Methods of making nanotube switches

• US 8,631,562 B2
• Filed: 11/23/2010
• Issued: 01/21/2014
• Est. Priority Date: 11/02/2004
• Status: Active Grant

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Bertin, Claude L., Segal, Brent M., Rueckes, Thomas, Ward, Jonathan W.
• Primary Examiner(s): PHAN, THIEM D
• Application Number:
  US12/953,076
• Publication Number:
  US 20110083319A1
• Time in Patent Office: 1,155 Days
• Field of Search: 296/22, 298/25, 298/29, 298/74, 257/40, 257/315, 257/414, 257/415, 257/E21.662, 257/E29.174, 257/E29.255, 977/700, 977/932, 977/936, 977/940, 977/943
• US Class Current: 29/622
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 17/16 using electrically-fusible links
• CPC Class Codes: G11C 17/165 Memory cells which are electrically programmed to cause a change in resistance, e.g. to permit multiple resistance steps to be programmed rather than conduct to or from non-conduct change of fuses and antifuses digital stores using resistance random access memory elements G11C13/0002
• CPC Class Codes: G11C 2213/17 Memory cell being a nanowire transistor
• CPC Class Codes: G11C 23/00 Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
• CPC Class Codes: H01H 1/0094 Switches making use of nanoelectromechanical systems [NEMS]
• CPC Class Codes: H01L 2224/16 of an individual bump connector
• CPC Class Codes: H01L 23/60 Protection against electrostatic charges or discharges, e.g. Faraday shields
• CPC Class Codes: H01L 23/62 Protection against overvoltage, e.g. fuses, shunts
• CPC Class Codes: H01L 27/0248 for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
• CPC Class Codes: H01L 27/0251 for MOS devices
• CPC Class Codes: H01L 2924/01019 Potassium [K]
• CPC Class Codes: H01L 2924/0102 Calcium [Ca]
• CPC Class Codes: H01L 2924/01025 Manganese [Mn]
• CPC Class Codes: H01L 2924/01046 Palladium [Pd]
• CPC Class Codes: H01L 2924/01066 Dysprosium [Dy]
• CPC Class Codes: H01L 2924/01068 Erbium [Er]
• CPC Class Codes: H01L 2924/01077 Iridium [Ir]
• CPC Class Codes: H01L 2924/01079 Gold [Au]
• CPC Class Codes: H01L 2924/09701 : Low temperature co-fired ceramic [LTCC]
• CPC Class Codes: H01L 2924/12044 : OLED
• CPC Class Codes: H01L 2924/19103 : interposed between the semiconductor or solid-state device and the die mounting substrate, i.e. chip-on-passive
• CPC Class Codes: H01L 2924/19104 : on the semiconductor or solid-state device, i.e. passive-on-chip
• CPC Class Codes: H01L 2924/19105 : in a side-by-side arrangement on a common die mounting substrate
• CPC Class Codes: H01L 2924/3011 : Impedance
• CPC Class Codes: H05K 1/0259 : Electrostatic discharge [ESD] protection
• CPC Class Codes: H10K 85/221 : Carbon nanotubes
• CPC Class Codes: Y10T 29/49105 : Switch making
• CPC Class Codes: Y10T 29/49117 : Conductor or circuit manufacturing
• CPC Class Codes: Y10T 29/49124 : On flat or curved insulated base, e.g., printed circuit, etc.
• CPC Class Codes: Y10T 29/49204 : Contact or terminal manufacturing

Abstract

An electrostatic discharge (ESD) protection circuit for protecting a protected circuit is coupled to an input pad. The ESD circuit includes a nanotube switch electrically having a control. The switch is coupled to the protected circuit and to a discharge path. The nanotube switch is controllable, in response to electrical stimulation of the control, between a de-activated state and an activated state. The activated state creates a current path so that a signal on the input pad flows to the discharge path to cause the signal at the input pad to remain within a predefined operable range for the protected circuit. The nanotube switch, the input pad, and the protected circuit may be on a semiconductor chip. The nanotube switch may be on a chip carrier. The deactivated and activated states may be volatile or non-volatile depending on the embodiment.

Claims

1. A method of making a non-volatile nanotube switch, comprising:

providing a substrate;

providing a first and second electrodes;

forming a control electrode positioned between the first and second electrodes; and

defining a gap between the control electrode and a switching element by forming the switching element positioned above the substrate and the control electrode wherein the switching element comprises a plurality of nanotubes and is electrically coupled to the first and second electrodes;

wherein the switching element is deflectable towards the control electrode to contact the control electrode in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes;

wherein a distance within the gap between the control electrode and the switching element is such that atomic-level forces between the switching element and the control electrode hold the switching element in contact with the control electrode after the duration of the electrical stimulus.

2. The method of claim 1, wherein the plurality of nanotubes is a derivitized plurality of nanotubes.

3. The method of claim 2, wherein the derivitized plurality of nanotubes is derivitized covalently to form a modified surface.

4. The method of claim 2, wherein the derivitized plurality of nanotubes is derivitized non-covalently to form a modified surface.

5. The method of claim 1, wherein the control electrode is a derivitized control electrode.

6. The method of claim 5, wherein the derivitized control electrode is derivitized covalently to form a modified surface.

7. The method of claim 5, wherein the derivitized control electrode is derivitized non-covalently to form a modified surface.

8. A method of making a non-volatile nanotube switch, comprising:

providing a substrate;

providing a first and second electrodes;

forming a control electrode positioned between the first and second electrodes;

forming a first plurality of substantially parallel nanotubes on the control electrode; and

defining a gap between the first plurality of substantially parallel nanotubes and a switching element by forming the switching element positioned above the substrate and the first plurality of substantially parallel nanotubes wherein the switching element comprises a second plurality of nanotubes and is electrically coupled to the first and second electrodes;

wherein the switching element is deflectable towards the control electrode to contact the first plurality of substantially parallel nanotubes in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes;

wherein a distance within the gap between the first plurality of substantially parallel nanotubes and the switching element is such that atomic-level forces between the switching element and the first plurality of substantially parallel nanotubes hold the switching element in contact with the first plurality of substantially parallel nanotubes after the duration of the electrical stimulus.

9. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second electrodes;

forming a control electrode positioned between the first and second electrodes;

forming a first plurality of substantially parallel nanotubes on the control electrode; and

defining a gap between the first plurality of substantially parallel nanotubes and a switching element by forming the switching element positioned above the substrate and the first plurality of substantially parallel nanotubes wherein the switching element comprises a second plurality of nanotubes and is electrically coupled to the first and second electrodes;

wherein a distance within the gap between the first plurality of substantially parallel nanotubes and the switching element is such that the switching element is deflectable from an un-elongated position towards the control electrode to contact the first plurality of substantially parallel nanotubes in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes;

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

10. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second electrodes;

forming a control electrode positioned between the first and second electrodes; and

defining a gap between the control electrode and a switching element by forming the switching element positioned above the substrate and the control electrode wherein the switching element comprises a derivitized plurality of nanotubes and is electrically coupled to the first and second electrodes;

wherein a distance within the gap between the control electrode and the switching element is such that the switching element is deflectable from an un-elongated position towards the control electrode to contact the control electrode in response to electrical stimulus applied to the control electrode and at least one of the first and second electrodes;

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

11. The method of claim 10, wherein the derivitized plurality of nanotubes is derivitized covalently to form a modified surface.

12. The method of claim 10, wherein the derivitized plurality of nanotubes is derivitized non-covalently to form a modified surface.

13. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second electrodes;

forming a derivitized control electrode positioned between the first and second electrodes; and

defining a gap between the derivitized control electrode and a switching element by forming the switching element positioned above the substrate and the derivitized control electrode wherein the switching element comprises a plurality of nanotubes and is electrically coupled to the first and second electrodes;

wherein a distance within the gap between the derivitized control electrode and the switching element is such that the switching element is deflectable from an un-elongated position towards the derivitized control electrode to contact the derivitized control electrode in response to electrical stimulus applied to the derivitized control electrode and at least one of the first and second electrodes;

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

14. The method of claim 13, wherein the derivitized control electrode is derivitized covalently to form a modified surface.

15. The method of claim 13, wherein the derivitized control electrode is derivitized non-covalently to form a modified surface.

16. A method of making a non-volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first and a second release electrodes positioned between the first and second signal electrodes;

defining a first gap between the first and the second release electrodes and a switching element by forming the switching element positioned above the substrate and the first and the second release electrodes wherein the switching element comprises a first plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second input electrodes above the switching element;

forming a first and a second output electrodes wherein the first output electrode is positioned between the first and second release electrodes and the second output electrode is positioned between the first and second input electrodes; and

defining a second gap between the switching element and a second plurality of substantially parallel nanotubes by forming the second plurality of substantially parallel nanotubes between the switching element and the second output electrode, wherein the second plurality of substantial parallel nanotubes is in contact with the second output electrode;

wherein the switching element is deflectable towards the second output electrode to contact the second plurality of substantially parallel nanotubes in response to electrical stimulus applied to the first and second input electrodes and at least one of the first and second signal electrodes;

wherein a distance within the second gap between the second plurality of substantially parallel nanotubes and the switching element is such that atomic-level forces between the switching element and the second plurality of substantially parallel nanotubes hold the switching element in contact with the second plurality of substantially parallel nanotubes after the duration of the electrical stimulus.

