Micromagnetic device and method of forming the same
First Claim
1. A micromagnetic device formed on a substrate, comprising:
- a first insulating layer formed above said substrate;
a first seed layer formed above said first insulating layer;
a first magnetic core layer selectively formed above said first seed layer;
a second insulating layer formed above said first magnetic core layer;
a second seed layer formed above said second insulating layer; and
a conductive winding layer selectively formed above said second seed layer.
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Accused Products
Abstract
A micromagnetic device includes a first insulating layer formed above a substrate, a first seed layer formed above the first insulating layer, a first conductive winding layer selectively formed above the first seed layer, and a second insulating layer formed above the first conductive winding layer. The micromagnetic device also includes a first magnetic core layer formed above the second insulating layer, a third insulating layer formed above the first magnetic core layer, and a second magnetic core layer formed above the third insulating layer. The micromagnetic device still further includes a fourth insulating layer formed above the second magnetic core layer, a second seed layer formed above the fourth insulating layer, and a second conductive winding layer formed above the second seed layer and in vias to the first conductive winding layer. The first and second conductive winding layers form a winding for the micromagnetic device.
236 Citations
20 Claims
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1. A micromagnetic device formed on a substrate, comprising:
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a first insulating layer formed above said substrate; a first seed layer formed above said first insulating layer; a first magnetic core layer selectively formed above said first seed layer; a second insulating layer formed above said first magnetic core layer; a second seed layer formed above said second insulating layer; and a conductive winding layer selectively formed above said second seed layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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10. The micromagnetic device as recited in claim wherein said conductive winding layer is formed from copper.
Specification