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Microelectromechanical resonators having resistive heating elements therein configured to provide frequency tuning through convective heating of resonator bodies

  • US 8,610,336 B1
  • Filed: 09/30/2011
  • Issued: 12/17/2013
  • Est. Priority Date: 09/30/2011
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical resonator, comprising:

  • a substrate having a recess therein;

    a resonator body suspended over the recess, said resonator body anchored on opposing sides thereof to first and second portions of said substrate that extend over the recess as first and second ledges, respectively; and

    a resistive heating element in said substrate, said resistive heating element comprising first and second resistive heating segments embedded in the first and second ledges, respectively.

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