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MEMS switches and fabrication methods

  • US 8,609,450 B2
  • Filed: 12/06/2010
  • Issued: 12/17/2013
  • Est. Priority Date: 12/06/2010
  • Status: Expired due to Fees
First Claim
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1. A method of fabricating a microelectromechanical (MEMS) device, the method comprising:

  • forming a conductive layer of a stationary electrode and a conductive layer of a deflection electrode each having a vertical orientation relative to a top surface of a supporting layer and laterally separated from each other by a contact gap; and

    forming at least one drive electrode,wherein the deflection electrode is configured to be electrostatically attracted with a cantilevered motion toward the at least one drive electrode, when the at least one drive electrode is electrically biased, so that the conductive layer of the deflection electrode bridges the contact gap to contact the conductive layer of the stationary electrode.

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