Capillary actuator deployment

• US 8,608,393 B2
• Filed: 11/15/2010
• Issued: 12/17/2013
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C., Calvet, Robert J., Liu, Xiaolei
• Primary Examiner(s): FULLER, RODNEY EVAN
• Application Number:
  US12/946,657
• Publication Number:
  US 20120120308A1
• Time in Patent Office: 1,128 Days
• Field of Search: 396/529, 310/309
• US Class Current: 396/529
• CPC Class Codes: F16H 21/44 for conveying or interconverting oscillating or reciprocating motions
• CPC Class Codes: G02B 27/646 compensating for small deviations, e.g. due to vibration or shake movement of one or more optical elements for control of motion blur in cameras, projectors or printers G03B2205/0007; image stabilisation in cameras peculiar to the presence or use of an electronic image sensor H04N23/68
• CPC Class Codes: G02B 7/08 adapted to co-operate with a remote control mechanism
• CPC Class Codes: G02B 7/102 controlled by a microcomputer cameras with interchangeable lenses G03B17/14
• CPC Class Codes: G03B 2205/0046 Movement of one or more optical elements for zooming
• CPC Class Codes: G03B 2205/0069 using electromagnetic actuators, e.g. voice coils
• CPC Class Codes: G03B 3/10 Power-operated focusing
• CPC Class Codes: G03B 5/00 Adjustment of optical system relative to image or object surface other than for focusing
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 74/18992 Reciprocating to reciprocating

Abstract

A method for making an actuator includes forming a substantially planar actuator device of an electrically conductive material, the device incorporating an outer frame, a fixed frame attached to the outer frame, a moveable frame disposed parallel to the fixed frame, a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame, an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame, and fixing the moveable frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.

Claims

1. A method for making a device, the method comprising:

forming a substantially planar actuator, the actuator comprising;

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame;

an element coupled to the moveable frame for coplanar, rectilinear movement relative to the fixed and outer frames and coplanar, rotational movement about a central axis of the element and,

moving the moveable frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance.

2. The method of claim 1, further comprising fixing the moveable frame at the deployed position for substantially rectilinear, movement relative to the fixed frame.

3. The method of claim 1, wherein the moving comprises:

forming a moving plate having an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of arms extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap;

forming a pair of parallel slots and a pair of parallel registration keys in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof;

forming a serpentine reservoir for a liquid adhesive in the outer frame and in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and

,

disposing a liquid adhesive in the gap between the adjacent side walls of the moving plate and the outer frame such that the adhesive is wicked into the serpentine reservoir in the outer plate and creates a capillary force between the adjacent side walls of the moving plate and the outer frame that draws the adjacent side wall of the moving plate laterally toward the adjacent side wall of the outer frame, thereby causing the respective arms, slots, registration locks and keys of the moving plate and the outer frame to move into engagement with each other and the motion control flexure to urge the moveable frame to the deployed position.

4. The method of claim 3, further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

5. The method of claim 1, wherein the moving comprises:

forming a moving plate coupled to the motion control flexure by a deployment flexure and having a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame;

disposing a liquid adhesive in the zigzag gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the outer frame that draws the moving plate and the deployment flexure laterally toward the outer plate, thereby causing the motion control flexure to urge the moveable frame to the deployed position; and

,

curing the liquid adhesive to fix the moveable frame in the deployed position.

6. The method of claim 1, wherein the moving comprises:

forming a plurality of moving plates respectively interleaved between a corresponding plurality of stationary plates attached to the outer frame and defining a corresponding plurality of gaps between respective outer sidewalls of the moving plates and respective inner sidewalls of the stationary plates, a penultimately innermost one of the moving plates having an L-shaped arm overarching an innermost one of the stationary plates and extending downwardly and adjacent to an upper end of an inner side wall of an innermost one of the moving plates;

coupling an outermost one of the moving plates to an outermost one of the stationary plates with an attachment spring;

coupling adjacent ones of the moving plates intermediate the outermost and innermost ones of the stationary plates to each other with attachment springs;

coupling the innermost one of the moving plates to the motion control flexure with a deployment flexure; and

,

disposing a liquid adhesive in the gaps such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plates and the stationary plates that draws the moving plates and the deployment flexure laterally, thereby causing the motion control flexure to urge the moveable frame to the deployed position.

