Differential temperature and acceleration compensated pressure transducer

• US 8,631,707 B2
• Filed: 03/31/2010
• Issued: 01/21/2014
• Est. Priority Date: 03/31/2010
• Status: Active Grant

• Current Assignee: Kulite Semiconductor Products Inc
• Original Assignee: Kulite Semiconductor Products Inc
• Inventors: Kurtz, Anthony D., Ned, Alexander, Stefanescu, Sorin, Kurtz, Nora
• Primary Examiner(s): Caputo, Lisa
• Assistant Examiner(s): DUNLAP, JONATHAN M
• Application Number:
  US12/751,482
• Publication Number:
  US 20110239772A1
• Time in Patent Office: 1,392 Days
• Field of Search: 737/21, 737/16, 737/15, 737/17, 737/19, 737/20
• US Class Current: 73/721
• CPC Class Codes: G01L 13/025 using diaphragms
• CPC Class Codes: G01L 15/00 Devices or apparatus for measuring two or more fluid pressure values simultaneously
• CPC Class Codes: G01L 19/04 Means for compensating for effects of changes of temperature , i.e. other than electric compensation
• CPC Class Codes: G01L 9/0055 bonded on a diaphragm
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A dual diaphragm pressure transducer, or sensor, with compensation for non-pressure effects is disclosed. The pressure sensor can include two pressure transducers located on separate portions of a chip. The first pressure transducer can be a differential pressure transducer, which produces a signal proportional to one or more applied pressures and includes other non-pressure effects. The second pressure transducer can be sealed in a hermetic chamber and thus can produce a signal proportional only to non-pressure effects. The signals can be combined to produce a signal proportional to the applied pressures with no non-pressure effects. The first and second pressure transducers can be physically and/or electrically isolated to improve sealing between the two pressure transducers and prevent pressure leaks therebetween.

Claims

1. A pressure sensor, comprising:

a chip;

a first pressure sensing device, disposed on a first portion of the chip;

a second pressure sensing device, disposed on a second portion of the chip;

a sealing pattern disposed on a third portion of the chip and between the first pressure sensing device and the second pressure sensing device, and

a contact glass bonded to the chip in an overlying manner;

wherein the sealing pattern is used to physically isolate the first pressure sensing device from the second pressure sensing device.

2. The pressure sensor of claim 1, wherein the first pressure sensing device comprising a differential pressure sensor;

and

wherein the second pressure sensing device comprising a reference pressure sensor;

wherein the differential pressure sensor outputs a first signal proportional to a difference between a first applied pressure and a second applied pressure, wherein the difference includes a non-pressure effects; and

wherein the reference pressure sensor outputs a second signal substantially proportional to the non-pressure effects.

3. The pressure sensor of claim 2, wherein the first signal and the second signal are combined to create a third signal, wherein the third signal is substantially proportional to the difference between the first applied pressure and the second applied pressure.

4. The pressure sensor of claim 2, wherein the reference sensor is enclosed in a hermetically sealed chamber, wherein a first reference pressure is applied to a first side of the reference sensor and a second reference pressure is applied to a second side of the reference sensor, wherein the first reference pressure is substantially equivalent to the second reference pressure.

5. The pressure sensor of claim 1, further comprising:

a first set of three contacts disposed on the chip and electrically connected to the first pressure sensing device to form a first isolated half of Wheatstone bridge; and

a second set of three contacts disposed on the chip and electrically connected to the second pressure sensing device to form a second isolated half of the Wheatstone bridge; and

wherein the first set of contacts and the second set of contacts are used to operate the Wheatstone bridge.

6. The pressure sensor of claim 5, further comprising:

a first span resistor electrically connected to the first isolated half of the Wheatstone bridge; and

a second span resistor electrically connected to the second isolated half of the Wheatstone bridge;

wherein the first span resistor and second span resistor are used to compensate for a difference in a sensitivity of the first isolated half of the Wheatstone bridge and a sensitivity of the second isolated half of the Wheatstone bridge.

7. The pressure sensor of claim 1, further comprising one or more isolation moats, disposed on the chip, to physically isolate the first pressure sensing device from the second pressure sensing device.

8. The pressure sensor of claim 7, further comprising:

a first isolation moat disposed on the chip and formed around the first pressure sensing device; and

a second isolation moat disposed on the chip and formed around the second pressure sensing device.

9. The pressure sensor of claim 1, wherein the sealing pattern is used to electrically isolate the first pressure sensing device from the second pressure sensing device.

10. The pressure sensor of claim 1, wherein the sealing pattern is used to physically isolate the first pressure sensing device from the second pressure sensing device by creating a seal between the contact glass and the chip.

11. A pressure sensor, comprising:

a chip;

a first deflectable diaphragm, disposed on a first portion of the chip;

a first set of two or more piezoresistors disposed on the first deflectable diaphragm, wherein the first set of two or more piezoresistors are used to measure a deflection of the first deflectable diaphragm;

a second deflectable diaphragm, disposed on a second portion of the chip, wherein the second deflectable diaphragm is enclosed in a hermetically sealed chamber, wherein a first reference pressure is applied to a first side of the second deflectable diaphragm and a second reference pressure is applied to a second side of the second deflectable diaphragm, wherein the first reference pressure is substantially equivalent to the second reference pressure;

a second set of two or more piezoresistors disposed on the second deflectable diaphragm, wherein the second set of two or more piezoresistors are used to measure a deflection of the second deflectable diaphragm;

an interconnect for electrically connecting the first set of two or more piezoresistors to the second set of two or more piezoresistors to form a Wheatstone bridge;

a contact glass bonded to the chip in an overlying manner; and

a sealing pattern disposed on the chip to provide a sealing surface for the contact glass and to prevent pressure leaks between the first deflectable diaphragm and the second deflectable diaphragm.

12. The pressure sensor of claim 11, wherein the output of the Wheatstone bridge is substantially proportional to a difference between a first applied pressure and a second applied pressure.

13. The pressure sensor of claim 11, further comprising:

one or more electrical contacts, disposed on the chip, for providing a first connection to the first set of two or more piezoresitors and a second connection to the second set of two or more piezoresistors; and

one or more gaps for electrically isolating each of the one or more electrical contacts;

wherein the sealing pattern forms a sealing surface for the contact glass to prevent a pressure leak along the one or more gaps.

14. The pressure sensor of claim 11, wherein the chip comprises silicon.

15. The pressure sensor of claim 11, wherein each of the first deflectable diaphragm and the second deflectable diaphragms comprise a thinned areas in the chip.

16. A method of manufacturing a pressure sensor, comprising:

disposing a first deflectable diaphragm on a first portion of a chip;

disposing a second deflectable diaphragm on a second portion of the chip;

mounting a first set of one or more piezoresistors on the first diaphragm;

mounting a second set of one or more piezoresistors on the second diaphragm;

connecting the first set of piezoresistors to the second set of piezoresistors using one or more interconnects having one or more gaps between the one or more interconnects to provide electrical isolation, wherein each of the one or more gaps comprising one or more narrowed portions disposed between the first deflectable diaphragm and the second deflectable diaphragm;

oxidizing the chip to form a non-conductive oxide layer to seal over the one or more narrowed portions of the one or more gaps to prevent pressure leaks between the first diaphragm and the second diaphragm on the chip; and

bonding a contact glass to the surface of the non-conductive oxide layer.

17. The method of manufacture of claim 16, wherein

the first deflectable diaphragm is exposed to one or more applied pressures;

and

the second deflectable diaphragm is enclosed in an hermetically sealed chamber such that it measures only non-pressure effects.