Structure and method for a transformer with magnetic features

• US 8,610,247 B2
• Filed: 12/30/2011
• Issued: 12/17/2013
• Est. Priority Date: 12/30/2011
• Status: Active Grant

• Current Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Original Assignee: Taiwan Semiconductor Manufacturing Company Limited
• Inventors: Yen, Hsiao-Tsung, Lin, Yu-Ling, Chen, Huan-Neng, Chen, Ho-Hsiang, Lu, Ying-Ta
• Primary Examiner(s): YUSHIN, NIKOLAY K
• Application Number:
  US13/340,856
• Publication Number:
  US 20130168809A1
• Time in Patent Office: 718 Days
• Field of Search: 257/531, 257/723, 257/778, 257/E23.021
• US Class Current: 257/531
• CPC Class Codes: H01F 2027/2809 on stacked layers
• CPC Class Codes: H01F 27/2804 Printed windings
• CPC Class Codes: H01F 5/003 Printed circuit coils
• CPC Class Codes: H01L 23/5226 Via connections in a multilevel interconnection structure
• CPC Class Codes: H01L 23/5227 Inductive arrangements or effects of, or between, wiring layers other inductive arrangements H01L23/645
• CPC Class Codes: H01L 23/528 Geometry or layout of the interconnection structure H01L27/0207 takes precedence; algorithms G06F30/00
• CPC Class Codes: H01L 28/10 Inductors
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

The present disclosure provides a semiconductor device. The semiconductor device includes a first inductor formed on a first substrate; a second inductor formed on a second substrate and conductively coupled with the first inductor as a transformer; and a plurality of micro-bump features configured between the first and second substrates. The plurality of micro-bump features include a magnetic material having a relative permeability substantially greater than one and are configured to enhance coupling between the first and second inductors.

Claims

1. A semiconductor device, comprising:

a first inductor formed on a first substrate;

a second inductor formed on a second substrate and conductively coupled with the first inductor as a transformer;

a plurality of bump features configured between the first and second substrates, wherein the plurality of bump features include a magnetic material having a relative permeability substantially greater than one and are configured to enhance coupling between the first and second inductors; and

a plurality of vias configured between the first and second substrates and integrated with the plurality of bump features such that at least one via from plurality of vias interposes a first bump feature and a second bump feature from the plurality of bump features.

2. The semiconductor device of claim 1, wherein

the first substrate includes a semiconductor substrate having an integrated circuit formed thereon;

and

the second substrate includes an interposer bonded to the first substrate.

3. The semiconductor device of claim 2, wherein the interposer includes a silicon substrate having the plurality of vias.

4. The semiconductor device of claim 1, wherein the plurality of bump features are electrically disconnected from the first inductor and the second inductor.

5. The semiconductor device of claim 1, further comprising a dielectric under-fill material disposed between the first and second substrates such that the plurality of bump features are embedded in the under-fill material.

6. The semiconductor device of claim 1, wherein the magnetic material includes one of nickel, cobalt and iron.

7. The semiconductor device of claim 1, wherein the magnetic material is selected from the group consisting of nickel, nickel nitride, and nickel silicide.

8. The semiconductor device of claim 1, wherein the bump features are shaped to have a diameter and a height greater than the diameter.

9. The semiconductor device of claim 1, wherein the plurality of bump features includes a plurality of conductive micro-bumps.

10. A semiconductor device, comprising:

a semiconductor substrate having an integrated circuit (IC) device;

an interconnect structure disposed on the semiconductor substrate and coupled with the IC device; and

a transformer disposed on the semiconductor substrate and integrated in the interconnect structure, wherein the transformer includes;

a first inductor,

a second inductor conductively coupled with the first inductor, and

a magnetic feature that is disposed approximate the first and second inductors and is configured to enhance inductive coupling between the first and second inductors, wherein the magnetic feature includes a plurality of sub-features separated and distributed between the first and second inductors.

11. The semiconductor device of claim 10, wherein the magnetic feature includes a magnetic material having a relative permeability substantially greater than one.

12. The semiconductor device of claim 10, wherein the magnetic feature includes a magnetic material selected from the group consisting of nickel, iron, cobalt, or combinations thereof.

13. The semiconductor device of claim 10, wherein the magnetic feature is configured between the first and second inductors and is not electrically connected to the first and second inductors.

14. The semiconductor device of claim 10, wherein

the interconnect structure includes a plurality of metal layers having a first metal layer, a second metal layer and a via layer disposed therebetween;

the first inductor is disposed in the first metal layer;

the second inductor is disposed in the second metal layer; and

the magnetic feature is disposed in the via layer.

15. The semiconductor device of claim 10, wherein

the semiconductor substrate has a top surface;

each of the sub-features of the magnetic feature has a dimension D in a top view toward top surface; and

each of the first and second inductors includes a metal line with a width W,

wherein a ratio D/W ranges between about 5 and about 20.

16. The semiconductor device of claim 10, wherein:

the first inductor includes a first spiral structure disposed in a first plurality of metal layers;

the second inductor includes a second spiral structure disposed in a second plurality of metal layers over the first plurality of metal layers; and

the magnetic feature is formed in the first and second plurality of metal layers and is extended through the first and second spiral structures.

17. The semiconductor device of claim 10, wherein each of the first and second inductors includes multiple turns.

18. An integrated circuit structure, comprising:

a first substrate having a first inductor;

a second substrate having a second inductor configured to couple with the first inductor as a transformer;

a through substrate via (TSV) interposer bonded between the first and second substrates and having a plurality of via features embedded therein; and

at least a subset of the via features being configured approximate the first and second inductors and including a magnetic material with a relative permeability substantially greater than one.

19. The integrated circuit structure of claim 18, wherein the subset of via features are configured to be electrically disconnected from the first and second inductors.

20. The integrated circuit structure of claim 18, wherein the magnetic material is selected from the group consisting of nickel, cobalt, iron and combinations thereof.