Method for manufacturing a magnetic read sensor with narrow track width using amorphous carbon as a hard mask and localized CMP

• US 8,617,408 B2
• Filed: 10/18/2011
• Issued: 12/31/2013
• Est. Priority Date: 10/18/2011
• Status: Active Grant

• Current Assignee: Western Digital Technologies Incorporated (Western Digital Corporation)
• Original Assignee: HGST Netherlands B.V. (Western Digital Corporation)
• Inventors: Balamane, Hamid, Braganca, Patrick M., Katine, Jordan A., Li, Jui-Lung, Li, Yang, Patel, Kanaiyalal C., Robertson, Neil L., Yuan, Samuel W.
• Primary Examiner(s): Vinh, Lan
• Assistant Examiner(s): Lu, Jiong-Ping
• Application Number:
  US13/275,728
• Publication Number:
  US 20130092654A1
• Time in Patent Office: 805 Days
• Field of Search: None
• US Class Current: 216/22
• CPC Class Codes: G01R 33/093 using multilayer structures, e.g. giant magnetoresistance sensors thin magnetic films H01F10/00
• CPC Class Codes: G11B 5/3163 Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
• CPC Class Codes: G11B 5/3169 Working or finishing the interfacing surface of heads, e.g. lapping of heads
• CPC Class Codes: G11B 5/398 Specially shaped layers
• CPC Class Codes: Y10T 29/49021 Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
• CPC Class Codes: Y10T 29/49044 Plural magnetic deposition layers

Abstract

A method for manufacturing a magnetic read sensor at very narrow track widths. The method uses an amorphous carbon mask layer to pattern the sensor by ion milling, rather than a mask constructed of a material such as photoresist or DURIMIDE® which can bend over during ion milling at very narrow track widths. By using the amorphous carbon layer as the masking layer, the trackwidth can be very small, while avoiding this bending over of the mask that has been experienced with prior art methods. In addition, the track-width can be further reduced by using a reactive ion etching to further reduce the width of the amorphous carbon mask prior to patterning the sensor. The method also allows extraneous portions of the side insulation layer and hard bias layer to be removed above the sensor by a light CMP process.

Claims

1. A method for manufacturing a magnetic read sensor comprising:

forming a magnetic shield;

depositing a series of sensor layers over the magnetic shield;

forming an amorphous carbon mask over the series of sensor layers, the amorphous carbon mask having first and second openings at first and second sides of a central trackwidth defining portion, the first and second openings and central trackwidth defining portion defining a sensor area;

performing a first ion milling to remove portions of the series of sensor layers that are exposed through the openings in the amorphous carbon layer;

depositing a non-magnetic, electrically insulating material followed by a magnetic material;

forming a photoresist mask over the sensor area;

performing a second ion milling to remove portions of the non-magnetic, electrically insulating material and the magnetic material that are not protected by the photoresist mask;

removing the photoresist mask;

performing a third ion milling to remove the non-magnetic, electrically insulating material and the magnetic material from side portions of the amorphous carbon layer; and

performing a reactive ion etching to remove the remaining amorphous carbon layer.

2. The method as in claim 1 further comprising, after performing the reactive ion etching, performing a water cleaning and a chemical mechanical polishing.

3. The method as in claim 1 wherein the reactive ion etching is performed in an oxygen chemistry.

4. The method as in claim 1 wherein the third ion milling is performed at an angle relative to normal.