Top port multi-part surface mount silicon condenser microphone package
First Claim
1. A solder reflow surface mount microelectromechanical system (MEMS) microphone device, the device comprising:
- a substrate having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the substrate further comprising;
a first plurality of metal pads formed on the upper surface of the substrate;
a second plurality of metal pads formed on the lower surface of the substrate and arranged within a perimeter of the lower surface of the substrate, wherein the second plurality of metal pads are configured to mechanically attach and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and
one or more electrical pathways formed completely within the substrate, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the substrate to one or more of the second plurality of metal pads on the lower surface of the substrate;
a MEMS microphone die mounted on the upper surface of the substrate, and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the substrate;
a lid having an upper surface and a planar lower surface, the lower surface of the lid having an interior region and a peripheral region that completely surrounds the interior region of the lid, the lid further comprising an acoustic port formed in the interior region of the lid and passing through the lid;
a sidewall spacer having a top surface, a bottom surface, and a window having walls that extend between the top surface and the bottom surface of the sidewall spacer, wherein the sidewall spacer has a predefined thickness,wherein the substrate, the sidewall spacer and the lid are attached to each other, wherein the bottom surface of the sidewall spacer is aligned to the peripheral region of the upper surface of the substrate, and the peripheral region of the lower surface of the lid is aligned to the top surface of the sidewall spacer;
wherein the interior region of the upper surface of the substrate, the walls of the window of the sidewall spacer, and the interior region of the lower surface of the lid, when attached, define an acoustic chamber that surrounds the MEMS microphone die; and
wherein the lid, the sidewall spacer, and the substrate of the MEMS microphone device form a housing that has surfaces substantially perpendicular to the lower surface of the substrate.
1 Assignment
0 Petitions
Accused Products
Abstract
The present invention relates to a surface mount package for a silicon condenser microphone and methods for manufacturing the surface mount package. The surface mount package uses a limited number of components which simplifies manufacturing and lowers costs, and features a substrate that performs functions for which multiple components were traditionally required, including providing an interior surface on which the silicon condenser die is mechanically attached, providing an interior surface for making electrical connections between the silicon condenser die and the package, and providing an exterior surface for surface mounting the package to a device'"'"'s printed circuit board and for making electrical connections between package and the device'"'"'s printed circuit board.
-
Citations
30 Claims
-
1. A solder reflow surface mount microelectromechanical system (MEMS) microphone device, the device comprising:
-
a substrate having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the substrate further comprising; a first plurality of metal pads formed on the upper surface of the substrate; a second plurality of metal pads formed on the lower surface of the substrate and arranged within a perimeter of the lower surface of the substrate, wherein the second plurality of metal pads are configured to mechanically attach and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and one or more electrical pathways formed completely within the substrate, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the substrate to one or more of the second plurality of metal pads on the lower surface of the substrate; a MEMS microphone die mounted on the upper surface of the substrate, and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the substrate; a lid having an upper surface and a planar lower surface, the lower surface of the lid having an interior region and a peripheral region that completely surrounds the interior region of the lid, the lid further comprising an acoustic port formed in the interior region of the lid and passing through the lid; a sidewall spacer having a top surface, a bottom surface, and a window having walls that extend between the top surface and the bottom surface of the sidewall spacer, wherein the sidewall spacer has a predefined thickness, wherein the substrate, the sidewall spacer and the lid are attached to each other, wherein the bottom surface of the sidewall spacer is aligned to the peripheral region of the upper surface of the substrate, and the peripheral region of the lower surface of the lid is aligned to the top surface of the sidewall spacer; wherein the interior region of the upper surface of the substrate, the walls of the window of the sidewall spacer, and the interior region of the lower surface of the lid, when attached, define an acoustic chamber that surrounds the MEMS microphone die; and wherein the lid, the sidewall spacer, and the substrate of the MEMS microphone device form a housing that has surfaces substantially perpendicular to the lower surface of the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
-
-
9. A solder reflow surface mount microelectromechanical system (MEMS) microphone device, the device comprising:
-
a bottom portion comprising multiple layers of non-conductive material and having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the bottom portion further comprising; a first plurality of metal pads formed on the upper surface of the bottom portion; a second plurality of metal pads formed on the lower surface of the bottom portion and arranged within a perimeter of the lower surface of the bottom portion, wherein the second plurality of metal pads are configured to mechanically attach and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and one or more electrical pathways formed completely within the bottom portion, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the bottom portion to one or more of the second plurality of metal pads on the lower surface of the bottom portion; a MEMS microphone die mounted on the upper surface of the bottom portion, and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the bottom portion; a top portion having an upper surface and a planar lower surface, the lower surface of the top portion having an interior region and a peripheral region that completely surrounds the interior region of the top portion, the top portion further comprising an acoustic port formed in the interior region of the top portion and passing through the top portion; a sidewall portion having a top surface and a bottom surface, and being comprised of at least one layer of non-conductive material having a predefined thickness, and wherein at least a portion of the top surface of the sidewall portion is coated with conductive material, and the sidewall portion further comprises an opening having walls that extend between the top surface and the bottom surface of the sidewall portion, wherein the bottom portion, the sidewall portion and the top portion are mechanically attached to each other, wherein the bottom surface of the sidewall portion is aligned to the peripheral region of the upper surface of the bottom portion, and the peripheral region of the lower surface of the top portion is aligned to the top surface of the sidewall portion; wherein the interior region of the upper surface of the bottom portion, the walls of the opening of the sidewall portion, and the interior region of the lower surface of the top portion, when attached, define an acoustic chamber that surrounds the MEMS microphone die; and wherein the top portion, sidewall portion, and bottom portion of the MEMS microphone device form a housing that has surfaces substantially perpendicular to the lower surface of the bottom portion. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16)
