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BAW gyroscope with bottom electrode

  • US 8,616,056 B2
  • Filed: 01/03/2011
  • Issued: 12/31/2013
  • Est. Priority Date: 11/05/2010
  • Status: Active Grant
First Claim
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1. A bulk acoustic wave gyroscope comprising:

  • a primary member in a member plane; and

    an electrode layer in an electrode plane spaced from the member plane,the electrode layer having a first portion and a second portion, the first portion being electrically isolated from the second portion, the first portion being mechanically coupled with the second portion, the second portion being separate from the primary member and stabilizing the electrode layer,the first portion of the electrode layer facing the primary member,the second portion of the electrode layer being directly coupled with a structure in the member plane.

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