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LED with substrate modifications for enhanced light extraction and method of making same

  • US 8,617,909 B2
  • Filed: 04/01/2009
  • Issued: 12/31/2013
  • Est. Priority Date: 07/02/2004
  • Status: Active Grant
First Claim
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1. A method of fabricating a light emitting diode (LED) including a growth substrate having a light emitting surface, said method comprising:

  • growing an epitaxial light emission region on a surface of the growth substrate opposite the light emitting surface, wherein said light emission region includes an active layer configured to generate light;

    applying a reactive ion etch (RIE) process to at least a portion of the light emitting surface of said growth substrate for a time duration sufficient to change the morphology of the light emitting surface of said growth substrate; and

    forming a plurality of etched features associated with said light emitting surface prior to applying the RIE process.

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