Rotational comb drive Z-stage

• US 8,619,378 B2
• Filed: 11/15/2010
• Issued: 12/31/2013
• Est. Priority Date: 11/15/2010
• Status: Active Grant

• Current Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Original Assignee: DigitalOptics Corporation MEMS (Adeia Inc.)
• Inventors: Gutierrez, Roman C.
• Primary Examiner(s): Martinez, Joseph P
• Application Number:
  US12/946,515
• Publication Number:
  US 20120120508A1
• Time in Patent Office: 1,142 Days
• Field of Search: 359/221.2, 359/224.1, 359/800, 369/44.14, 369/44.15, 369/44.16
• US Class Current: 359/822
• CPC Class Codes: G02B 7/08 adapted to co-operate with a remote control mechanism
• CPC Class Codes: G03B 2205/0061 using piezoelectric actuators
• CPC Class Codes: G03B 3/10 Power-operated focusing

Abstract

A device may have an outer frame, a platform, and a plurality of actuators configured to move the platform with respect to the outer frame. Each of the actuators may have a movable frame and a fixed frame. A motion control mechanism may be configured to permit movement of the platform in a desired direction with respect to the outer frame and inhibit rotation of the platform with respect to the outer frame.

Claims

1. A device, comprising:

an outer frame defining a plane;

a platform;

a plurality of actuators adapted to move the platform in a first direction out of a plane defined by the outer frame, each of the actuators comprising a movable frame and a fixed frame; and

a motion control mechanism coupling the actuators to the outer frame and the platform and adapted to cause movement of the platform in the first direction in response to rotational movement of the moving frames out of the plane defined by the outer frame,

wherein the motion control mechanism comprises a flexure interconnecting the movable frame of one of the actuators and the platform, and wherein the flexure is adapted to bend in one direction to accommodate a varying angle between the movable frame and the platform and to bend in a different direction to accommodate a varying distance between the movable frame and the platform.

2. The device as recited in claim 1, wherein the flexure is adapted to bend in the one direction and in the different direction to inhibit rotation of the platform with respect to the outer frame.

3. The device as recited in claim 1, wherein the motion control mechanism comprises a flexure interconnecting the movable frame of the one of the actuators and the outer frame.

4. The device as recited in claim 1, wherein the motion control mechanism comprises a hinge flexure and a torsional flexure interconnecting the movable frame of the one of the actuators and the outer frame.

5. The device as recited in claim 1, wherein the motion control mechanism comprises a plurality of hinge flexures and a plurality of torsional flexures interconnecting the movable frame of the one of the actuators and the outer frame.

6. The device as recited in claim 5, wherein the hinge flexures and the torsional flexures substantially limit movement of the movable frame of the one of the actuators to a single degree of freedom, and wherein the single degree of freedom is rotation.

7. The device as recited in claim 6, wherein at least one of the hinge flexures is X-shaped.

8. The device as recited in claim 1, wherein the plurality of actuators comprise three actuators.

9. The device as recited in claim 8, wherein the plurality of actuators are disposed in a substantially radially symmetric configuration with respect to one another.

10. The device as recited in claim 1, wherein the outer frame, the platform, and the plurality of actuators are formed by a MEMS process.

11. The device as recited in claim 1, wherein the outer frame, the platform, and the plurality of actuators are formed of monolithic silicon.

12. The device as recited in claim 1, wherein the outer frame is substantially planar.

13. The device as recited in claim 1, wherein the platform is substantially planar.

14. The device as recited in claim 1, wherein the outer frame and the platform are disposed in substantially parallel planes.

15. The device as recited in claim 1, wherein the outer frame and the platform are substantially coplanar with respect to one another prior to actuation of the actuators.

16. The device as recited in claim 1, wherein the actuators are rotational actuators.

17. The device as recited in claim 1, wherein the actuators are rotational comb drives.

18. The device as recited in claim 1, wherein the platform comprises a ring adapted to expand to receive a lens.

19. The device as recited in claim 18, wherein:

the ring comprises radial variations to permit the ring to expand; and

the platform comprises a plurality of pads for supporting the lens.

20. The device as recited in claim 1, wherein the movement of the platform is a translational movement.

21. An electronic device comprising the device of claim 1.

22. A system, comprising:

an outer frame defining a plane;

a platform;

an optical element attached to the platform;

a plurality of actuators adapted to move the platform in a direction out of a plane of the outer frame, each of the actuators comprising a movable frame and a fixed frame;

a motion control mechanism coupling the actuators to the outer frame and the platform and adapted to cause substantially rectilinear permit movement of the platform in the direction in response to rotational movement of the moving frames out of the plane of the outer frame.

23. A method, comprising:

interconnecting an outer frame and a platform with a plurality of actuators adapted to move the platform with respect to the outer frame; and

interconnecting the outer frame and the platform with a motion control mechanism adapted to cause the platform to move in a direction out of a plane defined by the outer frame;

wherein the motion control mechanism comprises a flexure interconnecting a movable frame of one of the actuators and the platform and wherein the flexure is adapted to bend in one direction to accommodate a varying angle between the movable frame and the platform and to bend in a different direction to accommodate a varying distance between the movable frame and the platform.

24. A method, comprising:

moving a platform with respect to an outer frame using a plurality of rotational actuators; and

using a motion control mechanism to constrain movement of the platform to substantially rectilinear movement in a direction out of a plane defined by the outer frame; and

wherein the motion control mechanism comprises a flexure interconnecting a movable frame of an actuator and the platform and wherein the flexure is adapted to bend in one direction to accommodate a varying angle between the movable frame and the platform and to bend in a different direction to accommodate a varying distance between the movable frame and the platform.