Pressure sensor

• US 8,616,065 B2
• Filed: 08/02/2011
• Issued: 12/31/2013
• Est. Priority Date: 11/24/2010
• Status: Active Grant

• Current Assignee: Honeywell International Inc.
• Original Assignee: Honeywell International Inc.
• Inventors: Stewart, Carl, Bradley, Alistair, Ricks, Lamar
• Primary Examiner(s): ALLEN, ANDRE J
• Application Number:
  US13/196,743
• Publication Number:
  US 20120125114A1
• Time in Patent Office: 882 Days
• Field of Search: 73700-756
• US Class Current: 73/721
• CPC Class Codes: G01L 9/0054 integral with a semiconducting diaphragm
• CPC Class Codes: G01L 9/065 with temperature compensating means non electric temperature compensating means G01L19/04

Abstract

The present disclosure relates to sensors including pressure sensors. In some cases, the pressure sensor may include a membrane or diaphragm, multiple sense elements connected to one another in a bridge configuration and positioned on the membrane, and an amplifier coupled to an output of the bridge configuration and having an output, where the diaphragm, sense elements and amplifier may be formed on a singled substrate or formed integrally therewith, or both. In one example, the pressure sensor may sense a particular range of pressures applied to the sensor, and/or may include an amplifier that has a selectable gain for amplifying an output of the bridge.

Claims

1. A pressure sensor, comprising:

a membrane having a sensitivity of less than 4.0 mV/V/1″

H₂O;

two or more sense elements on the membrane connected in a bridge configuration to form a Wheatstone bridge, wherein the Wheatstone bridge has an output; and

an amplifier having an input coupled to the output of the Wheatstone bridge, the amplifier also having an output wherein the output of the amplifier has a span (mV/V/1″

H₂O) that is greater than two times the sensitivity.

2. The pressure sensor of claim 1, wherein the span of the amplifier is greater than 2.0 mV/V/1″

H₂O.

3. The pressure sensor of claim 1, wherein the span of the amplifier is greater than 4.0 mV/V/1″

H₂O.

4. The pressure sensor according to claim 1, wherein the output of the amplifier has a minimum output value and a maximum output value, and wherein the pressure sensor has an input pressure range that causes the output of the amplifier to go between the minimum output value and the maximum output value, and wherein the output of the amplifier has a Terminal Based Linearity (TBL) of less than 1 percent from the minimum output value to the maximum output value.

5. The pressure sensor of claim 4, wherein the output of the amplifier has a Terminal Based Linearity (TBL) of less than 0.1 percent from the minimum output value and the maximum output value.

6. The pressure sensor of claim 4, wherein the output of the amplifier has a Terminal Based Linearity (TBL) of less than 0.05 percent from the minimum output value and the maximum output value.

7. The pressure sensor according to claim 1, wherein when a greater input pressure is applied to a front side of the membrane than to a back side of the membrane, the output of the amplifier produces a positive output signal, and when a greater input pressure is applied to the back side of the membrane than to the front side of the membrane, the output of the amplifier produces a negative output signal, wherein a maximum deviation between the positive output signal and the negative output signal for a given absolute input pressure is less than 0.5%.

8. The pressure sensor according to claim 1, wherein the membrane has a maximum deflection relative to a rest position of less than 1 micron at 1″

H₂O.

9. The pressure sensor according to claim 1, wherein the membrane has a maximum deflection relative to a rest position of less than 0.1 micron at 1″

H₂O.

10. The pressure sensor of claim 1, wherein the sensitivity of the membrane is less than 1.0 mV/V/1″

H₂O.

11. The pressure sensor of claim 1, wherein the amplifier has a span that is greater than 4.0 mV/V/1″

H₂O.

12. The pressure sensor of claim 9, wherein the output of the amplifier has a span that is greater than 10.0 mV/V/1″

H₂O.

13. A pressure sensor, comprising:

a membrane;

two or more sense elements on the membrane connected in a bridge configuration to form a Wheatstone bridge, wherein the Wheatstone bridge has an output;

an amplifier having an input coupled to the output of the Wheatstone bridge;

wherein an output of the amplifier has a minimum output value and a maximum output value; and

the pressure sensor has an input pressure range that causes the output of the amplifier to go between the minimum output value and the maximum output value, wherein the output of the amplifier has a Terminal Based Linearity (TBL) of less than 1 percent from the minimum output value to the maximum output value.

