Coordinate measuring device having positional change sensors

• US 8,627,576 B2
• Filed: 03/29/2012
• Issued: 01/14/2014
• Est. Priority Date: 10/06/2009
• Status: Expired due to Fees

• Current Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Original Assignee: Carl Zeiss Industrielle Messtechnik GmbH (Carl-Zeiss-Stiftung)
• Inventors: Engel, Thomas
• Primary Examiner(s): FULTON, CHRISTOPHER W
• Application Number:
  US13/434,142
• Publication Number:
  US 20120246953A1
• Time in Patent Office: 656 Days
• Field of Search: 335/03, 335/56, 335/58, 335/59, 335/61
• US Class Current: 33/503
• CPC Class Codes: G01B 21/045 Correction of measurements G01B9/02055 takes precedence
• CPC Class Codes: G01B 21/047 Accessories, e.g. for positioning, for tool-setting, for measuring probes

Abstract

The present invention relates to a coordinate measuring machine having a sensor for measuring an object, and having a housing structure for holding and positioning the sensor, wherein a position change sensor is provided in order to detect a change in position of the sensor and of the housing structure. Further, the invention relates to a method for collision detection of a coordinate measuring machine. Last, the invention relates to a method for correcting data of a sensor, measuring in a contactless fashion, in particular an optical sensor, of a coordinate measuring machine. The method according to the second and the third aspects can be executed on a coordinate measuring machine according to the first aspect.

Claims

1. A coordinate measuring machine having a sensor for measuring an object, and having a housing structure for holding and positioning the sensor, wherein at least one position change sensor is provided in order to detect a change in position of the sensor and of the housing structure, wherein the sensor for measuring the object is a tactile sensor, and a first position change sensor is provided in order to detect a first acceleration of the housing structure, and at least one second position change sensor is provided in order to detect a second acceleration of the tactile sensor, wherein a direction of the first acceleration and a direction of the second acceleration are identical.

2. The coordinate measuring machine according to claim 1, wherein a plurality of position change sensors are provided in order to detect a change in position of the sensor and of the housing structure in three spatial directions.

3. The coordinate measuring machine according to claim 1, wherein the at least one position change sensor is designed to detect a linear and/or rotational acceleration.

4. The coordinate measuring machine according to claim 1, wherein the at least one position change sensor is designed to detect a linear and/or rotational speed.

5. A method for collision detection of a coordinate measuring machine having a tactile sensor for measuring an object, and having a housing structure for holding and positioning the tactile sensor, having the following steps:

determining at least one change in position of the tactile sensor and of the housing structure by means of at least one position change sensor,

comparing the at least one change in position with at least one corresponding desired value, and

putting the coordinate measuring machine into a safe state if the at least one change in position deviates by a predetermined measure from the at least one corresponding desired value,

wherein a first acceleration of the tactile sensor is measured by means of at least one first position change sensor, and wherein at least one second acceleration of the housing structure is measured by means of at least one second position change sensor, the first acceleration being the desired value, and the second acceleration being compared with the desired value.

6. The method according to claim 5, wherein the desired value is a maximum value fixed for the coordinate measuring machine, and the putting is performed if the at least one change in position is greater than the maximum value.

7. A method for correcting data of an optical sensor, measuring in a contactless fashion, of a coordinate measuring machine, having the following steps:

starting a measurement operation on the basis of a start signal,

measuring at least one change in position by means of at least one position change sensor, a time profile of the change in position being detected as position change data,

stopping the measurement operation on the basis of a stop signal,

calculating path data of the optical sensor by means of integrating the position change data, and

deconvoluting the image data by means of the path data.

8. The method according to claim 7, wherein the start signal is coupled to a start and the stop signal is coupled to an end of an exposure process of the optical sensor, and wherein the at least one change in position is an acceleration.