Silicon device on Si: C-oi and Sgoi and method of manufacture
First Claim
1. A method of manufacturing a semiconductor structure, comprising:
- forming a substrate;
forming shallow trench isolation (STI) of high temperature stable amorphous material in the substrate;
providing at least one material over a PFET region and an nFET region;
thermally annealing the at least one material into the substrate to form a first island and a second island of mixed material, wherein the first island and the second island have a different relaxed crystal lattice with different dimensions between atoms; and
growing a Si layer on the first island in a first region, wherein the Si layer is strained.
0 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor structure and method of manufacturing is provided. The method of manufacturing includes forming shallow trench isolation (STI) in a substrate and providing a first material and a second material on the substrate. The first material and the second material are mixed into the substrate by a thermal anneal process to form a first island and second island at an nFET region and a pFET region, respectively. A layer of different material is formed on the first island and the second island. The STI relaxes and facilitates the relaxation of the first island and the second island. The first material may be deposited or grown Ge material and the second material may deposited or grown Si:C or C. A strained Si layer is formed on at least one of the first island and the second island.
-
Citations
18 Claims
-
1. A method of manufacturing a semiconductor structure, comprising:
-
forming a substrate; forming shallow trench isolation (STI) of high temperature stable amorphous material in the substrate; providing at least one material over a PFET region and an nFET region; thermally annealing the at least one material into the substrate to form a first island and a second island of mixed material, wherein the first island and the second island have a different relaxed crystal lattice with different dimensions between atoms; and growing a Si layer on the first island in a first region, wherein the Si layer is strained. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
-
-
14. A method of manufacturing a semiconductor structure, comprising:
-
forming a substrate; forming shallow trench isolation (STI) of high temperature stable amorphous material in the substrate, wherein the forming the STI comprises patterning an underlying Si layer; providing at least one material over a PFET region and an nFET region; thermally annealing the at least one material into the substrate to form a first island and a second island of mixed material; and growing a Si layer on the first island in a first region, wherein the Si layer is strained. - View Dependent Claims (15, 16, 17, 18)
-
Specification