Methods and apparatus for atomic layer etching

• US 8,617,411 B2
• Filed: 07/20/2011
• Issued: 12/31/2013
• Est. Priority Date: 07/20/2011
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Singh, Harmeet
• Primary Examiner(s): Alanko, Anita
• Application Number:
  US13/187,437
• Publication Number:
  US 20130023125A1
• Time in Patent Office: 895 Days
• Field of Search: None
• US Class Current: 216/62
• CPC Class Codes: H01J 2237/334 Etching
• CPC Class Codes: H01J 37/32082 Radio frequency generated discharge H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence
• CPC Class Codes: H01J 37/3244 Gas supply means
• CPC Class Codes: H01J 37/32449 Gas control, e.g. control of the gas flow
• CPC Class Codes: H01J 37/32458 Vessel
• CPC Class Codes: H01J 37/32633 Baffles
• CPC Class Codes: H01J 37/32715 Workpiece holder
• CPC Class Codes: H01J 37/32899 Multiple chambers, e.g. cluster tools
• CPC Class Codes: H01L 21/3065 Plasma etching; Reactive-ion etching
• CPC Class Codes: H01L 21/67069 for drying etching
• CPC Class Codes: H01L 21/76814 post-treatment or after-treatment, e.g. cleaning or removal of oxides on underlying conductors

Abstract

Substrate processing systems and methods for etching an atomic layer are disclosed. The methods and systems are configured to introducing a first gas into the chamber, the gas being an etchant gas suitable for etching the layer and allowing the first gas to be present in the chamber for a period of time sufficient to cause adsorption of at least some of the first gas into the layer. The first gas is substantially replaced in the chamber with an inert gas, and metastables are then generated from the inert gas to etch the layer with the metastables while substantially preventing the plasma charged species from etching the layer.

Claims

1. A method for etching a layer on a substrate in a semiconductor processing chamber, said chamber having a plasma generating region and a substrate processing region, said plasma generating region being separated from said substrate processing region by a separating plate structure, comprising:

introducing a first gas into said substrate processing region of said chamber, said first gas being an etchant gas suitable for etching said layer;

introducing an inert gas into said plasma generating region such that a pressure of said inert gas in said plasma generating region is greater than a pressure of said etchant gas in said substrate processing region;

allowing said first gas to be present in said substrate processing region of said chamber for a period of time sufficient to cause adsorption of at least some of said first gas into said layer;

replacing at least 80% of said first gas in said chamber with said inert gas after said period of time expires;

generating metastables from said inert gas; and

etching said layer with said metastables.

2. The method of claim 1 wherein said metastables are generated by forming a plasma from said inert gas in said plasma generating region.

3. The method of claim 2 wherein said metastables traverse said separating plate structure while migrating from said plasma to said layer.

4. The method of claim 3 wherein said separating plate structure has a plurality of holes configured for preventing migration of at least 60% of plasma charged species generated in said plasma generating from reaching said layer.

5. The method of claim 3 wherein said separating plate structure comprises of at least two plates that are electrically insulated from one another, said two plates having different voltage potentials during said etching.

6. The method of claim 3 wherein said metastables also traverse a collimator plate while migrating from said plasma to said layer, wherein said collimator plate is disposed between said substrate and said separating plate structure.

7. The method of claim 3 further comprising moving at least one of said separating plate and said substrate relative to one another during said etching with said metastables.

8. The method of claim 1 wherein said etchant gas contains at least a halogen and said layer contains Si.

10. The method of claim 1 wherein said generating said metastables is performed after at least about 90% of said first gas in said chamber is replaced with said inert gas.

9. The method of claim wherein said period of time is between about 0.05 second to about 180 seconds.

11. A method for etching a layer on a substrate in a semiconductor processing chamber, said chamber having a plasma generating region and a substrate processing region, said plasma generating region being separated from said substrate processing region by a separating plate structure, comprising:

introducing a first gas into said substrate processing region of said chamber, said first gas being an etchant gas suitable for etching said layer;

introducing an inert gas into said plasma generating region;

allowing said first gas to be present in said substrate processing region of said chamber for a period of time sufficient to cause adsorption of at least some of said first gas into said layer while maintaining a pressure of said inert gas in said plasma generating region is greater than a pressure of said etchant gas in said substrate processing region;

replacing at least 80% of said first gas in said substrate processing region of said chamber with said inert gas after said period of time expires;

generating plasma in said plasma generating region of said chamber to generate metastables from said inert gas; and

etching said layer with said metastables while maintaining a pressure in said substrate processing region below 10 mTorr.

12. The method of claim 11 wherein said metastables traverse said separating plate structure while migrating from said plasma to said layer.

13. The method of claim 11 wherein said separating plate structure has a plurality of holes configured for preventing migration of at least 60% of plasma charged species generated in said plasma generating from reaching said layer.

14. The method of claim 11 wherein said separating plate structure comprises of at least two plates that are electrically insulated front one another, said two plates having different voltage potentials during said etching.

15. The method of claim 11 wherein said metastables also traverse a collimator plate while migrating from said plasma to said layer, wherein said collimator plate is disposed between said substrate and said separating plate structure.

16. The method of claim 11 further comprising moving at least one of said separating plate and said substrate relative to one another during said etching with said metastables.

17. The method of claim 11 wherein said etchant gas contains at least a halogen and said layer contains Si.

18. The method of claim 11 wherein said period of time is between about 0.05 second to about 180 seconds.

19. The method of claim 11 wherein said generating said metastables is performed after at least about 90% of said first gas in said chamber is replaced with said inert gas.