherein the at least three spindle-tops'"'"' axes of rotation are perpendicular to the respective spindle-tops'"'"' flat surfaces;

f) a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at the rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the abrading platen spherical-action rotation device allows spherical motion of the abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

h) flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius where a selected flexible abrasive disk is attached in flat conformal contact with an abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein the abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk abrasive coated annular abrading band and wherein the abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk abrasive coated surface annular band where the abrading platen precision-flat annular abrading-surface inner radius is less than an inner radius of the attached flexible abrasive disk abrasive coated surface annular band and where an abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk abrasive coated surface annular band;

i) wherein each flexible abrasive disk is attached in flat conformal contact with the abrading platen precision-flat annular abrading-surface by disk attachment techniques selected from the group consisting of vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

j) wherein equal-thickness workpieces having parallel or near-parallel opposed flat workplace top surfaces and flat workpiece bottom surfaces are attached in flat-surfaced contact with the flat surfaces of the respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

k) wherein the abrading platen can be moved vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the abrading platen; and

l) wherein total abrading platen abrading contact force applied to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the abrading platen spherical-action abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

m) wherein the at least three spindle-tops having the attached equal-thickness workpieces can be rotated about the respective spindle-tops'"'"' rotation axes and the abrading platen having the attached flexible abrasive disk can be rotated about the abrading platen rotation axis to single-side abrade the equal-thickness workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the equal-thickness workpieces that are attached to the respective at least three spindle-tops and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops.

2. The machine of claim 1 wherein at least one flat-surfaced circular device is selected from the group consisting of workpiece carriers, abrasive conditioning rings and abrasive disks is attached to the flat surfaces of the at least three spindle-tops where the selected flat-surfaced circular devices are attached to the at least three spindle-tops by attachment systems selected from the group consisting of vacuum attachment, mechanical attachment and adhesive attachment and wherein the attached flat-surfaced circular devices are concentric with the respective spindle-tops.

3. The machine of claim 1 wherein the machine base structural material is selected from the group consisting of granite and epoxy-granite and wherein the machine base structural material is temperature controlled by a temperature-controlled fluid that circulates in fluid passageways internal to the machine base structural materials.

4. The machine of claim 1 wherein the at least three rotary spindles are air bearing rotary spindles.

5. The machine of claim 1 where the at least three rotary spindles have at least three-point support legs with adjustable height on each of the at least three-point support legs and where the at least three support legs are attached to a supporting surface of each rotary spindle and the at least three support legs are positioned around the periphery of the rotary spindle body with near-equal distances between the support legs to form an at least three-point support of the rotary spindle and where each spindle-top flat surface can be aligned to be precisely co-planar with the other spindle-tops'"'"' flat surfaces by adjusting the height of the at least three rotary spindle support legs and where mechanical fasteners attach each of the at least three-point rotary spindle support legs to the machine base top surface thereby attaching the at least three rotary spindles to the machine base.

6. The machine of claim 1 wherein the abrading platen flexible abrasive disk articles are selected from the group consisting of:

flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks with resilient backing layers, flexible abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, flexible abrasive disks having attached solid abrasive pellets, flexible chemical mechanical planarization resilient disk pads that are suitable for use with liquid abrasive slurries, flexible chemical mechanical planarization resilient disk pads having nap covers, flexible shallow-island chemical mechanical planarization abrasive disks, flexible shallow-island abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, and flexible flat-surfaced metal or polymer disks.

7. The machine of claim 1 where auxiliary rotary spindles in excess of the at least three rotary spindles which are primary rotary spindles are attached to the machine base flat surface and where the auxiliary rotary spindles are each positioned between adjacent primary rotary spindles, and where the auxiliary rotary spindles have circular rotatable flat-surfaced spindle-tops that each have spindle-top axis of rotation at a center of their respective auxiliary rotary spindle spindle-top and where the respective auxiliary rotary spindle spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the top surfaces of the rotary spindle respective spindle-tops of the auxiliary rotary spindles are precisely co-planar with the precisely co-planar top surfaces of the spindle-tops of the at least three primary rotary spindles.

