Self-calibrating pressure sensor
First Claim
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1. A self-calibrating device for measuring intracorporeal pressure, comprising:
- a pressure sensor (1) comprising i) a test body (11), ii) a polarization contact (14) within the test body, iii) a membrane (12) constituted by a smaller thickness segment of the test body (11), the membrane being deformable under a pressure of a human-body medium and from an electrostatic force, and iv) a piezoelectric transducer (13) integrated into an upper surface of the membrane (12) and configured for translating a mechanical stress into an electrical signal;
an electrostatic actuator (2) located at a base of the membrane below the sensor (1), the electrostatic actuator (2) connected to a voltage source for receiving an applied electrical voltage, the electrostatic actuator (2) comprising a non-deformable base (21) with a polarizable surface (22),the polarizable surface (22) being in vertical alignment with and below the membrane (12) to constitute two conductive parallel surfaces generating an electrostatic force when a potential difference is applied to the conductive parallel surfaces; and
a cavity (4) located between a lower surface of the membrane (12) and an upper surface of the polarizable surface (22),wherein the electrostatic actuator (2) self-calibrates the sensor by transforming the applied electrical voltage into an electrostatic force of a known amplitude that creates a responsive deformation on the membrane, the piezoelectric transducer (13) translating mechanical stress of the responsive deformation into a responsive electrical signal corresponding to the known electrostatic force, andwherein, in use, the human-body medium acting on the membrane (12) causes a deformation on the membrane (12) and the piezoelectric transducer (13) translates mechanical stress of the deformation into an electrical signal.
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Abstract
A self-calibrating device for measuring intracorporeal pressure, includes:
- A pressure sensor having i) a test body (11) of which a segment of smaller thickness constitutes a membrane that can deform under the action of the pressure of the medium, the membrane being equipped with at least one piezoelectric transducer that can translate a mechanical stress into an electrical signal, and ii) a polarization contact,
- An actuator that is connected to a voltage source, having a non-deformable base, whereby at least one surface of the actuator is polarizable, the pressure sensor being placed above the actuator so that the membrane is in vertical alignment with the polarizable surface (22).
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19 Claims
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1. A self-calibrating device for measuring intracorporeal pressure, comprising:
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a pressure sensor (1) comprising i) a test body (11), ii) a polarization contact (14) within the test body, iii) a membrane (12) constituted by a smaller thickness segment of the test body (11), the membrane being deformable under a pressure of a human-body medium and from an electrostatic force, and iv) a piezoelectric transducer (13) integrated into an upper surface of the membrane (12) and configured for translating a mechanical stress into an electrical signal; an electrostatic actuator (2) located at a base of the membrane below the sensor (1), the electrostatic actuator (2) connected to a voltage source for receiving an applied electrical voltage, the electrostatic actuator (2) comprising a non-deformable base (21) with a polarizable surface (22), the polarizable surface (22) being in vertical alignment with and below the membrane (12) to constitute two conductive parallel surfaces generating an electrostatic force when a potential difference is applied to the conductive parallel surfaces; and a cavity (4) located between a lower surface of the membrane (12) and an upper surface of the polarizable surface (22), wherein the electrostatic actuator (2) self-calibrates the sensor by transforming the applied electrical voltage into an electrostatic force of a known amplitude that creates a responsive deformation on the membrane, the piezoelectric transducer (13) translating mechanical stress of the responsive deformation into a responsive electrical signal corresponding to the known electrostatic force, and wherein, in use, the human-body medium acting on the membrane (12) causes a deformation on the membrane (12) and the piezoelectric transducer (13) translates mechanical stress of the deformation into an electrical signal. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification