Sensor for measuring gas permeability of a test material

• US 8,603,825 B2
• Filed: 03/31/2004
• Issued: 12/10/2013
• Est. Priority Date: 03/31/2004
• Status: Active Grant

• Current Assignee: Agency For Science Technology and Research
• Original Assignee: Agency For Science Technology and Research
• Inventors: Chua, Soo Jin, Ramadas, Senthil Kumar, He, Xinbo
• Primary Examiner(s): Menon, Krishnan S
• Assistant Examiner(s): Fritchman, Rebecca M
• Application Number:
  US10/594,789
• Publication Number:
  US 20070292957A1
• Time in Patent Office: 3,541 Days
• Field of Search: 436/5, 427/58, 422/82.02
• US Class Current: 436/5
• CPC Class Codes: G01N 15/0826 and measuring fluid flow rate, i.e. permeation rate or pressure change
• CPC Class Codes: G01N 27/121 for determining moisture content, e.g. humidity, of the fluid moisture content of the tested material G01N27/048

Abstract

A sensor for measuring gas permeability of a test material, comprising: an electrically conductive sensing element that comprises a water and/or oxygen sensitive material, wherein the reaction of said material with water or oxygen when the sensing element is contacted with water and/or oxygen results in a change in the electrical conductivity of the sensing element, and two electrodes electrically connected to the sensing element.

Claims

1. A sensor for measuring gas permeability of a test material, comprising:

an electrically conductive sensing element that comprises a water and/or oxygen sensitive material, wherein the reaction of said material with water or oxygen when the sensing element is contacted with water and/or oxygen results in a change in the electrical conductivity of the sensing element, wherein the water and/or oxygen sensitive material is selected from the group consisting of metals of Group I of the periodic system of elements, metals of Group II of the periodic system of elements, iron, tin, chromium, conductive polymers, and mixtures and combinations thereof;

two electrodes electrically connected to the sensing element;

a base substrate that supports the sensing element, wherein the electrodes are located on a surface of the substrate, wherein the electrodes are spaced apart, thereby forming a trench, wherein edges of the trench are defined by the edge of each electrode and the base of the trench is the base substrate, wherein the sensing element is located in the trench; and

a liner layer interdisposed between the sensing element and the base substrate, wherein the liner layer adjoins the sensing element, and wherein the liner layer comprises an organic polymer and/or an inorganic polymer.

2. The sensor of claim 1, wherein the electrodes provide electrical connection between the sensing element and an electrical signal evaluation means.

3. The sensor of claim 1, wherein the water and/or oxygen sensitive material is selected from the group consisting of calcium and magnesium.

4. The sensor of claim 1, wherein the conductive polymer is selected from the group consisting of polyaniline, polypyrrole and polythiophene, polyacetylene, poly-p-phenylene, and polyvinylpyridine, thiophene-bipyridine copolymers, polypyridine, polybipyridine, and organometallic polyphenylenes.

5. The sensor of claim 1, wherein the electrodes comprise an electrically conductive material selected from the group consisting of a metal, metal oxide and mixtures and combinations thereof.

6. The sensor of claim 5, wherein the metal is selected from the group consisting of silver, gold, aluminium and copper.

7. The sensor of claim 5, wherein the metal oxide is selected from the group consisting of indium tin oxide, aluminium zinc oxide, and indium zinc oxide.

8. The sensor of claim 7, wherein the base substrate comprises a polymeric material.

9. The sensor of claim 8, wherein the polymeric material comprises an organic polymer selected from the group consisting of polycarbonate, polyethylene, polythersulfone, epoxy resins, polyethylene terephthalate, polystyrenes, polyurethanes and polyacrylates.

10. The sensor of claim 8, wherein the polymeric material comprises an inorganic polymer selected from the group consisting of silicones, polydimethylsiloxanes, biscyclopentadienyl iron, polydichlorophosphazene and derivatives thereof.

11. The sensor of claim 7, further comprising a barrier layer formed on the base substrate.

12. The sensor of claim 11, wherein the barrier layer comprises a material selected from the group consisting of metals, metal oxides, ceramic oxides, inorganic polymers, organic polymers and mixtures and combinations thereof.

13. The sensor of claim 1, further comprising an encapsulation enclosing the sensing element.

14. The sensor of claim 13, wherein the encapsulation comprises a polymeric material selected from the group consisting of epoxy polymers, polysulfide, silicone and polyurethane.