8. A process of abrading flat-surfaced workpieces using an at least three-point fixed-spindle floating-platen abrading machine comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of respective rotatable flat-surfaced spindle-tops;

b) providing an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the abrading machine base nominally-flat top surface;

c) providing that the at least three rotary spindles with near-equal spaces between three of the rotary spindles and that the at least three spindle-tops'"'"' axes of rotation intersect the abrading machine base spindle-circle and the at least three rotary spindles are mechanically attached to the abrading machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three spindle-support mounting legs that are near-equal spaced around the outer periphery of the at least three rotary spindles to form at least three-point support of the at least three rotary spindles;

d) providing the at least three spindle-tops'"'"' flat surfaces aligned precisely co-planar with each other;

e) providing the at least three spindle-tops'"'"' axes of rotation perpendicular to the respective spindle-tops'"'"' flat surfaces;

f) providing a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at the rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the rotatable abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the abrading platen spherical-action rotation device allows spherical motion of the abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

h) providing flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius, attaching a selected flexible abrasive disk in flat conformal contact with an abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein an abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk abrasive coated annular abrading band and wherein the abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk abrasive coated surface annular band where the abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk abrasive coated surface annular band and where the abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk abrasive coated surface annular band;

i) wherein each flexible abrasive disk is attached in flat conformal contact with the abrading platen precision-flat annular abrading-surface by disk attachment techniques comprising vacuum disk attachment techniques, mechanical disk attachment techniques and adhesive disk attachment techniques;

j) wherein equal-thickness workpieces having parallel or near-parallel opposed fiat workpiece top surfaces and flat workpiece bottom surfaces are attached in flat-surfaced contact with the flat surfaces of a respective at least three spindle-tops where the workpiece bottom surfaces contact the flat surfaces of the respective at least three spindle-tops;

k) wherein the abrading platen is moved vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface to contact the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the abrading platen; and

l) wherein a total abrading platen abrading contact force is applied to workpieces that are attached to the respective at least three spindle-top flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface with the top surfaces of the workpieces that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the abrading platen spherical-action abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the workpieces attached to the respective at least three spindle-tops;

m) providing that the at least three spindle-tops having the attached equal-thickness workpieces are rotated about the respective spindle-tops'"'"' rotation axes and the abrading platen having the attached flexible abrasive disk is rotated about the abrading platen rotation axis to single-side abrade the equal-thickness workpieces that are attached to the flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the top surfaces of the equal-thickness workpieces that are attached to the respective at least three spindle-tops and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the respective at least three spindle-tops.

9. The process of claim 8 where flat-surfaced equal-thickness workpieces having top and bottom surfaces are provided where a workpiece top surface is a first workpiece surface and a workpiece bottom surface is a second workpiece surface and where the flat-surfaced equal-thickness workpieces are attached to the at least three spindle-tops, and the first workpiece surfaces are abraded by the flexible abrasive disk article that is attached to the abrading platen precision-flat annular abrading-surface when the second workpiece surfaces are attached to the at least three spindle-tops, and after the first workpiece surface is abraded, the flat-surfaced equal-thickness workpieces are removed from the at least three spindle-tops and the flat-surfaced equal-thickness workpieces are re-attached to the at least three spindle-tops where the abraded first workpiece surfaces are attached to the spindle-tops and the second workpiece surfaces are abraded by the flexible abrasive disk article that is attached to the abrading platen precision-flat annular abrading-surface workpiece.

10. The process of claim 8 wherein the abrading platen flexible abrasive disk articles are selected from the group consisting of:

flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks with resilient backing layers, flexible abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, flexible abrasive disks having attached solid abrasive pellets, flexible chemical mechanical planarization resilient disk pads that are suitable for use with liquid abrasive slurries, flexible chemical mechanical planarization resilient disk pads having nap covers, flexible shallow-island chemical mechanical planarization abrasive disks, flexible shallow-island abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, and flexible flat-surfaced metal or polymer disks.