-
-
17. A solder reflow surface mount microelectromechanical system (MEMS) microphone device, the device comprising:
-
a substrate comprising multiple layers of non-conductive material and having a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the substrate further comprising; a first plurality of metal pads formed on the upper surface of the substrate; a second plurality of metal pads formed on the lower surface of the substrate and arranged within a perimeter of the lower surface of the substrate, wherein the second plurality of metal pads are configured to mechanically couple and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and one or more electrical pathways formed completely within the substrate, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the substrate to one or more of the second plurality of metal pads on the lower surface of the substrate; a MEMS microphone die physically coupled to the upper surface of the substrate, and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the substrate; a lid having an upper surface and a planar lower surface, the lower surface of the lid having an interior region and a peripheral region that completely surrounds the interior region of the lid, the lid further comprising an acoustic port formed in the interior region of the lid and passing through the lid; a sidewall spacer having a top surface and a bottom surface, and being comprised of at least one layer of non-conductive material having a predefined thickness, and wherein at least a portion of the top surface of the sidewall spacer is coated with conductive material, and the sidewall spacer further comprises a window having walls that extend between the top surface and the bottom surface of the sidewall spacer, wherein the lid, sidewall spacer, and substrate are physically coupled to each other, wherein the bottom surface of the sidewall spacer is aligned to the peripheral region of the upper surface of the substrate, and the peripheral region of the lower surface of the lid is aligned to the top surface of the sidewall spacer; wherein the interior region of the upper surface of the substrate, the walls of the window of the sidewall spacer, and the interior region of the lower surface of the lid, when coupled, define an acoustic chamber that surrounds the MEMS microphone die; and wherein the lid, sidewall spacer, and substrate of the MEMS microphone device form a housing that has surfaces substantially perpendicular to the lower surface of the substrate. - View Dependent Claims (18, 19, 20, 21, 22, 23, 24)
-
-
25. A solder reflow surface mount microelectromechanical system (MEMS) microphone device, the device comprising:
-
a printed circuit board having a multi-layer core of conductive and non-conductive materials, wherein the printed circuit board has a planar upper surface and a planar lower surface, the upper surface having an interior region and a peripheral region that completely surrounds the interior region, the printed circuit board further comprising; a first metal layer formed on the upper surface of the printed circuit board and patterned into a first plurality of metal pads, wherein at least one pad of the first plurality of metal pads is formed in the peripheral region of the upper surface of the printed circuit board; a second metal layer formed on the lower surface of the printed circuit board and patterned into a second plurality of metal pads, the second plurality of metal pads arranged within a perimeter of the lower surface of the printed circuit board, wherein the second plurality of metal pads are configured to mechanically couple and electrically couple the surface mount MEMS microphone device to pads on a surface of an external printed circuit board; and one or more electrical pathways formed completely within the printed circuit board, wherein the pathways electrically couple one or more of the first plurality of metal pads on the upper surface of the printed circuit board to one or more of the second plurality of metal pads on the lower surface of the printed circuit board; a MEMS microphone die physically coupled to the upper surface of the printed circuit board and electrically coupled to at least one of the first plurality of metal pads on the upper surface of the printed circuit board; a top portion having an upper surface and a planar lower surface, the lower surface of the top portion having an interior region and a peripheral region that completely surrounds the interior region of the top portion, the top portion further comprising an acoustic port formed in the interior region of the top portion and passing through the top portion, wherein at least a portion of the lower surface of the top portion is coated with conductive material; a sidewall portion having a top surface and a bottom surface, and being comprised of at least one layer of non-conductive material having a predefined thickness, and wherein at least a portion of the top surface of the sidewall portion is coated with conductive material, and the sidewall portion further comprises an opening having walls that extend between the top surface and the bottom surface of the sidewall portion, wherein the top portion, the sidewall portion, and the printed circuit board are physically coupled to each other, wherein the bottom surface of the sidewall portion is aligned to the peripheral region of the upper surface of the printed circuit board and the peripheral region of the lower surface of the top portion is aligned to the top surface of the sidewall portion; wherein the interior region of the upper surface of the printed circuit board, the walls of the opening of the sidewall portion, and the interior region of the lower surface of the top portion, when coupled, define an acoustic chamber that surrounds the MEMS microphone die; and wherein the top portion, sidewall portion, and printed circuit board of the MEMS microphone device form a housing that has surfaces substantially perpendicular to the lower surface of the printed circuit board. - View Dependent Claims (26, 27, 28, 29, 30)
-
Specification