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Methods and apparatus for hybrid outlier detection

  • US 8,606,536 B2
  • Filed: 10/15/2009
  • Issued: 12/10/2013
  • Est. Priority Date: 05/24/2002
  • Status: Active Grant
First Claim
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1. A test data analysis system for analyzing test data for multiple components fabricated on a wafer, comprising:

  • a memory configured to store the test data; and

    a hybrid outlier system having access to the memory and configured to, for each of a plurality of test data for each of a plurality of components;

    select a central component from the plurality of components;

    identify a plurality of local components in a local area near the central component;

    determine a derived value of the test data for the plurality of local components;

    compare the test data for the central component to the derived value for the plurality of local components; and

    identify whether the test data for the central component represents a hybrid outlier according to the comparison of the test data for the central component to the derived value for the plurality of local components.

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