11. The process of claim 8 where the at least three rotary spindles have at least three-point support legs with adjustable height on each of the at least three-point support legs and where the at least three support legs are attached to a supporting surface of each rotary spindle and the at least three support legs are positioned around the periphery of the rotary spindle body with near-equal distances between the support legs to form an at least three-point support of the rotary spindle and where each spindle-top flat surface can be aligned to be precisely co-planar with the other spindle-tops'"'"' flat surfaces by adjusting the height of the at least three rotary spindle support legs and where mechanical fasteners attach each of the at least three-point rotary spindle support legs to the machine base top surface thereby attaching the at least three rotary spindles to the machine base.

12. The process of claim 8 where auxiliary rotary spindles in excess of the at least three rotary spindles which are primary rotary spindles are attached to the machine base flat surface and where the auxiliary rotary spindles are each positioned between adjacent primary rotary spindles, and where the auxiliary rotary spindles have circular rotatable flat-surfaced spindle-tops that each have spindle-top axis of rotation at a center of their respective auxiliary rotary spindle spindle-top and where the respective auxiliary rotary spindle spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and where the top surfaces of the rotary spindle respective spindle-tops of the auxiliary rotary spindles are precisely co-planar with the precisely co-planar top surfaces of the spindle-tops of the at least three primary rotary spindles.

13. A process of abrading the top flat surfaces of rotary spindles using an at least three-point fixed-spindle floating-platen abrading machine comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of the respective rotatable flat-surfaced spindle-top;

b) providing an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

c) providing the at least three rotary spindles at near-equal spacing between the at least three of the rotary spindles and providing the at least three spindle-tops'"'"' axes of rotation to intersect the machine base spindle-circle and providing the at least three rotary spindles mechanically attached to the machine base nominally-flat top surface at respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support mounting legs that are near-equal spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles;

d) providing that the at least three spindle-tops'"'"' flat surfaces as aligned co-planar with each other;

e) providing the at least three spindle-tops'"'"' axes of rotation perpendicular to the respective spindle-tops'"'"' flat surfaces;

f) providing a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and where the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at the rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the abrading platen spherical-action rotation device allows spherical motion of the abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

h) providing flexible abrasive disk articles having annular bands of abrasive coated surfaces that have an abrasive coated surface annular band radial width and an abrasive coated surface annular band inner radius and an abrasive coated surface annular band outer radius where a selected flexible abrasive disk is attached in flat conformal contact with an abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein the abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk abrasive coated annular abrading band and wherein the abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk abrasive coated surface annular band where the abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk abrasive coated surface annular band and where the abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk abrasive coated surface annular band;

i) attaching a selected flexible abrasive disk in flat conformal contact with the abrading platen precision-flat annular abrading-surface by disk attachment system selected from the group consisting of vacuum disk attachment, mechanical disk attachment and adhesive disk attachment;

j) vertically moving the abrading platen along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface to contact the co-planar flat surfaces of the at least three spindle-tops wherein the at least three rotary spindles provide at least three-point support of the abrading platen;

k) applying a total abrading platen abrading contact force to the at least three spindle-tops'"'"' flat surfaces by contact of the abrasive surface of the flexible abrasive disk that is attached to the abrading platen precision-flat annular abrading-surface with the flat surfaces of the at least three spindle-tops is controlled through the abrading platen spherical-action abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the respective at least three spindle-tops; and

l) rotating the at least three spindle-tops about their respective spindle-tops'"'"' rotation axes and rotating the abrading platen having the attached flexible abrasive disk about the abrading platen rotation axis to abrade the co-planar flat surfaces of the at least three spindle-tops while the moving abrasive surface of the flexible abrasive disk that is attached to the moving abrading platen precision-flat annular abrading-surface is in force-controlled abrading contact with the co-planar flat surfaces of the at least three spindle-tops and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of respective at least three spindle-tops.

