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MEMS actuator device

  • US 8,637,961 B2
  • Filed: 11/15/2010
  • Issued: 01/28/2014
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. A method for making an actuator device, the method comprising:

  • providing a wafer comprising a layer of an electrically conductive material; and

    forming a plurality of rotationally symmetrical dies in the electrically conductive material, each die having a plurality of edges, each die including a plurality of radial tabs and complementarily sized radial recesses arranged in alternating fashion and at equal angular increments around the circumfery of the die with either a tab or a recess but not both formed on each edge,wherein, except for dies located at an outer periphery of the wafer, each die is disposed in edge-to-edge near abutment with an adjacent die and each tab of each die is nested within a complementary recess of an adjacent die.

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