Fine pitch wire grid polarizer
First Claim
1. A method of making a wire grid polarizer, the method comprising:
- a. obtaining a wire grid polarizer having an array of parallel, elongated polarizing wires disposed on a substrate;
b. forming a protective layer at a top surface and sides of the wires;
c. anisotropically etching the wire grid polarizer in a central portion of each wire to the substrate and exposing the substrate forming a gap in the central portion of each wire that extends a height the wire to form two parallel, elongated polarizing rods substantially located at corners where the wires contacted the substrate.
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Accused Products
Abstract
A fine pitch wire grid polarizer can have a pitch of less than 80 nanometers and a protective layer on the wires, by anisotropically etching the wire grid polarizer to form two parallel, elongated rods substantially located at corners where the wires contacted the substrate. The rods can be polarizing elements. A wire grid polarizer can have a repeated pattern of groups of parallel elongated wires disposed over a substrate. Each group of elongated wires comprises at least three wires. At least one wire at an interior of each group can be taller by more than about 10 nm than outermost wires of each group. Wires of a wire grid polarizer can be a byproduct of an etch reaction. A multi-step wire grid polarizer can comprise a base with a plurality of parallel multi-step ribs disposed on the base and a coating disposed along vertical surfaces of the steps.
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Citations
12 Claims
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1. A method of making a wire grid polarizer, the method comprising:
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a. obtaining a wire grid polarizer having an array of parallel, elongated polarizing wires disposed on a substrate; b. forming a protective layer at a top surface and sides of the wires; c. anisotropically etching the wire grid polarizer in a central portion of each wire to the substrate and exposing the substrate forming a gap in the central portion of each wire that extends a height the wire to form two parallel, elongated polarizing rods substantially located at corners where the wires contacted the substrate. - View Dependent Claims (2, 3)
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4. A nanometer sized multi-step device, comprising:
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a. a base; b. a plurality of parallel multi-step ribs disposed on the base; c. each rib comprising multiple adjacent steps on each side thereof, the multiple adjacent steps comprising; i. an upper step with a top horizontal surface flanked by upper vertical surfaces; and ii. at least one pair of lower steps having two horizontal surfaces on opposite sides of the upper step, and flanked by lower vertical surfaces; d. a coating along the vertical surfaces of the upper step and the at least one pair of lower steps; and e. the coating along the vertical surface of any step is separate from the coating along a vertical surface of an adjacent upper or lower step. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12)
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Specification