14. The process of claim 13 where the at least three rotary spindles have at least three-point support legs with adjustable height on each of the at least three-point support legs and where the at least three support legs are attached to a supporting surface of each rotary spindle and the at least three support legs are positioned around the periphery of the rotary spindle body with near-equal distances between the support legs to form an at least three-point support of the rotary spindle and where each spindle-top flat surface can be aligned to be precisely co-planar with the other spindle-tops'"'"' flat surfaces by adjusting the height of the at least three rotary spindle support legs and where mechanical fasteners attach each of the at least three-point rotary spindle support legs to the machine base top surface thereby attaching the at least three rotary spindles to the machine base.

15. A process of abrading a non-precision-flat annular abrading-surface of a floating, rotatable abrading platen on an at least three-point fixed-spindle floating-platen abrading machine to recondition or reestablish the planar precision-flatness of the abrading platen annular abrading-surface comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of a respective rotatable flat-surfaced spindle-top;

b) providing an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

c) providing the at least three rotary spindles with near-equal spaces between three of the at least three rotary spindles and causing the at least three spindle-tops'"'"' axes of rotation to intersect the machine base spindle-circle, mechanically attaching the at least three rotary spindles to the machine base nominally-flat top surface at the respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support mounting legs that are near-equally spaced around the outer periphery of the rotary spindles to form an at least three-point support of the at least three rotary spindles;

d) aligning the at least three spindle-tops'"'"' flat surfaces to be precisely co-planar with each other;

e) providing the at least three spindle-tops'"'"' axes of rotation as perpendicular to the respective spindle-tops'"'"' flat surfaces;

f) providing a floating, rotatable abrading platen having a non-precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface inner radius and an annular abrading-surface outer radius and the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at a rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the abrading platen spherical-action rotation device allows spherical motion of the abrading platen about the abrading platen rotational center where the non-precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

h) attaching abrasive disk components having abrasive surfaces concentric to the circular flat surfaces of at least three spindle-tops wherein the spindle-top abrasive disk components have abrasive disk component outer diameters that are larger than the radial width of the non-precision-flat annular abrading-surface of the abrading platen wherein outer diameter portions of the spindle-top disk-type abrasive components extend radially over both the abrading platen non-precision-flat annular abrading-surface inner annular radius and the abrading platen non-precision-flat annular abrading-surface outer annular radius;

i) moving the abrading platen vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the abrading platen non-precision-flat annular abrading-surface to contact the abrasive surfaces of the spindle-top abrasive disk components wherein the at least three rotary spindles having the attached disk-type abrasive components provide at least three-point support of the abrading platen; and

j) applying a total abrading platen abrading contact force to the abrasive surface of the abrasive disk components that are attached to the at least three spindle-top flat surfaces by contact of the non-precision-flat annular abrading-surface of the abrading platen with the abrasive surfaces of the abrasive disk components that are attached to the flat surfaces of the respective at least three spindle-tops is controlled through the abrading platen spherical-action rotation device to allow the total abrading platen abrading contact force to be evenly distributed to respective at least three rotary spindles'"'"' abrasive disk components;

k) rotating the at least three spindle-tops having the attached abrasive disk components about the respective spindle-tops'"'"' rotation axes of rotation and rotating the abrading platen having the non-precision-flat annular abrading-surface about the abrading platen rotation axis to abrade the non-precision-flat annular abrading-surface of the abrading platen with the spindle-top disk-type abrasive components while the moving abrading platen non-precision-flat annular abrading-surface is in force-controlled abrading contact with the abrasive surfaces of the spindle-top abrasive disk components and where the non-precision-flat annular abrading-surface of the abrading platen develops a precision-flat annular abrading-surface due to the at least three spindle-tops abrasive disk components'"'"' abrading action on the abrading platen abrading-surface and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the at least three spindle-tops.