15. The sensor of claim 14, wherein the encapsulation provides a hollow space around the sensing element.

16. The sensor of claim 15, wherein the hollow space is filled with an inert gas.

17. The sensor of claim 13, further comprising a cover substrate, wherein the encapsulation is formed as side (lateral) walls surrounding the sensing element, and the cover substrate is arranged to be in contact with the side (lateral) walls.

18. The sensor of claim 17, wherein the cover substrate comprises a material selected from the group consisting of glass, aluminium and copper.

19. The sensor of claim 1, further comprising a protective layer covering at least a portion of the sensing element.

20. The sensor of claim 19, wherein the protective layer comprises a material selected from the group consisting of a metal, a metal alloy, a metal oxide, a metal oxide mixture, a metal fluoride and an organic polymer.

21. The sensor of claim 20, wherein the metal fluoride is selected from the group consisting of LiF and MgF₂.

22. The sensor of claim 1, wherein the organic polymer is substantially permeable to gas.

23. The sensor of claim 1, wherein the organic polymer is selected from the group consisting of acrylic polymers, and parylene type polymers.

24. The sensor of claim 1, wherein the inorganic polymer comprises a silicone-based polymer.

25. A method of producing a sensor for measuring gas permeability of a test material, said method comprising:

providing a base substrate that supports a sensing element and that further comprises a liner layer, wherein the liner layer comprises an organic polymer and/or an inorganic polymer;

depositing on the liner layer an electrically conducting sensing element that comprises a water and/or oxygen sensitive material selected from the group consisting of metals of Group I of the periodic system of elements, metals of Group II of the periodic system of elements, iron, tin, chromium, conductive polymers, and mixtures and combinations thereof, so that the liner layer is interdisposed between the base substrate and the sensing element and the liner layer adjoins the sensing element;

providing two electrodes, wherein the electrodes are located on a surface of the substrate, wherein the electrodes are spaced apart, thereby forming a trench, wherein edges of the trench are defined by the edge of each electrode and the base of the trench is the base substrate, wherein the sensing element is located in the trench; and

connecting the electrically conductive sensing element to said pair of electrodes.

26. A system for measuring the gas permeability of a test material, said system comprising a sensor for detecting moisture permeation through the test material, said sensor comprising:

an electrically conductive sensing element that comprises a water and/or oxygen sensitive material selected from the group consisting of metals of Group I of the periodic system of elements, metals of Group II of the periodic system of elements, iron, tin, chromium, conductive polymers, and mixtures and combinations thereof, wherein the reaction of said material with water or oxygen when the sensing element is contacted with water and/or oxygen results in a change in the electrical conductivity of the sensing element;

two electrodes electrically connected to the sensing element, wherein the electrodes provide electrical connection between the sensing element and an electrical signal evaluation means;

a base substrate that supports the sensing element, wherein the electrodes are located on a surface of the substrate, wherein the electrodes are spaced apart, thereby forming a trench, wherein edges of the trench are defined by the edge of each electrode and the base of the trench is the base substrate, wherein the sensing element is located in the trench; and

a liner layer interdisposed between the sensing element and the base substrate, wherein the liner layer adjoins the sensing element, and wherein the liner layer comprises an organic polymer and/or an inorganic polymer.

27. A method of determining the gas permeability of a test material using a sensor for measuring gas permeability of the test material, said sensor comprising:

an electrically conductive sensing element that comprises a water and/or oxygen sensitive material selected from the group consisting of metals of Group I of the periodic system of elements, metals of Group II of the periodic system of elements, iron, tin, chromium, conductive polymers, and mixtures and combinations thereof, wherein the reaction of said material with water or oxygen when the sensing element is contacted with water and/or oxygen results in a change in the electrical conductivity of the sensing element;

two electrodes electrically connected to the sensing element, wherein the electrodes provide electrical connection between the sensing element and an electrical signal evaluation means;

a base substrate that supports the sensing element, wherein the electrodes are located on a surface of the substrate, wherein the electrodes are spaced apart, thereby forming a trench, wherein edges of the trench are defined by the edge of each electrode and the base of the trench is the base substrate, wherein the sensing element is located in the trench; and

a liner layer interdisposed between the sensing element and the base substrate, wherein the liner layer adjoins the sensing element, and wherein the liner layer comprises an organic polymer and/or an inorganic polymer;

wherein said method comprises;

contacting the sensing element with water and/or oxygen;

measuring the changes in electrical conductivity of the sensing element over a period of time; and

calculating the gas permeability coefficient of the test material based on the measurements.

28. The method of claim 27, further comprising measuring the change in 1/f type noise spectrum density over the period of time.