MEMS device comprising oscillations measurements means
First Claim
Patent Images
1. A MEMS apparatus comprising:
- at least one mirror configured to perform an oscillation motion to a pre-defined rotation angle around a mirror rotation;
a sound sensor in direct physical contact with the at least one mirror and configured to sense sound vibrations indicative of movement of the at least one mirror; and
a conversion circuit configured to convert the sound vibrations detected by the sound sensor into one or more electrical signals.
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Abstract
A MEMS apparatus is provided for scanning an optical beam which comprises: a. at least one mirror operative to perform am oscillation motion to a pre-defined rotation angle around a mirror rotation axis; b. a sound sensing means; and c. a conversion means operative to convert sound vibrations detected by the sound sensing means into one or more electrical signals, and wherein the sound sensing means is located at the vicinity of the at least one mirror whereby the movement of the at least one mirror is sensed by the sound sensing means and converted by the conversion means into the one or more electrical signals characterizing the oscillating motion of the at least one mirror.
11 Citations
23 Claims
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1. A MEMS apparatus comprising:
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at least one mirror configured to perform an oscillation motion to a pre-defined rotation angle around a mirror rotation; a sound sensor in direct physical contact with the at least one mirror and configured to sense sound vibrations indicative of movement of the at least one mirror; and a conversion circuit configured to convert the sound vibrations detected by the sound sensor into one or more electrical signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An apparatus, comprising:
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a MEMS mirror; a control circuit configured to drive an oscillating movement of said MEMS mirror; a sensing circuit in direct physical contact with the MEMS mirror and configured to sense sound produced by oscillating movement of said MEMS mirror; wherein said control circuit is further configured to process signals output from said sensing circuit that are indicative of sensed sound to detect at least one of an amplitude and a phase of said oscillating movement. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. An apparatus, comprising:
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a plurality of MEMS mirrors; a control circuit configured to drive oscillating movement of said plurality of MEMS mirrors; a sensing circuit configured to sense sound produced by said oscillating movement of said plurality of MEMS mirrors; wherein said control circuit is further configured to process signals output from said sensing circuit that are indicative of said sensed sound to detect at least one of an amplitude and a phase of said oscillating movement. - View Dependent Claims (18, 19, 20, 21, 22, 23)
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Specification