16. The process of claim 15 where the non-precision-flat annular abrading-surface of the abrading platen is abraded to recondition or reestablish planar precision-flatness of the non-precision-flat annular abrading platen annular abrading-surface using abrasive conditioning ring spindle-top abrasive components, the process comprising:

a) attaching abrasive conditioning ring abrasive components concentric to the circular flat surfaces of the at least three spindle-tops where the spindle-top abrasive conditioning rings have an abrasive coated annular flat surface that has an abrasive conditioning ring abrasive coated annular outer diameter that is larger than the radial width of the annular abrading-surface of the abrading platen and wherein outer diameter portions of the abrasive conditioning rings'"'"' annular abrasive flat surface extend radially over both the abrading platen non-precision-flat annular abrading-surface inner annular radius and the abrading platen non-precision-flat annular abrading-surface outer annular radius; and

b) attaching the abrasive conditioning rings to the at least three spindle-tops where the abrasive conditioning ring annular abrasive flat surfaces have equal-heights above each respective spindle-top;

c) moving the abrading platen vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the abrading platen non-precision-flat annular abrading-surface to contact the abrasive flat surfaces of the spindle-top abrasive conditioning rings wherein the at least three rotary spindles having the attached spindle-top abrasive conditioning rings provide at least three-point support of the abrading platen;

d) applying a total abrading platen abrading contact force to the abrasive flat surfaces of the conditioning rings that are attached to the at least three spindle-top flat surfaces by controlling contact of the non-precision-flat annular abrading-surface of the abrading platen with the abrasive flat surfaces of the abrasive conditioning rings through the abrading platen spherical-action rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the respective at least three rotary spindles'"'"' abrasive conditioning rings; and

e) rotating the at least three spindle-tops having the attached abrasive conditioning rings about the respective at least three spindle-tops axes of rotation and rotating the abrading platen about the abrading platen rotation axis to abrade the non-precision-flat annular abrading-surface of the abrading platen with the abrasive conditioning rings'"'"' abrasive flat surfaces while the moving abrading platen non-precision-flat annular abrading-surface is in force-controlled abrading contact with the abrasive conditioning rings'"'"' abrasive flat surfaces and where the non-precision-flat annular abrading-surface of the abrading platen develops a precision-flat annular abrading-surface due to the at least three spindle-tops'"'"' abrasive conditioning rings abrasive flat surfaces abrading action on the abrading platen abrading-surface and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the at least three spindle-tops.

17. A process of abrading a non-precision-flat annular abrasive surface of an abrasive disk that is attached to a precision-flat annular abrading-surface of a floating, rotatable abrading platen on an at least three-point fixed-spindle floating-platen abrading machine to recondition or reestablish the planar precision-flatness of the flat annular abrasive surface of the abrasive disk, the process comprising:

a) providing at least three rotary spindles having circular rotatable flat-surfaced spindle-tops that each have a spindle-top axis of rotation at a center of respective rotatable flat-surfaced spindle-tops;

b) providing an abrading machine base having a horizontal nominally-flat top surface and a spindle-circle where the spindle-circle is coincident with the machine base nominally-flat top surface;

c) providing the at least three rotary spindles with near-equal spacing between three of the at least three rotary spindles and providing that the at least three spindle-tops'"'"' axes of rotation intersect the machine base spindle-circle and the at least three rotary spindles are mechanically attached to the machine base nominally-flat top surface at the respective at least three rotary spindles'"'"' spindle-circle locations by respective at least three rotary spindle-support mounting legs that are near-equally spaced around the outer periphery of the rotary spindles to form at least three-point support of the at least three rotary spindles;

d) providing alignment to the at least three spindle-tops'"'"' flat surfaces to be precisely co-planar with each other;

e) providing the at least three spindle-tops'"'"' axes of rotation as perpendicular to the respective spindle-tops'"'"' flat surfaces;

f) providing a floating, rotatable abrading platen having a precision-flat annular abrading-surface that has an annular abrading-surface radial width and an annular abrading-surface, inner radius and an annular abrading-surface outer radius and where the abrading platen is supported by and is rotationally driven about an abrading platen rotation axis located at a rotational center of the abrading platen by a spherical-action rotation device located at the rotational center of the abrading platen and where the abrading platen spherical-action rotation device restrains the abrading platen in a radial direction relative to the abrading platen axis of rotation and where the abrading platen axis of rotation is concentric with the machine base spindle-circle;

