Thin film transistor including a light-transmitting semiconductor film and active matrix substrate
First Claim
1. A thin film transistor comprising:
- a gate electrode;
a semiconductor layer disposed opposite to the gate electrode with a gate insulating film interposed therebetween;
a source electrode placed above the semiconductor layer and electrically connected with the semiconductor layer; and
a drain electrode placed above the semiconductor layer and electrically connected with the semiconductor layer, whereinthe semiconductor layer includes a light-transmitting semiconductor film and a conductive film placed on the light-transmitting semiconductor film and having a lower light transmittance than the light-transmitting semiconductor film,the conductive film is formed not to protrude from the light-transmitting semiconductor film,the conductive film is formed in separate parts with a channel part interposed between the source electrode and the drain electrode,the source electrode and the drain electrode are connected to the light-transmitting semiconductor film through the conductive film,the conductive film is made of aluminum or an alloy film predominantly composed of aluminum.
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Accused Products
Abstract
A thin film transistor includes a gate electrode, a semiconductor layer, and a source electrode and a drain electrode placed on the semiconductor layer and electrically connected with the semiconductor layer. The semiconductor layer includes a light-transmitting semiconductor film and an ohmic conductive film placed on the light-transmitting semiconductor film and having a lower light transmittance than the light-transmitting semiconductor film. The ohmic conductive film is formed not to protrude from the light-transmitting semiconductor film. The ohmic conductive film is formed in separate parts with a channel part between the source electrode and the drain electrode interposed therebetween. The source electrode and the drain electrode are connected to the light-transmitting semiconductor film through the ohmic conductive film.
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Citations
13 Claims
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1. A thin film transistor comprising:
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a gate electrode; a semiconductor layer disposed opposite to the gate electrode with a gate insulating film interposed therebetween; a source electrode placed above the semiconductor layer and electrically connected with the semiconductor layer; and a drain electrode placed above the semiconductor layer and electrically connected with the semiconductor layer, wherein the semiconductor layer includes a light-transmitting semiconductor film and a conductive film placed on the light-transmitting semiconductor film and having a lower light transmittance than the light-transmitting semiconductor film, the conductive film is formed not to protrude from the light-transmitting semiconductor film, the conductive film is formed in separate parts with a channel part interposed between the source electrode and the drain electrode, the source electrode and the drain electrode are connected to the light-transmitting semiconductor film through the conductive film, the conductive film is made of aluminum or an alloy film predominantly composed of aluminum. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A thin film transistor comprising:
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a gate electrode; a semiconductor layer disposed opposite to the gate electrode with a gate insulating film interposed therebetween; a source electrode placed above the semiconductor layer and electrically connected with the semiconductor layer; and a drain electrode placed above the semiconductor layer and electrically connected with the semiconductor layer, wherein the semiconductor layer includes a light-transmitting semiconductor film and a conductive film placed on the light-transmitting semiconductor film and having a lower light transmittance than the light-transmitting semiconductor film, the conductive film is formed not to protrude from the light-transmitting semiconductor film, the conductive film is formed in separate parts with a channel part interposed between the source electrode and the drain electrode, the source electrode and the drain electrode are connected to the light-transmitting semiconductor film through the conductive film, and the conductive film is made of copper or an alloy film predominantly composed of copper. - View Dependent Claims (13)
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Specification