Micro electro mechanical system optical switching

• US 8,611,706 B1
• Filed: 11/10/2008
• Issued: 12/17/2013
• Est. Priority Date: 11/09/2007
• Status: Active Grant

• Current Assignee: National Technology & Engineering Solutions Of Sandia LLC (Honeywell International Inc.)
• Original Assignee: Lockheed Martin Corporation (Martin Marietta Corporation)
• Inventors: Thorson, Kevin J., Stevens, Rick C., Kornrumpf, William P., Spahn, Olga B., Kryzak, Charles J., Leininger, Brian S., Forman, Glenn A., Iannotti, Joseph A., Cowan, William D., Dagel, Daryl J.
• Primary Examiner(s): Peng, Charlie
• Assistant Examiner(s): EL SHAMMAA, MARY A
• Application Number:
  US12/291,428
• Time in Patent Office: 1,863 Days
• Field of Search: 385 15- 19
• US Class Current: 385/18
• CPC Class Codes: G02B 26/0866 the reflecting means being moved or deformed by thermal means
• CPC Class Codes: G02B 6/3518 the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device MEMS devices in general B81B; manufacture of MEM devices in general B81C; micromechanical devices controlling the direction of light G02B26/0833

Abstract

The present disclosure includes apparatus, system, and method embodiments that provide micro electro mechanical system optical switching and methods of manufacturing switches. For example, one optical switch embodiment includes at least one micro electro mechanical system type pivot mirror structure disposed along a path of an optical signal, the structure having a mirror and an actuator, and the mirror having a pivot axis along a first edge and having a second edge rotatable with respect to the pivot axis, the mirror being capable of and arranged to be actuated to pivot between a position parallel to a plane of an optical signal and a position substantially normal to the plane of the optical signal.

Claims

1. An optical switch comprising;

at least one micro electro mechanical system type pivot mirror structure disposed along a path of an optical signal, the structure having;

a mirror;

an actuator; and

a control logic component, including logic instructions executable for actuating the mirror such that the optical signal is routed to a particular output based upon instructions received by the control logic component;

wherein the mirror includes a pivot axis along a first edge and a second edge rotatable with respect to the pivot axis via the actuator, the mirror being rotatable between a position parallel to a plane of an optical signal and a position substantially normal to the plane of the optical signal, wherein the mirror can be tuned to one or more positions other than the position parallel to the plane and the position normal to the plane, including one or more positions beyond the position normal to the plane of the optical signal.

2. The optical switch of claim 1 where the mirror is constructed having a spring force as the actuator that moves the mirror from the position substantially normal to the plane of the optical signal to the position parallel to the plane of the optical signal.

3. The optical switch of claim 1 where the mirror is constructed having a thermally actuated pivot mechanism as the actuator that moves the mirror from the position parallel to the plane of the optical signal to the position substantially normal to the plane of the optical signal.

4. The optical switch of claim 1 where the mirror is constructed having a electro-static zipper actuated pivot mechanism as the actuator that moves the mirror from the position parallel to the plane of the optical signal to the position substantially normal to the plane of the optical signal.

5. The optical switch of claim 1 where the mirror is constructed having a nano-tractor actuated pivot mechanism as the actuator that moves the mirror from the position parallel to the plane of the optical signal to the position substantially normal to the plane of the optical signal.

6. The optical switch of claim 1 where the mirror is planar and has an optimal angle of 90 degrees to the plane of the optical signal in at least one special dimension.

7. An optical switching system comprising;

at least one micro electro mechanical system type pivot mirror structure disposed along a path of an optical signal, the structure having a mirror and an actuator;

the mirror having a pivot axis along a first edge and having a second edge rotatable with respect to the pivot axis via the actuator, the mirror being rotatable between a position parallel to a plane of an optical signal and a position where at least a portion of the mirror is rotated into the plane of the optical signal, wherein the mirror can be tuned to one or more positions other than the position parallel to the plane and the position where at least a portion of the mirror is rotated into the plane, including one or more positions beyond a position normal to the plane of the optical signal;

a number of optical input paths for directing the optical signal toward at least one of the pivot mirror structures;

a number of optical output paths for receiving the optical signal from at least one of the pivot mirror structures; and

a control logic component for actuating one or more of the at least one mirror structures via the actuator, wherein the control logic component includes logic instructions executable for actuating one or more of the at least one mirror structures such that the optical signal is routed to a particular output based upon instructions received by the control logic component.

8. The system of claim 7 where the control logic component includes logic instructions executable for actuating one or more of the at least one mirror structures such that the optical signal is directed to a bypass output to bypass a particular optical output path when a fault in the particular output path has been detected.

9. The system of claim 7 where the system includes multiple units each having:

at least one micro electro mechanical system type pivot mirror structure disposed along a path of an optical signal, the structure having a mirror and an actuator;

the mirror having a pivot axis along a first edge and having a second edge rotatable with respect to the pivot axis via the actuator, the mirror being rotatable between a position parallel to a plane of an optical signal and a position where at least a portion of the mirror is rotated into the plane of the optical signal;

a number of optical input paths for directing the optical signal toward at least one of the pivot mirror structures;

a number of optical output paths for receiving the optical signal from at least one of the pivot mirror structures; and

where the control logic component includes logic instructions executable for actuating one or more of the at least one mirror structures on a first unit of the multiple units such that the optical signal is routed to a particular output on a second unit of the multiple units based upon instructions received by the control logic component.

10. The system of claim 7 where the system includes a number of lenses for receiving optical signal information directed at the system in free space, each of the number of lenses positioned to direct the optical signal information to one of the number of optical input paths.

11. The system of claim 7 where the control logic component includes logic instructions executable for analyzing an affect of an interaction of a mirror with an environmental condition.

12. The system of claim 7 where the control logic component includes logic instructions executable for actuating one or more of the at least one mirror structures to direct a portion of the optical signal away from all of the optical output paths.

13. The system of claim 7 where the control logic component includes logic instructions executable for adjusting a mirror structure alignment to a beyond optimal position for optical communication and instructions to adjust the mirror structure alignment back to the optimal position from the beyond optimal position.

14. The system of claim 7 where the control logic component includes logic instructions executable for adjusting mirror structure alignment by analyzing a signal strength via utilizing a number of signal strength measurements taken over a first period of time and for a signal utilizing a particular input path of the number of optical input paths, one or more particular mirror structures of the at least one mirror structures, and a particular output path of the number of optical output paths and where the control logic component includes logic instructions executable for actuating the one or more particular mirror structures adjust an amount of rotation for at least one of the one or more particular mirror structures based upon the analysis.

15. The system of claim 14 where the control logic component includes logic instructions executable for comparing the number of signal strength measurements taken over the first period of time and a second period of time and where the control logic component includes logic instructions executable for determining whether the adjustment based upon the analysis of the signal strength measurements over the first period of time increased or decreased the signal strength and where the control logic component includes logic instructions executable for actuating the one or more particular mirror structures adjust an amount of rotation for at least one of the one or more particular mirror structures based upon the determination.