Depositing apparatus and method for manufacturing organic light emitting diode display using the same
First Claim
1. A deposition apparatus, comprising:
- a deposition source emitting a deposition material; and
an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material;
wherein the angle control member comprises;
a housing having an internal space opened in an emission direction of the deposition material; and
a sliding member having a first end which is inserted into the internal space and a second end which is disposed on an emission path of the deposition material and which is movable forward and backward in an emission direction of the deposition material along the internal space.
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Accused Products
Abstract
A deposition apparatus includes a deposition source emitting a deposition material and an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material. The angle control member includes a housing having an internal space opened in an emission direction of the deposition material and a sliding member having a first end which is inserted into the internal space and a second end disposed on an emission path of the deposition material. The sliding member is movable forward and backward in the emission direction of the deposition material along the internal space. A method of manufacturing an organic light emitting diode (OLED) display which uses the deposition apparatus is also disclosed.
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Citations
14 Claims
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1. A deposition apparatus, comprising:
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a deposition source emitting a deposition material; and an angle control member disposed on both sides of the deposition source and controlling an emission direction angle of the deposition material; wherein the angle control member comprises; a housing having an internal space opened in an emission direction of the deposition material; and a sliding member having a first end which is inserted into the internal space and a second end which is disposed on an emission path of the deposition material and which is movable forward and backward in an emission direction of the deposition material along the internal space. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method for manufacturing an organic light emitting diode (OLED) display, comprising the steps of:
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preparing a deposition source that emits a deposition material; preparing a housing disposed on both sides of the deposition source and having an inner space opened in an emission direction of the deposition material; providing the housing with an angle control member including a sliding member having a first end which is inserted into the inner space and a second end which is disposed on an emission path of the deposition material, the sliding member being movable forward and backward in an emission direction of the deposition material along the inner space; disposing a substrate opposite the deposition source and the angle control member; controlling an emission direction angle of the deposition material by moving the sliding member forward and backward relative to the emission direction of the deposition material; and forming a thin film on the substrate by depositing the deposition material onto the substrate. - View Dependent Claims (11, 12, 13, 14)
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Specification