14. The pressure sensor of claim 13, wherein the membrane has a sensitivity of less than 4.0 mV/V/1″

H₂O.

15. The pressure sensor of claim 14, wherein the amplifier has a span that is greater than 2.0 mV/V/1″

H₂O.

16. A pressure sensor, comprising:

a membrane having a sensitivity;

two or more sense elements on the membrane connected in a bridge configuration to form a Wheatstone bridge, wherein the Wheatstone bridge has an output;

an amplifier having an input, an output, and a gain that is greater than 2, the input of the amplifier is coupled to the output of the Wheatstone bridge;

the output of the amplifier has a minimum output value and a maximum output value, and wherein the pressure sensor has an input pressure range that causes the output of the amplifier to go between the minimum output value and the maximum output value;

the sensitivity of the membrane is such that the output of the amplifier remains between the maximum output voltage and the minimum output voltage over a given range of input pressures;

the output voltage of the amplifier having a span that is greater than 2.0 mV/V/1″

H₂O.

17. The pressure sensor of claim 16, wherein the sensitivity of the membrane is less than 4.0 mV/V/1″

H₂O.

18. A pressure sensor comprising:

a diaphragm having a portion that flexes in response to a media impinging thereon, wherein the extent to which the portion of the diaphragm flexes varies with an input pressure at which the media impinges, the portion of the diaphragm withstanding media impinging thereon across a range of input pressures between a negative burst pressure and a positive burst pressure;

one or more sensor elements fixed relative to the diaphragm, the one or more sensor elements have a property that varies with the extent to which the diaphragm flexes; and

an amplifier having an input and an output, and being disposed on a substrate to which the diaphragm is attached, wherein the input of the amplifier senses variations in the property of the one or more sensor elements, and the output of the amplifier has a full range that corresponds to no more than 1% of the range of input pressures.

19. A pressure sensor comprising:

a sense die with an integrated differential amplifier having a supply voltage, the sense die having a pressure sensitive membrane with a sensitivity of less than 4.0 mV/V/1″

H₂O;

a first bridge for sensing a flex of the pressure sensitive membrane in response to an input pressure;

a second bridge coupled in parallel to the first bridge for trimming the first bridge; and

wherein the integrated amplifier has an output with a common-mode signal of approximately one-half a magnitude of the supply voltage and a maximum differential output within the range of 6 mV to 180 mV.

20. A micro-machined pressure sensor, comprising:

a silicon substrate;

a sensing diaphragm including sensing elements for converting an applied input pressure to a differential voltage signal with a common mode voltage of about half a supply voltage, the sensing diaphragm has a geometry that provides a pressure sensitivity of less than 4.0 mV/V/1″

H₂O;

a differential in and differential out amplifier with a gain of at least 6, and a common voltage of about half the supply voltage;

an electrical connection supplying the differential voltage signal from the sensing diaphragm to the differential input of the differential in and differential out amplifier; and

electrical connections for a differential output of the differential in and differential out amplifier; and

wherein the differential output of the differential in and differential out amplifier has a span (mV/V/1″

H₂O) that is greater than two times the sensitivity, and a Terminal Based Linearity (TBL) of less than 1%.

21. A pressure sensor, comprising:

a substrate;

a membrane formed integral with the substrate;

two or more sense elements coupled to the membrane, the two or more sense elements connected in a bridge configuration to form a Wheatstone bridge, wherein the Wheatstone bridge has an output; and

an amplifier block formed integral with the substrate, the amplifier block having an output and further having an input coupled to the output of the Wheatstone bridge, the amplifier block having a selectable gain, and an output having a Terminal Based Linearity (TBL) of less than 1% from a minimum output value to a maximum output value of the amplifier block.

22. The pressure sensor of claim 21, wherein the gain is selectable during manufacture of the pressure sensor.

23. The pressure sensor of claim 21, wherein the gain is selectable by a user of the pressure sensor.

24. The pressure sensor of claim 21 further comprising one or more trim elements, wherein the one or more trim elements, when trimmed, are used to permanently offset an output voltage produced at the output of the Wheatstone bridge.

25. The pressure sensor of claim 24 wherein the one or more trim elements are trimmed in a first way for a first selected gain of the amplifier and are trimmed in a second different way for a second selected gain of the amplifier.

26. The pressure sensor of claim 24, wherein the output of the Wheatstone bridge is a differential output signal that has a common mode voltage, wherein the one or more trim elements are used to permanently modify the common mode voltage at the output of the Wheatstone bridge.