17. A method of making a non-volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first and a second release electrodes positioned between the first and second signal electrodes;

defining a first gap between the first and the second release electrodes and a switching element by forming the switching element positioned above the substrate and the first and the second release electrodes wherein the switching element comprises a first plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second derivitized input electrodes above the switching element;

forming a first output electrode and a second derivitized output electrode, wherein the first output electrode is positioned between the first and second release electrodes and the second derivitized output electrode is positioned between the first and second derivitized input electrodes; and

defining a second gap between the switching element and the second derivitized output electrode;

wherein the switching element is deflectable towards the derivitized second output electrode to contact the second derivitized output electrode in response to electrical stimulus applied to the first and second derivitized input electrodes and at least one of the first and second signal electrodes;

wherein a distance within the second gap between the switching element and the second derivitized output electrode is such that atomic-level forces between the switching element and the second derivitized output and derivitized first and second input electrodes hold the switching element in contact with the second plurality of substantially parallel nanotubes after the duration of the electrical stimulus.

18. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first and a second release electrodes positioned between the first and second signal electrodes;

defining a first gap between a switching element and the first and the second release electrodes by forming the switching element positioned above the substrate and the first and the second release electrodes wherein the switching element comprises a plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second derivitized input electrodes above the switching element;

forming a first output electrode and a derivitized second output electrodes, wherein the first output electrode is positioned between the first and second release electrodes and the derivitized second output electrode is positioned between the derivitized first and second input electrodes; and

defining a second gap between the switching element the derivitized second output electrode;

wherein the switching element is deflectable from an un-elongated position towards the derivitized second output electrode to contact the derivitized second output electrode in response to electrical stimulus applied to the first and second derivitized input electrodes and at least one of the first and second signal electrodes;

wherein a distance within the second gap between the switching element and the derivitized second output electrode is such that elastic forces in the switching element return the switching element to the un-elongated position.

19. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first output electrode positioned between the first and second signal electrodes;

defining a first gap between the first output electrode and a switching element by forming the switching element positioned above the substrate and the first output electrode wherein the switching element comprises a first plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second input electrodes above the switching element;

forming a second output electrode positioned between the first and second input electrodes; and

defining a second gap between the switching element and a second plurality of substantially parallel nanotubes by forming the second plurality of substantially parallel nanotubes between the switching element and the second output electrode, wherein the second plurality of substantial parallel nanotubes is in contact with the second output electrode;

wherein a distance within the second gap between the second plurality of substantially parallel nanotubes and the switching element is such that the switching element is deflectable from an un-elongated position towards the second output electrode to contact the second plurality of substantially parallel nanotubes in response to electrical stimulus applied to the first and second input electrodes and at least one of the first and second signal electrodes.

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

20. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first output electrode positioned between the first and second signal electrodes;

defining a first gap between the first output electrode and a switching element by forming the switching element positioned above the substrate and the first output electrode wherein the switching element comprises a derivitized plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second input electrodes above the switching element;

forming a second output electrode positioned between the first and second input electrodes; and

defining a second gap between the switching element and the second output electrode;

wherein a distance within the second gap between the second output electrode and the switching element is such that the switching element is deflectable from an un-elongated position towards the second output electrode to contact the second output electrode in response to electrical stimulus applied to the first and second input electrodes and at least one of the first and second signal electrodes.

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

21. The method of claim 20, wherein the derivitized plurality of nanotubes is derivitized covalently to form a modified surface.

22. The method of claim 20, wherein the derivitized plurality of nanotubes is derivitized non-covalently to form a modified surface.

23. A method of making a volatile nanotube switch, comprising:

providing a substrate;

providing a first and second signal electrodes;

forming a first output electrode positioned between the first and second signal electrodes;

defining a first gap between the first output electrode and a switching element by forming the switching element positioned above the substrate and the first output electrode wherein the switching element comprises a plurality of nanotubes and is electrically coupled to the first and second signal electrodes;

forming a first and a second input electrodes above the switching element;

forming a derivitized second output electrode positioned between the first and second input electrodes; and

defining a second gap between the switching element and the second output electrode;

wherein a distance within the second gap between the derivitized second output electrode and the switching element is such that the switching element is deflectable from an un-elongated position towards the derivitized second output electrode to contact the derivitized second output electrode in response to electrical stimulus applied to the first and second input electrodes and at least one of the first and second signal electrodes.

wherein elastic forces in the switching element return the switching element to the un-elongated position after the duration of the electrical stimulus.

24. The method of claim 23, wherein the derivitized second output electrode is derivitized covalently to form a modified surface.

25. The method of claim 23, wherein the derivitized second output electrode is derivitized non-covalently to form a modified surface.