7. The method of claim 6, wherein the disposing comprises disposing the liquid adhesive in the gaps sequentially, beginning with an outermost one of the gaps and proceeding inwardly.

8. The method of claim 6, further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

9. The method of claim 1, wherein:

an outer end of the motion control flexure is coupled to the outer frame by a plurality of attachment springs coupled to each other and to the motion control flexure at a nexus,

an inner end of the motion control flexures is coupled to the moving frame, and wherein moving the moveable frame to the deployed position comprises;

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

forming a connection beam coupling the moving plate to the nexus; and

,

disposing a liquid adhesive in the angular gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and connection beam laterally about the hinge and toward the stationary plate, thereby causing the motion control flexure to urge the moveable frame to the deployed position.

10. The method of claim 9, further comprising curing the liquid adhesive such that the moveable frame is locked in the deployed position.

11. The method of claim 1, wherein the moving comprises:

forming a moving plate rotatably attached to a stationary plate by a hinge at a lower end thereof and defining an angular gap between adjacent sidewalls of the moving plate and the stationary plate;

coupling an inner end of the moving plate to the moveable frame with a deployment flexure; and

,

disposing a liquid adhesive in the angular gap such that the liquid adhesive creates a capillary force between the adjacent side walls of the moving plate and the stationary plate that rotates the moving plate and deployment flexure laterally about the hinge and toward the stationary plate, thereby causing the moveable frame to move to the deployed position.

12. The method of claim 11, further comprising curing the liquid adhesive such that the moveable frame is fixed in the deployed position.

13. An actuator made in accordance with the method of claim 1, wherein the actuator comprises a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame.

14. The method of claim 1, wherein the device is an electronic device.

15. The method of claim 1, wherein the device is a camera.

16. A device, comprising a substantially planar actuator, the actuator device comprising:

an outer frame;

a fixed frame attached to the outer frame;

a moveable frame disposed parallel to the fixed frame;

a motion control flexure coupling the moveable frame to the outer frame for coplanar, rectilinear movement relative to the outer frame and the fixed frame;

an element coupled to the moveable frame for coplanar, rectilinear movement relative to the fixed and outer frames and coplanar, rotational movement about a central axis of the element and,

wherein the moveable frame is fixed at a deployed position that is coplanar with, parallel to and spaced a selected distance apart from the fixed frame for substantially perpendicular movement relative thereto.

17. The device of claim 16, further comprising:

a moving plate having an upper portion coupled to the outer frame by an attachment spring, a lower end coupled to the motion control flexure, a side wall disposed adjacent to and spaced apart from a side wall of the outer frame, a pair of aims extending toward and defining a gap between the adjacent side walls of the moving plate and the outer frame, and a pair of registration locks disposed in the gap;

a pair of parallel slots and a pair of parallel registration keys disposed in the adjacent side wall of the outer frame, each slot being configured to receive a respective one of the arms of the moving plate and each registration key being configured to engage in a respective one of the registration locks thereof;

a serpentine reservoir for a liquid adhesive formed in the outer frame and disposed in communication with the gap between the adjacent side walls of the moving plate and the outer frame; and

,

an adhesive disposed in the gap between the adjacent side walls of the moving plate and the outer frame and fixing the moveable frame in the deployed position.

18. The device of claim 16, further comprising:

a moving plate coupled to the motion control flexure by a deployment flexure and having a side wall disposed adjacent to a side wall of the outer frame, the adjacent side walls of the moving plate and the outer frame respectively containing complementary zigzag patterns defining a zigzag gap between the adjacent side walls of the moving plate and the outer frame; and

,

an adhesive disposed in the zigzag gap and fixing the moveable frame in the deployed position.

19. The device of claim 16, wherein the actuator device is formed of an electrically conductive material, wherein the actuator comprises a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame.

20. The device of claim 16, wherein the device is an electronic device.

21. The device of claim 16, wherein the device is a camera.