Rotationally deployed actuator devices

• US 8,616,791 B2
• Filed: 09/28/2011
• Issued: 12/31/2013
• Est. Priority Date: 09/28/2011
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Calvet, Robert J., Gutierrez, Roman C.
• Primary Examiner(s): Fuller, Rodney
• Application Number:
  US13/247,869
• Publication Number:
  US 20130077947A1
• Time in Patent Office: 825 Days
• Field of Search: 396/529
• US Class Current: 396/529
• CPC Class Codes: B81B 2201/033 Comb drives
• CPC Class Codes: B81B 2203/053 Translation according to an axis perpendicular to the substrate
• CPC Class Codes: B81B 3/0037 For increasing stroke, i.e. achieve large displacement of actuated parts
• CPC Class Codes: G03B 2205/0084 using other types of actuators
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: Y10T 156/10 Methods of surface bonding and/or assembly therefor
• CPC Class Codes: Y10T 29/49826 Assembling or joining
• CPC Class Codes: Y10T 29/4998 Combined manufacture including applying or shaping of fluent material
• CPC Class Codes: Y10T 74/18568 Reciprocating or oscillating to or from alternating rotary

Abstract

A method for making an actuator device includes forming a substantially planar structure, including an outer frame with a latch foot, a fixed frame coupled to the outer frame, a latch mass coupled to the fixed frame, a latch block coupled to the latch mass by a latch block flexure, a moveable frame coupled to the outer frame, and an actuator incorporating a plurality of interdigitated teeth alternately attached to the fixed and moving frames. For operation, the latch mass is rotated downward until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the latch block flexure.

Claims

1. A method for making an actuator device, the method comprising:

forming a substantially planar structure, comprising;

an outer frame having a latch foot extending therefrom;

a fixed frame coupled to the outer frame for rotational movement relative thereto;

a latch mass coupled to the fixed frame for rotational movement relative thereto, the latch mass having a latch block coupled thereto by at least one latch block flexure;

a moveable frame coupled to the outer frame for rotational movement relative thereto; and

,

an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame; and

,

rotating the latch mass downward from a position coplanar with the outer frame such that a side surface of the latch block makes contact with and slides down against an opposing side surface of the latch foot and until an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the at least one latch block flexure and the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth.

2. The method of claim 1, wherein the forming comprises photolithography.

3. The method of claim 2 wherein the photolithography comprises one or more of etching and/or micromachining.

4. The method of claim 3, wherein the etching comprises deep reactive ion etching (DRIE).

5. The method of claim 3, wherein the micromachining comprises one or more of ion milling, laser ablation, chemical mechanical polishing (CMP), micro-electrical discharge forming and/or micro-forging.

6. The method of claim 1, wherein:

the actuator device further comprises a deployment foot attached to the fixed frame and comprising a side wall disposed parallel to and in spaced opposition to a side wall of the outer frame;

the rotating comprises rotating the fixed frame until a lower end of the opposing side wall of the deployment foot is disposed in abutment with the opposing side wall of the outer frame; and

,

the fixing comprises one or more of;

bonding the lower end of the opposing side wall of the deployment foot to the opposing side wall of the outer frame with an adhesive;

welding the lower end of the opposing side wall of the deployment foot to the opposing side wall of the outer frame with a weldment;

bonding the opposing side wall of the deployment foot to the opposing side wall of the outer frame with a fillet of an adhesive; and

/or,

bonding a wedge between the opposing side wall of the deployment foot and the opposing side wall of the outer frame with an adhesive.

7. The method of claim 6, wherein the welding comprises one or more of laser welding and/or electron beam welding.

8. The method of claim 1, wherein the latch block is coupled to the latch mass by a pair of latch flexures, each having a stiffness in a direction perpendicular to a plane of the device greater than a stiffness in a plane parallel thereto.

9. An actuator device made in accordance with the method of claim 1.

10. An actuator device, comprising:

an outer frame having a latch foot extending therefrom;

a fixed frame coupled to the outer frame for rotational movement relative thereto;

a latch mass coupled to the fixed frame for rotational movement relative thereto, the latch mass having a latch block coupled thereto by at least one latch block flexure;

a moveable frame coupled to the outer frame for rotational movement relative thereto; and

,

an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, wherein

the latch mass is rotated downward relative to the outer frame,

an upper surface of the latch block is disposed below and held in latching contact with a lower surface of the latch foot by the at least one latch block flexure, and

the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth.

11. The actuator device of claim 10, further comprising a stage rotatably coupled to the moving frame by at least one flexure.

12. A camera incorporating the actuator of claim 10.

13. An electronic device incorporating the camera of claim 12.

14. The electronic device of claim 13, wherein the device comprises a cell phone, a smart phone, a personal digital assistant, a surveillance system or a computer.

15. A method for making an actuator device, the method comprising:

forming a substantially planar structure, comprising;

an outer frame having a latch mass rotatably coupled thereto, the latch mass having a latch block coupled thereto by at least one latch block flexure;

a fixed frame coupled to the outer frame;

a moving frame rotatably coupled to the outer frame and the latch mass for rotational movement relative thereto; and

,

an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame; and

,

rotating the latch mass upward from a position coplanar with the outer frame such that a side surface of the latch block makes contact with and slides up against an opposing side surface of the latch foot and until an lower surface of the latch block is disposed above and held in contact with an upper surface of the latch foot by the at least one latch block flexure and the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth.

16. The method of claim 15, wherein the forming comprises photolithography.

17. The method of claim 16 wherein the photolithography comprises one or more of etching and/or micromachining.

18. The method of claim 17, wherein the etching comprises deep reactive ion etching (DRIE).

19. The method of claim 17, wherein the micromachining comprises one or more of ion milling, laser ablation, chemical mechanical polishing (CMP), micro-electrical discharge forming and/or micro-forging.

20. An actuator device made in accordance with the method of claim 15.

21. The actuator device of claim 20, further comprising a stage rotatably coupled to the moving frame by at least one flexure.

22. An actuator device, comprising:

an outer frame having a latch mass rotatably coupled thereto, the latch mass having a latch block coupled thereto by at least one latch block flexure;

a fixed frame coupled to the outer frame;

a moving frame rotatably coupled to the outer frame and the latch mass for rotational movement relative thereto; and

,

an actuator incorporating a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moveable frame, wherein

the latch mass is rotated upward relative to the outer frame,

a lower surface of the latch block is disposed above and held in contact with an upper surface of the latch foot by the at least one latch block flexure, and

the fixed portion of the actuator teeth is disposed at a selected angle relative to the moving portion of the actuator teeth.

23. The actuator device of claim 22, further comprising a stage rotatably coupled to the moving frame by at least one flexure.