g) wherein the abrading platen spherical-action rotation device allows spherical motion of the abrading platen about the abrading platen rotational center where the precision-flat annular abrading-surface of the abrading platen that is supported by the abrading platen spherical-action rotation device is nominally horizontal; and

h) providing flexible abrasive disk articles having non-precision-flat annular abrasive surfaces that have an abrasive surface annular radial width and an abrasive surface annular inner radius and an abrasive surface annular outer radius, and attaching a flexible abrasive disk in flat conformal contact with an abrading platen precision-flat annular abrading-surface such that the attached abrasive disk is concentric with the abrading platen precision-flat annular abrading-surface wherein the abrading platen precision-flat annular abrading-surface radial width is at least equal to the radial width of the attached flexible abrasive disk non-precision-flat annular abrasive surface and wherein the abrading platen precision-flat annular abrading-surface provides conformal support of the full-abrasive-surface of the flexible abrasive disk non-precision-flat annular abrasive surface where the abrading platen precision-flat annular abrading-surface inner radius is less than the inner radius of the attached flexible abrasive disk non-precision-flat annular abrasive surface and where the abrading platen precision-flat annular abrading-surface outer radius is greater than the outer radius of the attached flexible abrasive disk non-precision-flat annular abrasive surface;

i) attaching each flexible abrasive disk in flat conformal contact with the abrading platen precision-flat annular abrading-surface by disk attachment systems selected from the group consisting of vacuum disk attachment, mechanical disk attachment and adhesive disk attachment;

j) attaching abrasive disk components having abrasive surfaces concentric to the circular flat surfaces of at least three spindle-tops wherein the spindle-top abrasive disk components have abrasive disk component outer diameters that are larger than the radial width of the non-precision-flat annular abrasive surface of the flexible disk that is attached to the abrading platen precision-flat annular abrading-surface wherein outer diameter portions of the spindle-top abrasive disk components extend radially over both the abrasive disk'"'"'s non-precision-flat annular abrasive surface inner radius and the abrasive disk'"'"'s non-precision-flat annular abrasive surface outer radius;

k) moving the abrading platen vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the flexible abrasive disk non-precision-flat annular abrasive surface to contact the abrasive surfaces of the spindle-top disk-type abrasive components wherein the at least three rotary spindles having the attached spindle-top disk-type abrasive components provide at least three-point support of the abrading platen;

l) applying a total abrading platen abrading contact force to the abrasive surface of the spindle-top disk-type abrasive components by contact of the flexible abrasive disk non-precision-flat annular abrasive surface with the abrasive surfaces of the disk-type abrasive components that are attached to the flat surfaces of the respective at least three spindle-tops that is controlled through the abrading platen spherical-action abrading platen rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the respective at least three rotary spindles'"'"' spindle-top disk-type abrasive components; and

m) rotating the at least three spindle-tops having the attached disk-type abrasive components about the respective spindle-tops'"'"' rotation axes of rotation and rotating the abrading platen having the attached flexible abrasive disk with the non-precision-flat annular abrasive surface about the abrading platen rotation axis to abrade the non-precision-flat annular abrasive surface of the flexible abrasive disk with the spindle-top disk-type abrasive components while the moving non-precision-flat annular abrasive surface of the flexible abrasive disk that is attached to the moving abrading platen is in force-controlled abrading contact with the abrasive surfaces of the spindle-top disk-type abrasive components and where the non-precision-flat annular abrasive surface of the flexible abrasive disk develops a precision-flat annular abrasive surface due to the at least three spindle-tops disk-type abrasive components'"'"' abrading action on the flexible abrasive disk annular abrasive surface and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the at least three spindle-tops.

