Adhesive composition for stealth dicing of semiconductor, adhesive film, and semiconductor device including the adhesive film
First Claim
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1. An adhesive composition for stealth dicing of a semiconductor, the adhesive composition comprising:
- about 100 parts by weight of a polymer resin, the polymer resin having a glass transition temperature of about 5°
C. to about 35°
C.,about 1 to about 20 parts by weight of an epoxy resin, the epoxy resin including a liquid epoxy resin and a solid epoxy resin,about 1 to about 20 parts by weight of a phenolic resin curing agentabout 10 to about 80 parts by weight of an inorganic filler,about 0.1 to about 20 parts by weight of a curing catalyst, andabout 0.1 to about 10 parts by weight of a silane coupling agent,wherein the adhesive composition provides an adhesive having an elastic modulus at 0°
C. of about 1,500 to about 2,500 MPa before curing and an elastic modulus at 175°
C. of about 1.5 to about 2.5 MPa after curing.
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Abstract
An adhesive composition for stealth dicing of a semiconductor, an adhesive film, and a semiconductor device including the adhesive film, the adhesive composition including a polymer resin, the polymer resin having a glass transition temperature of about 5° C. to about 35° C., an epoxy resin, the epoxy resin including a liquid epoxy resin and a solid epoxy resin, a phenolic resin curing agent, an inorganic filler, a curing catalyst, and a silane coupling agent.
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16 Claims
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1. An adhesive composition for stealth dicing of a semiconductor, the adhesive composition comprising:
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about 100 parts by weight of a polymer resin, the polymer resin having a glass transition temperature of about 5°
C. to about 35°
C.,about 1 to about 20 parts by weight of an epoxy resin, the epoxy resin including a liquid epoxy resin and a solid epoxy resin, about 1 to about 20 parts by weight of a phenolic resin curing agent about 10 to about 80 parts by weight of an inorganic filler, about 0.1 to about 20 parts by weight of a curing catalyst, and about 0.1 to about 10 parts by weight of a silane coupling agent, wherein the adhesive composition provides an adhesive having an elastic modulus at 0°
C. of about 1,500 to about 2,500 MPa before curing and an elastic modulus at 175°
C. of about 1.5 to about 2.5 MPa after curing. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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Specification