Micromirror array lens with self-tilted micromirrors
First Claim
1. A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors to function as a lens, wherein each self-tilted micromirror comprisesa) a substrate;
- b) at least one stiction plate configured to be attracted to the substrate by adhesion force;
c) a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate; and
d) at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate;
wherein the designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the self-tilted micromirrors so that each micromirror plate has the required motion.
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Accused Products
Abstract
A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors. Each self-tilted micromirror comprises a substrate, at least one stiction plate configured to be attracted to the substrate by adhesion force, a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate, and at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate. The designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the structure of the micro-mechanical elements of the self-tilted micromirrors so that each micromirror plate has the required motion.
134 Citations
25 Claims
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1. A Micromirror Array Lens with self-tilted micromirrors comprising a plurality of self-tilted micromirrors and configured to form a designed optical surface profile by self-tilted micromirrors to function as a lens, wherein each self-tilted micromirror comprises
a) a substrate; -
b) at least one stiction plate configured to be attracted to the substrate by adhesion force; c) a micromirror plate having a reflective surface, coupled to the stiction plate elastically and configured to have a required motion when the stiction plate is attracted to the substrate; and d) at least one pivot structure disposed between the substrate and the micromirror plate and configured to provide a tilting point or area for the motion of the micromirror plate; wherein the designed optical surface profile determines the required motion of the micromirror plate and a surface profile shape memory is built in the self-tilted micromirrors so that each micromirror plate has the required motion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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Specification