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Sensor for detecting acceleration and angular velocity

  • US 8,621,928 B2
  • Filed: 02/21/2013
  • Issued: 01/07/2014
  • Est. Priority Date: 05/26/2009
  • Status: Expired due to Fees
First Claim
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1. A sensor for detecting acceleration and angular velocity, the sensor comprising:

  • a base;

    an acceleration detector including a pair of first fixed electrodes, a pair of first movable electrodes, and a pair of first supporting members configured to support the pair of first movable electrodes;

    an angular velocity detector including a pair of second fixed electrodes, a pair of second movable electrodes, and a pair of second supporting members configured to support the pair of second movable electrodes;

    a driver configured to cause the pair of first supporting members to vibrate in opposite phases in a first direction and configured to cause the pair of second supporting members to vibrate in opposite phases in the first direction by electrostatic force;

    a first spring having elasticity in the first direction;

    a second spring configured to couple the pair of first supporting members to the base, the second spring having elasticity in both the first direction and a second direction perpendicular to the first direction;

    a third spring configured to couple the pair of first supporting members to the pair of second supporting members, the third spring having elasticity in both the first direction and the second direction;

    a fourth spring configured to couple the pair of second supporting members to the pair of second movable electrodes, the fourth spring having elasticity in the second direction; and

    a fifth spring configured to couple the pair of second supporting members together, the fifth spring having elasticity in the first direction, whereinthe pair of first supporting members are arranged in the first direction and coupled together by the first spring,the pair of first movable electrodes is located to face the pair of first fixed electrodes in the second direction to form a first capacitor therebetween,the pair of second supporting members is located in a region surrounded by the pair of first supporting members,the pair of second movable electrodes is located to face the pair of second fixed electrodes in the second direction to form a second capacitor therebetween,the acceleration detector detects the acceleration in the second direction based on a change in a capacitance of the first capacitor due to inertial force,the angular velocity detector detects the angular velocity in a third direction perpendicular to each of the first and second directions based on a change in a capacitance of the second capacitor due to inertial force.

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