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Out-of plane MEMS resonator with static out-of-plane deflection

  • US 8,629,739 B2
  • Filed: 08/30/2012
  • Issued: 01/14/2014
  • Est. Priority Date: 07/29/2008
  • Status: Active Grant
First Claim
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1. A method of forming a microelectromechanical systems (MEMS) device, the method comprising:

  • forming an electrode on a substrate;

    forming a structural layer on the substrate, the structural layer disposed about a perimeter of the electrode and having a thickness and a residual film stress gradient; and

    releasing the structural layer to form a resonator coupled to the substrate, the residual film stress gradient deflecting a first portion of the resonator out of a plane defined by a surface of the electrode,wherein the resonator comprises a cantilever beam and a first plurality of lattice beams extending along a length of the cantilever beam.

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