Depositing apparatus and method for manufacturing organic light emitting diode display using the same

• US 8,616,930 B1
• Filed: 11/14/2012
• Issued: 12/31/2013
• Est. Priority Date: 06/15/2012
• Status: Active Grant

• Current Assignee: Samsung Electronics Co. Ltd. (Samsung Group)
• Original Assignee: Samsung Display Company Limited (Samsung Group)
• Inventors: Chun, Byung-Hoon, Im, Ja-Hyun
• Primary Examiner(s): Bowman, Mary Ellen
• Application Number:
  US13/677,031
• Publication Number:
  US 20130337720A1
• Time in Patent Office: 412 Days
• Field of Search: 445/24, 438/34, 427/66
• US Class Current: 445/24
• CPC Class Codes: B05C 5/00 Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work B05C7/00 takes precedence; essentially involving spraying or electrostatic projection B05B
• CPC Class Codes: C23C 14/044 using masks to redistribute rather than totally prevent coating, e.g. producing thickness gradient
• CPC Class Codes: C23C 14/12 Organic material
• CPC Class Codes: C23C 14/24 Vacuum evaporation
• CPC Class Codes: H05B 33/10 Apparatus or processes specially adapted to the manufacture of electroluminescent light sources

Abstract

A deposition apparatus includes a deposition source emitting a deposition material and an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material. The angle control member includes a housing having an internal space opened in an emission direction of the deposition material and a sliding member having a first end which is inserted into the internal space and a second end disposed on an emission path of the deposition material. The sliding member is movable forward and backward in the emission direction of the deposition material along the internal space. A method of manufacturing an organic light emitting diode (OLED) display which uses the deposition apparatus is also disclosed.

Claims

1. A deposition apparatus, comprising:

a deposition source emitting a deposition material; and

an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material;

wherein the angle control member comprises;

a housing having an internal space opened in an emission direction of the deposition material; and

a sliding member having a first end which is inserted into the internal space and a second end which is disposed on an emission path of the deposition material and which is movable forward and backward in an emission direction of the deposition material along the internal space.

2. The deposition apparatus of claim 1, wherein the deposition source is a linear deposition source having a spray nozzle which sprays the deposition material and which is linearly arranged in a first direction, and wherein the angle control member is formed along the first direction.

3. The deposition apparatus of claim 2, further comprising an additional deposition source disposed side by side in the first direction with the deposition source, wherein the angle control member is disposed between the deposition source and the additional deposition source.

4. The deposition apparatus of claim 3, further comprising a driver connected to the sliding member so as to move the sliding member forward and backward in the emission direction of the deposition material.

5. The deposition apparatus of claim 4, wherein the driver interworks with sliding members of a pair of angle control members disposed at an outermost edge of the deposition source so as to make the sliding members move forward and backward by a same distance.

6. The deposition apparatus of claim 4, wherein the driver interworks with the sliding member of the angle control member disposed between the deposition source and the additional deposition source so as to make the sliding member move forward and backward by a same distance.

7. The deposition apparatus of claim 3, wherein, in the sliding member of the angle control member disposed between the deposition source and the additional deposition source, the second end which is disposed in the emission path of the deposition material is bent to a direction that crosses a movement direction of the sliding member.

8. The deposition apparatus of claim 1, further comprising a driver connected to the sliding member so as to move the sliding member forward and backward in the emission direction of the deposition material.

9. The deposition apparatus of claim 8, wherein the driver interworks with sliding members of a pair of angle control members disposed at an outermost edge of the deposition source so as to make the sliding members move forward and backward by a same distance.

10. A method for manufacturing an organic light emitting diode (OLED) display, comprising the steps of:

preparing a deposition source that emits a deposition material;

preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material;

providing the housing with an angle control member including a sliding member having a first end which is inserted into the inner space and a second end which is disposed on an emission path of the deposition material, the sliding member being movable forward and backward in an emission direction of the deposition material along the inner space;

disposing a substrate opposite the deposition source and the angle control member;

controlling an emission direction angle of the deposition material by moving the sliding member forward and backward relative to the emission direction of the deposition material; and

forming a thin film on the substrate by depositing the deposition material onto the substrate.

11. The method for manufacturing the OLED display of claim 10, further comprising the step of providing an additional deposition source disposed side by side in a first direction with the deposition source;

wherein the angle control member is disposed between the deposition source and the additional deposition source; and

wherein the step of controlling the emission direction angle of the deposition material includes moving the sliding member included in the angle control member forward and backward by a same distance.

12. The method for manufacturing the OLED display of claim 10, further comprising the step of providing an additional deposition source disposed side by side in a length direction;

wherein the angle control member is provided between the deposition source and the additional deposition source; and

wherein the step of controlling the emission direction angle of the deposition material includes moving the sliding member of the angle control member disposed between the deposition source and the additional deposition source forward and backward by a same distance.

13. The method for manufacturing the OLED display of claim 10, wherein the deposition material is an organic material forming an organic emission layer, and the thin film is an organic emission layer.

14. The method for manufacturing the OLED display of claim 10, further comprising the step of providing a driver connected to the sliding member for moving the sliding member forward and backward relative to the emission direction of the deposition material so as to control the emission direction of the deposition material.