18. The process of claim 17 where the non-precision-flat abrasive disk annular abrasive surface of an abrasive disk that is attached to a precision-flat annular abrading platen abrading-surface is abraded to recondition or reestablish planar precision-flatness of the annular abrasive surface of the non-precision-flat abrasive disk using abrasive conditioning rings types of abrasive components comprising:

a) attaching abrasive conditioning ring abrasive components concentric to the circular flat surfaces of at least three spindle-tops where the spindle-top abrasive conditioning rings have an abrasive coated annular flat surface that has an abrasive conditioning ring abrasive coated annular outer diameter that is larger than the radial width of the abrasive disk non-precision-flat annular abrasive surface and wherein outer diameter portions of the abrasive conditioning rings'"'"' annular abrasive flat surface extend radially over both the abrasive disk non-precision-flat annular abrasive surface inner annular radius and the abrasive disk non-precision-flat annular abrasive surface outer annular radius; and

b) attaching the abrasive conditioning rings to the at least three spindle-tops where the abrasive conditioning ring annular abrasive flat surfaces have equal-heights above each respective spindle-top;

c) moving the abrading platen vertically along the abrading platen rotation axis by the abrading platen spherical-action rotation device to allow the flexible abrasive disk non-precision-flat annular abrasive surface to contact the abrasive flat surfaces of the spindle-top abrasive conditioning rings wherein the at least three rotary spindles having the attached spindle-top abrasive conditioning rings provide at least three-point support of the abrading platen;

d) applying a total abrading platen abrading contact force to the abrasive flat surface of the abrasive conditioning rings abrasive components that are attached to the at least three spindle-top flat surfaces by contact of the non-precision-flat annular abrasive surface of the flexible abrasive disk with the abrasive flat surfaces of the abrasive conditioning rings is controlled through the abrading platen spherical-action rotation device to allow the total abrading platen abrading contact force to be evenly distributed to the respective at least three rotary spindles'"'"' abrasive conditioning rings; and

e) rotating the at least three spindle-tops having the attached abrasive conditioning rings about the respective at least three spindle-tops axes of rotation and rotating the abrading platen about the abrading platen rotation axis to abrade the non-precision-flat annular abrasive surface of the flexible abrasive disk with the abrasive conditioning rings'"'"' abrasive flat surfaces while the moving non-precision-flat annular abrasive surface of the abrasive disk that is attached to the moving abrading platen is in force-controlled abrading contact with the abrasive conditioning rings abrasive flat surfaces and where the non-precision-flat abrasive disk annular abrasive surface develops a precision-flat annular abrasive surface due to the at least three spindle-tops'"'"' abrasive conditioning rings abrasive flat surfaces abrading action on the flexible abrasive disk annular abrasive surface and where the abrading platen precision-flat annular abrading-surface assumes a co-planar alignment with the precisely co-planar flat surfaces of the at least three spindle-tops.

19. The process of claim 17 where the at least three rotary spindles have at least three-point support legs with adjustable height on each of the at least three-point support legs and where the at least three support legs are attached to a supporting surface of each rotary spindle and the at least three support legs are positioned around the periphery of the rotary spindle body with near-equal distances between the support legs to form an at least three-point support of the rotary spindle and where each spindle-top flat surface can be aligned to be precisely co-planar with the other spindle-tops'"'"' flat surfaces by adjusting the height of the at least three rotary spindle support legs and where mechanical fasteners attach each of the at least three-point rotary spindle support legs to the machine base top surface thereby attaching the at least three rotary spindles to the machine base.

20. The process of claim 17 wherein the abrading platen flexible abrasive disk articles are selected from the group consisting of:

flexible abrasive disks, flexible raised-island abrasive disks, flexible abrasive disks with resilient backing layers, flexible abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, flexible abrasive disks having attached solid abrasive pellets, flexible chemical mechanical planarization resilient disk pads that are suitable for use with liquid abrasive slurries, flexible chemical mechanical planarization resilient disk pads having nap covers, flexible shallow-island chemical mechanical planarization abrasive disks, flexible shallow-island abrasive disks with resilient backing layers having a vacuum-seal polymer backing layer, and flexible flat-surfaced metal or polymer disks.