Utilities transfer system in a lithography system

• US 8,619,234 B2
• Filed: 06/23/2006
• Issued: 12/31/2013
• Est. Priority Date: 12/12/2003
• Status: Expired due to Fees

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Phillips, Alton Hugh
• Primary Examiner(s): Ton, Toan
• Assistant Examiner(s): RIDDLE, CHRISTINA A
• Application Number:
  US11/473,967
• Publication Number:
  US 20060250595A1
• Time in Patent Office: 2,748 Days
• Field of Search: 355/53, 355 72- 75, 310/10, 310/12, 310/370, 310/216.023, 310/15, 310/27, 310/12.05, 310/12.06, 310/12.01, 310/20, 310/23, 310/24, 310/49.06, 310/49.02, 310/49.19, 310/17, 310/12.12, 336/115, 336117-119, 336/120, 336/129, 336130-136, 318/830
• US Class Current: 355/72
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70808 Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: G03F 7/70991 Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum

Abstract

Techniques for transferring utilities to and from a reticle or wafer stage in a lithography system while minimizing physical disturbances that affect the stage are described. These techniques involve transferring utilities to and from the stage without making physical contact with the stage. Alternatively, utilities are transferred by making physical contact with the stage while the stage is in a stationary position. In addition to transferring utilities to and from the stage, devices such as processing devices, buffers (storage mediums), electrical components, and mechanical components can be placed within the stage to use and/or control the transferred utilities.

Claims

1. A lithography apparatus comprising:

a lens assembly that projects and/or focuses the light or beam from an illumination system;

a transformer that comprises;

a U-shaped inductive core, the U-shaped core comprising a primary leg disposed along a substantially linear primary axis and a secondary leg disposed along a substantially linear secondary axis,

an inductive primary coil, and

an inductive secondary coil; and

a stage device that supports the secondary coil, the stage device configured to move relative to the primary coil and parallel to the substantially linear secondary axis, wherein the secondary coil surrounds a portion of the outer surface of the secondary leg of the U-shaped inductive core inside a portion of the stage device;

the primary coil surrounding a portion of the outer surface of the primary leg of the inductive core outside of the stage device, wherein the inductive core and the secondary coil are configured to substantially maintain a separation distance from each other during relative movement between the stage and the inductive core;

wherein an electrical current of the primary coil outside of the stage device creates an electromagnetic field that causes an electrical current, via the inductive core, to flow within the secondary coil inside a portion of the stage device.

2. A lithography apparatus as recited in claim 1, wherein the stage device is supported through at least one of air levitation and electromagnetic levitation.

3. A lithography apparatus as recited in claim 1, wherein the stage device includes one of a wafer substrate and a reticle substrate that supports the secondary coil.

4. A lithography apparatus as recited in claim 1, wherein the stage device moves relative to the inductive core along a scanning axis that is substantially parallel to at least a portion of the inductive core.

5. A lithography apparatus as recited in claim 1, wherein the stage device houses two or more secondary coils and wherein each of the secondary coils surrounds at least a portion of the inductive core.

6. A lithography apparatus as recited in claim 1 further comprising:

at least one of a stage radio frequency transmitter, a receiver, a transceiver and a battery that is positioned within the stage device and provided with electrical current from the secondary coil.