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Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers

  • US 8,624,471 B1
  • Filed: 07/30/2011
  • Issued: 01/07/2014
  • Est. Priority Date: 07/30/2010
  • Status: Expired due to Fees
First Claim
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1. A microelectromechanical resonator, comprising:

  • a resonator body anchored to a substrate by at least one tether comprising a coupled-ring linear acoustic bandgap structure therein, said coupled-ring linear acoustic bandgap structure comprising a plurality of piezoelectric-on-semiconductor rings connected together by a plurality of piezoelectric-on-semiconductor tether segments.

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